High-resolution high-sensitivity elemental imaging by secondary ion mass spectrometry: From traditional 2D and 3D imaging to correlative microscopy

Nanotechnology

Volumn 26, Issue 43, 2015, Pages

  Wirtz, T ^a   Philipp, P ^a   Audinot, J N ^a   Dowsett, D ^a   Eswara, S ^a  

^a LUXEMBOURG INSTITUTE OF SCIENCE AND TECHNOLOGY   (Luxembourg)

Author keywords

correlative microscopy; high resolution; high sensitivity; imaging; ionisation; secondary ion mass spectrometry; sputtering

Indexed keywords

ELECTRIC FIELDS; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; IMAGING TECHNIQUES; ION SOURCES; IONIZATION; MASS SPECTROMETRY; SCANNING ELECTRON MICROSCOPY; SCANNING PROBE MICROSCOPY; SECONDARY EMISSION; SPECTROMETRY; SPUTTERING; TRANSMISSION ELECTRON MICROSCOPY;

CORRELATIVE MICROSCOPIES; HELIUM ION MICROSCOPIES; HIGH RESOLUTION; HIGH SENSITIVITY; HIGH-LATERAL RESOLUTION; HIGH-RESOLUTION MICROSCOPY; PERFORMANCE AND APPLICATIONS; UNDERLYING PRINCIPLES;

SECONDARY ION MASS SPECTROMETRY;

EID: 84944348586     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/26/43/434001     Document Type: Article

References (152)

