Issues in Metal Gate Electrode Selection for Bulk CMOS Devices

Springer Series in Advanced Microelectronics

Volumn 16, Issue , 2005, Pages 415-434

  Misra, V ^a  

^a NONE

Author keywords

Gate Electrode; Metal Gate; Metal Nitrides; Reaction Layer; Work Function

Indexed keywords

EID: 85103569334     PISSN: 14370387     EISSN: 21976643     Source Type: Book Series    
DOI: 10.1007/3-540-26462-0_14     Document Type: Chapter

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