1. Biersack J P and Haggmark L G 1980 Nucl. Instrum. Methods 174 257
2. Biersack J P and Eckstein W 1984 Appl. Phys. A 34 73
3. Eckstein W and Möller W 1985 Nucl. Instrum. Methods Phys. Res. B 7/8 727
4. Moller W and Eckstein W 1984 Nucl. Instrum. Methods Phys. Res. B 230 814
5. Eckstein W and Biersack J P 1985 Appl. Phys. A 37 95
6. Moller W, Eckstein W and Biersack J P 1988 Comput. Phys. Commun. 51 355
7. Lindhard J and Scharff M 1961 Phys. Rev. 124 128
8. Wittmaack K 2013 Surf. Sci. Rep. 68 108
9. Wittmaack K 2014 Anal. Chem. 86 5962
10. Slodzian G 1975 Surf. Sci. 48 161
11. Slodzian G 1983 Phys. Scr. T6 54
12. Franzreb K, Lörincik J and Williams P 2004 Surf. Sci. 573 291
13. Pillatsch L, Vanhove N, Dowsett D, Sijbrandij S, Notte J and Wirtz T 2013 Appl. Surf. Sci. 282 908
14. Bernheim M and Slodzian G 1977 J. Physique Lett. 38 L325
15. Bernheim M, Rebière J and Slodzian G 1979 Proc. of the Second Int. Conf. on Secondary Ion Mass Spectrometry (SIMS II) vol 40
16. Wirtz T and Migeon H N 2004 Surf. Sci. 557 57
17. Wirtz T and Migeon H N 2004 Appl. Surf. Sci. 222 186
18. Wirtz T and Migeon H N 2004 Appl. Surf. Sci. 231-2 940
19. Philipp P, Wirtz T, Migeon H N and Scherrer H 2006 Int. J. Mass Spectrom. 253 71
20. Philipp P, Wirtz T, Migeon H N and Scherrer H 2006 Appl. Surf. Sci. 252 7205
21. Philipp P, Wirtz T, Migeon H N and Scherrer H 2007 Int. J. Mass Spectrom. 264 70
22. Philipp P, Wirtz T, Migeon H N and Scherrer H 2007 Int. J. Mass Spectrom. 261 91
23. Barry P R, Philipp P and Wirtz T 2014 J. Phys. Chem. C 118 3443
24. Philipp P, Barry P and Wirtz T 2014 Surf. Interface Anal. 46 7
25. Benninghoven A, Werner H and Wand Rüdenauer F G 1987 Secondary Ion Mass Spectrometry: Basic Concepts, Instrumental Aspects, Applications and Trends (New York: Wiley)
26. Gao Y 1988 J. Appl. Phys. 64 3760
27. Wirtz T, Migeon H N and Scherrer H 2003 Int. J. Mass Spectrom. 225 135
28. Gnaser H and Oechsner H 1994 Surf. Interface Anal. 21 257
29. Gao Y, Marie Y, Saldi F and Migeon H N 1993 Proc. of the Ninth Int. Conf. on Secondary Ion Mass Spectrometry (SIMS IX) vol 406
30. Hillion F, Daigne B, Girard F and Slodzian G 1994 Proc. of the Ninth Int. Conf. on Secondary Ion Mass Spectrometry SIMS IX vol 254
31. Compston W and Clement S W J 2006 Appl. Surf. Sci. 252 7089
32. Oechsner H, Schoof H and Stumpe E 1978 Surf. Sci. 76 343
33. Vandervorst W 2008 Appl. Surf. Sci. 255 805
34. Chan M Y, Lee P S, Ho V and Seng H L 2007 J. Appl. Phys. 102 094307
35. Redinger A, Hönes K, Fontan X, Izquierdo-Roca V, Saucedo E, Valle N, Prez-Rodriguez A and Siebentritt S 2011 Appl. Phys. Lett. 98 101907
36. Wiedenbeck M and Goswami J N 1994 Geochim. Cosmochim. Acta 58 2135
37. Andersen C A and Hinthorne J R 1972 Earth Planet. Sci. Lett. 14 195
38. Hoppe P, Cohen S and Meibom A 2013 Geostand. Geoanal. Res. 37 111
39. McKeegan K D et al 2006 Science 314 1724
40. Walker C T, Bremier S, Portier S, Hasnaoui R and Goll W 2009 J. Nucl. Mater. 393 212
41. Saidy M, Hocking W H, Mouris J F, Garcia P, Carlot G and Pasquet B 2008 J. Nucl. Mater. 372 405
42. Desgranges L, Pasquet B, Valot C and Roure I 2009 J. Nucl. Mater. 385 99
43. Chabala J M, Levi-Setti R and Wang Y L 1988 Appl. Surf. Sci. 32 10
44. Valle N, Drillet J, Bouaziz O and Migeon H N 2006 Appl. Surf. Sci. 252 7051
45. Valle N, Drillet J, Pic A and Migeon H N 2011 Surf. Interface Anal. 43 573
46. De Souza R A and Martin M 2007 Phys. Stat. Sol. C 4 1785
47. McPhail D 2006 J. Mater. Sci. 41 873
48. Lozano-Perez S, Kilburn M R, Yamada T, Terachi T, English C A and Grovenor C R M 2008 J. Nucl. Mater. 374 61
49. Guerquin-Kern J L, Wu T D, Quintana C and Croisy A 2005 Biochim. Biophys. Acta 1724 228
50. Audinot J N, Guignard C, Migeon H N and Hoffmann L 2006 Appl. Surf. Sci. 252 6813
51. Georgantzopoulou A et al 2012 Nanotoxicology 7 1168
52. Audinot J N, Georgantzopoulou A, Piret J P, Gutleb A C, Dowsett D, Migeon H N and Hoffmann L 2013 Surf. Interface Anal. 45 230
53. Piret J P et al 2012 Nanoscale 4 7168
54. Gerard A C, Poncin S, Audinot J N, Denef J F and Colin I M 2009 Am. J. Physiol.-Endoc. M. 296 E1414
55. Senou M et al 2009 Am. J. Physiol.-Endoc. M. 297 E438
56. Peteranderl R and Lechene C 2004 J. Am. Soc. Mass Spectrom. 15 478
57. Zhang D S, Piazza V, Perrin B J, Rzadzinska A K, Poczatek J, Wang M, Prosser H M, Ervasti J M, Corey D P and Lechene C P 2012 Nature 481 520
58. Lechene C P, Luyten Y, McMahon G and Distel D L 2007 Science 317 1563
59. Lau K H, Christlieb M, Schröder M, Sheldon H, Harris A L and Grovenor C R M 2010 J. Microsc. 240 21
60. Berry J P, Galle P, Chassoux D, Escaig F, Linarez-Cruz L G and Lespinats G 1992 Biol. Cell 74 93
61. Guerquin-Kern J L, Hillion F, Madelmont J C, Labarre P, Papon J and Croisy A 2004 Biomed. Eng. Online 3 10
62. Clerc J, Fourré C and Fragu P 1997 Cell Biol. Int. 21 619
63. Legin A A, Schintlmeister A, Jakupec M A, Galanski M, Lichtscheidl I, Wagner M and Keppler B K 2014 Chem. Sci. 5 3135
64. Angelo M et al 2014 Nat. Med. 20 436
65. Hallégot P, Audinot J N and Migeon H N 2006 Appl. Surf. Sci. 252 6706
66. Kojima T, Yamada H, Yamamoto T, Matsushita Y and Fukushima K 2013 Colloids Surf. B 106 140
67. Cabin-Flaman A et al 2011 Anal. Chem. 83 6940
68. Popa R, Weber P K, Pett-Ridge J, Finzi J A, Fallon S J, Hutcheon I D, Nealson K H and Capone D G 2007 ISME J. 1 354
69. Li T, Wu T D, Mazéas L, Toffin L, Guerquin-Kern J L, Leblon G and Bouchez T 2008 Environ. Microbiol. 10 580
70. Behrens S, Lösekann T, Pett-Ridge J, Weber P K, Ng W O, Stevenson B S, Hutcheon I D, Relman D A and Spormann A M 2008 Appl. Environ. Microb. 74 3143
71. Musat N, Halm H, Winterholler B, Hoppe P, Peduzzi S, Hillion F, Horreard F, Amann R, Jörgensen B B and Kuypers M M M 2008 Proc. Natl Acad. Sci. 105 17861
72. Sheik A R, Brussaard C P D, Lavik G, Lam P, Musat N, Krupke A, Littmann S, Strous M and Kuypers M M M 2014 ISME J. 8 212
73. Mangabeira P A et al 2006 Appl. Surf. Sci. 252 3488
74. Smart K E, Kilburn M R, Salter C J, Smith J A C and Grovenor C R M 2007 Int. J. Mass Spectrom. 260 107
75. Moore K L, Schröder M, Lombi E, Zhao F J, McGrath S P, Hawkesford M J, Shewry P R and Grovenor C R M 2010 New Phytol. 185 434
76. Eybe T, Audinot J N, Bohn T, Guignard C, Migeon H N and Hoffmann L 2008 J. Appl. Microbiol. 105 1502
77. Vogel C, Mueller C W, Höschen C, Buegger F, Heister K, Schulz S, Schloter M and Kögel-Knabner I 2014 Nat. Commun. 5 2947
78. Stolarski J, Meibom A, Przenioslo R and Mazur M 2007 Science 318 92
79. Stolarski J, Kitahara M V, Miller D J, Cairns S D, Mazur M and Meibom A 2011 Bmc Evol. Biol. 11 316
80. Gorzelak P, Stolarski J, Dery A, Dubois P, Escrig S and Meibom A 2014 J. Morphol. 275 788
81. Pacton M, Wacey D, Corinaldesi C, Tangherlini M, Kilburn M R, Gorin G E, Danovaro R and Vasconcelos C 2014 Nat. Commun. 5 4298
82. Shirai K, Kawashima T, Sowa K, Watanabe T, Nakamori T, Takahata N, Amakawa H and Sano Y 2008 Geochim. Cosmochim. Acta 72 5386
83. Meibom A, Cuif J P, Houlbreque F, Mostefaoui S, Dauphin Y, Meibom K L and Dunbar R 2008 Geochim. Cosmochim. Acta 72 1555
84. Meibom A, Cuif J P, Hillion F, Constantz B R, Juillet-Leclerc A, Dauphin Y, Watanabe T and Dunbar R B 2004 Geophys. Res. Lett. 31 L23306
85. Sano Y, Kobayashi S, Shirai K, Takahata N, Matsumoto K, Watanabe T, Sowa K and Iwai K 2012 Nat. Commun. 3 761
86. Pohlker C et al 2012 Science 337 1075
87. Sinha B W, Hoppe P, Huth J, Foley S and Andreae M O 2008 Atmos. Chem. Phys. 8 7217
88. Harris E et al 2013 Science 340 727
89. Li Y B et al 2013 J. Petrol. 54 1149
90. Wacey D, Saunders M, Brasier M D and Kilburn M R 2011 Earth Planet. Sci. Lett. 301 393
91. Wacey D, Kilburn M R, Saunders M, Cliff J and Brasier M D 2011 Nature Geosci. 4 698
92. Okada Y, Sawaki Y, Komiya T, Hirata T, Takahata N, Sano Y, Han J and Maruyama S 2014 Gondwana Res. 25 1027
93. Takahata N, Tsutsumi Y and Sano Y 2008 Gondwana Res. 14 587
94. Sano Y U J I, Takahata N A O T, Tsutsumi Y U K I and Miyamoto T O M O 2006 Geochem. J. 40 597
95. Messenger S, Keller L P, Stadermann F J, Walker R M and Zinner E 2003 Science 300 105
96. Floss C, Stadermann F J, Bradley J, Dai Z R, Bajt S and Graham G 2004 Science 303 1355
97. Mostefaoui S, Lugmair G W and Hoppe P 2005 Astrophys. J. 625 271
98. Beck P, Gillet P, El Goresy A and Mostefaoui S 2005 Nature 435 1071
99. Zinner E et al 2007 Geochim. Cosmochim. Acta 71 4786
100. Vollmer C, Hoppe P and Brenker F E 2008 Astrophys. J. 684 611
101. Saal A E, Hauri E H, Cascio M L, Van Orman J A, Rutherford M C and Cooper R F 2008 Nature 454 192
102. Hillion F 2010 Private communication
103. Pillatsch L, Wirtz T, Migeon H N and Scherrer H 2011 Nucl. Instrum. Meth. B 269 1036
104. De Chambost E 2008 Private communication
105. Smith N S, Tesch P P, Martin N P and Boswell R W 2009 Microsc. Microanal. 15 312
106. Tondare V N 2005 J. Vac. Sci. Technol. A 23 1498
107. Swanson L W 1983 Nucl. Instrum. Methods Phys. Res. 218 347
108. Beckman J C, Chang T H P, Wagner A and Pease R F W 1996 J. Vac. Sci. Technol. B 14 3911
109. Hill R, Notte J and Ward B 2008 Phys. Proc. 1 135
110. Scipioni L, Stern L A, Notte J, Sijbrandij S and Griffin B 2008 Adv. Mater. Process. 166 27
111. Notte J, Hill R, McVey S, Farkas L, Percival R and Ward B 2006 Microsc. Microanal. 12 126
112. Ward B W, Notte J A and Economou N P 2006 J. Vac. Sci. Technol. B 24 2871
113. Rahman F H M, McVey S, Farkas L, Notte J A, Tan S and Livengood R H 2012 Scanning 34 129
114. Orloff J, Swanson L W and Utlaut M 1996 J. Vac. Sci. Technol. B 14 3759
115. Castaldo V, Hagen C W, Kruit P, van Veldhoven E and Maas D 2009 J. Vac. Sci. Technol. B 27 3196
116. Caplan J, Niethammer M, Taylor R M II and Czymmek K J 2011 Curr. Opin. Struct. Biol. 21 686
117. Sartori A, Gatz R, Beck F, Rigort A, Baumeister W and Plitzko J M 2007 J. Struct. Biol. 160 135
118. Grabenbauer M, Geerts W J C, Fernadez-Rodriguez J, Hoenger A, Koster A J and Nilsson T 2005 Nat. Methods 2 857
119. Modla S and Czymmek K J 2011 Micron 42 773
120. Mironov A A and Beznoussenko G V 2009 J. Microsc. 235 308
121. Murphy G E, Narayan K, Lowekamp B C, Hartnell L M, Heymann J A W, Fu J and Subramaniam S 2011 J. Struct. Biol. 176 268
122. Ahmed S 2007 PhD Thesis University of Oxford
123. Ngo K Q, Philipp P, Kieffer J and Wirtz T 2012 Surf. Sci. 606 1244
124. Frétigny C 2007 Atomic force microscopy Nanoscience vol 91 (Berlin: Springer)
125. Fleming Y, Wirtz T, Gysin U, Glatzel T, Wegmann U, Meyer E, Maier U and Rychen J 2011 Appl. Surf. Sci. 258 1322
126. Wirtz T, Fleming Y, Gysin U, Glatzel T, Wegmann U, Meyer E, Maier U and Rychen J + 2013 Surf. Interface Anal. 45 513
127. Wirtz T, Fleming Y, Gerard M, Gysin U, Glatzel T, Meyer E, Wegmann U, Maier U, Odriozola A H and Uehli D 2012 Rev. Sci. Instrum. 83 063702
128. Sadewasser S and Glatzel T 2012 Kelvin Probe Force Microscopy (Heidelberg: Springer)
129. Fleming Y and Wirtz T 2015 Beilstein J. Nanotechnol. 6 1091
130. Nguyen C L, Wirtz T, Fleming Y and Metson J B 2013 Appl. Surf. Sci. 265 489
131. Audinot J N, Hamdan A, Grysan P, Fleming Y, Noel C, Kosior F, Henrion G and Belmonte T 2014 Surf. Interface Anal. 46 397
132. Koster N B, Geluk C P E C, Versloot T W, Janssen J P B, Fleming Y and Wirtz T 2014 9235
133. Duday D, Clément F, Lecoq E, Penny C, Audinot J N, Belmonte T, Kutasi K, Cauchie H M and Choquet P 2013 Plasma Process. Polym. 10 864
134. Meyer E, Hug H and Bennewitz R 2004 Introduction to scanning tunneling microscopy Scanning Probe Microscopy 15 (Berlin: Springer)
135. Paul G 2001 Nanotechnology 12 485
136. Williams D B and Carter C B 2008 Transmission Electron Microscopy: A Textbook for Materials Science (New York: Springer)
137. Reimer L and Kohl H 2008 Transmission Electron Microscopy: Physics of Image Formation (New York: Springer)
138. Kabius B, Hartel P, Haider M, Müller H, Uhlemann S, Loebau U, Zach J and Rose H 2009 J. Electron Microsc. 58 147
139. Idrissi H, Turner S, Mitsuhara M, Wang B, Hata S, Coulombier M, Raskin J P, Pardoen T, Van Tendeloo G and Schryvers D 2011 Microsc. Microanal. 17 983
140. Yedra L et al 2015 in preparation
141. Levi-Setti R and Fox T R 1980 Nucl. Instrum. Methods 168 139
142. Hlawacek G, Veligura V, Van Gastel R and Poelsema B 2014 J. Vac. Sci. Technol. B 32
143. Joy D 2013 Helium Ion Microscopy: Principles and Applications (New York: Springer)
144. Maas D J and Van Gastel R 2013 Helium ion microscopy Surface Science Techniques (Berlin: Springer)
145. Fox D, O'Neill A, Kumar S, Wang J J, Coleman J N, Duesberg G S, Donegan J F and Zhang H Z 2013 Nanotechnology 24 335702
146. Bazargan S, Heinig N F, Rios J F and Leung K T 2012 J. Phys. Chem. C 116 4979
147. Vanden Berg-Foels W S, Scipioni L, Huynh C and Wen X 2012 J. Microsc. 246 168
148. Chen X, Udalagama C N B, Chen C B, Bettiol A A, Pickard D S, Venkatesan T and Watt F 2011 Biophys. J. 101 1788
149. Melli M, Polyakov A, Gargas D, Huynh C, Scipioni L, Bao W, Ogletree D F, Schuck P J, Cabrini S and Weber-Bargioni A 2013 Nano Lett. 13 2687
150. Fowley C, Diao Z, Faulkner C C, Kally J, Ackland K, Behan G, Zhang H Z, Deay A M and Coey J M D 2013 J. Phys. D: Appl. Phys. 46 195501
151. Wirtz T, Vanhove N, Pillatsch L, Dowsett D, Sijbrandij S and Notte J 2012 Appl. Phys. Lett. 101 041601
152. Dowsett D, Wirtz T, Vanhove N, Pillatsch L, Sijbrandij S and Notte J 2012 J. Vac. Sci. Technol. B 30 06F602