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Surface Science

Volumn 573, Issue 2, 2004, Pages 291-309

Quantitative study of oxygen enhancement of sputtered ion yields. I. Argon ion bombardment of a silicon surface with O2 flood

(3) Franzreb, Klaus a Lörinčík, Jan a Williams, Peter a

a ARIZONA STATE UNIVERSITY (United States)

Author keywords

Ion bombardment; Ion implantation; Oxidation; Oxygen; Secondary ion mass spectroscopy; Silicon; Sputtering

Indexed keywords

ION BOMBARDMENT; ION IMPLANTATION; OXIDATION; OXYGEN; SECONDARY ION MASS SPECTROMETRY; SPUTTERING; THIN FILMS;

AMORPHOUS NETWORKS; SILICON SPUTTER YIELD; STATISTICAL MODEL;

SILICON;

EID: 10044277163 PISSN: 00396028 EISSN: None Source Type: Journal
DOI: 10.1016/j.susc.2004.10.001 Document Type: Article

Times cited : (51)

References (71)

1
- 0003776074
- Secondary ion mass spectrometry
- John Wiley & Sons, New York
- A. Benninghoven, F.G. Rüdenauer, H.W. Werner (Eds.), Secondary Ion Mass Spectrometry. Basic Concepts, Instrumental Aspects, Applications and Trends, John Wiley & Sons, New York, 1987.
- (1987) Basic Concepts, Instrumental Aspects, Applications and Trends
- Benninghoven, A.¹ Rüdenauer, F.G.² Werner, H.W.³

2
- 0012302182
- Secondary ion mass spectrometry
- John Wiley & Sons, New York
- R.G. Wilson, F.A. Stevie, C.W. Magee (Eds.), Secondary Ion Mass Spectrometry. A Practical Handbook for Depth Profiling and Bulk Impurity Analysis, John Wiley & Sons, New York, 1989.
- (1989) A Practical Handbook for Depth Profiling and Bulk Impurity Analysis
- Wilson, R.G.¹ Stevie, F.A.² Magee, C.W.³

3
- 0017138088
- F. Schulz, K. Wittmaack, Rad. Effects 29 (1976) 31.
- (1976) Rad. Effects , vol.29 , pp. 31
- Schulz, F.¹ Wittmaack, K.²

4
- 0000915147
- V.R. Deline, W. Katz, C.A. Evans Jr., P. Williams, Appl. Phys. Lett. 33 (1978) 832.
- (1978) Appl. Phys. Lett. , vol.33 , pp. 832
- Deline, V.R.¹ Katz, W.² Evans Jr., C.A.³ Williams, P.⁴

5
- 10044292539
- Y.M. Fogel, R.P. Slabospitskii, I.M. Karnaukhov, Soviet Phys. Tech. Phys. 5 (1961) 777.
- (1961) Soviet Phys. Tech. Phys. , vol.5 , pp. 777
- Fogel, Y.M.¹ Slabospitskii, R.P.² Karnaukhov, I.M.³

6
- 0001257222
- R. Castaing, G. Slodzian, J. de Microscopic 1 (1962) 395.
- (1962) J. De Microscopic , vol.1 , pp. 395
- Castaing, R.¹ Slodzian, G.²

7
- 2942520357
- G. Slodzian, J.F. Hennequin, Compt. Rend. Acad. Sci. B 263 (1966) 1246.
- (1966) Compt. Rend. Acad. Sci. B , vol.263 , pp. 1246
- Slodzian, G.¹ Hennequin, J.F.²

8
- 10044226825
- V.I. Shvachko, B.T. Nadykto, Y.M. Fogel, B.M. Vasyutinskii, G.N. Kartmarzov, Soviet Phys. Solid State 7 (1966) 1572.
- (1966) Soviet Phys. Solid State , vol.7 , pp. 1572
- Shvachko, V.I.¹ Nadykto, B.T.² Fogel, Y.M.³ Vasyutinskii, B.M.⁴ Kartmarzov, G.N.⁵

9
- 0345340226
- H.W. Werner, H.A.M. de Grefte, Vak. Tech. 17 (1967) 37.
- (1967) Vak. Tech. , vol.17 , pp. 37
- Werner, H.W.¹ De Grefte, H.A.M.²

10
- 84956226899
- M.L. Yu, Phys. Scr. T 6 (1983) 67.
- (1983) Phys. Scr. T , vol.6 , pp. 67
- Yu, M.L.¹

11
- 0001180231
- M.L. Yu, N.D. Lang, Phys. Rev. Lett. 50 (1983) 127.
- (1983) Phys. Rev. Lett. , vol.50 , pp. 127
- Yu, M.L.¹ Lang, N.D.²

12
- 0000492289
- H. Gnaser, Phys. Rev. B 54 (1996) 16456.
- (1996) Phys. Rev. B , vol.54 , pp. 16456
- Gnaser, H.¹

13
- 0001654712
- H. Gnaser, Phys. Rev. B 54 (1996) 17141.
- (1996) Phys. Rev. B , vol.54 , pp. 17141
- Gnaser, H.¹

14
- 84908709637
- G. Biaise, G. Slodzian, J. de Phys. 35 (1974) 237.
- (1974) J. De Phys. , vol.35 , pp. 237
- Biaise, G.¹ Slodzian, G.²

15
- 0003310146
- P. Williams, C.A. Evans Jr., Surf. Sci. 78 (1978) 324.
- (1978) Surf. Sci. , vol.78 , pp. 324
- Williams, P.¹ Evans Jr., C.A.²

16
- 0019038124
- W. Reuter, K. Wittmaack, Appl. Surf. Sci. 5 (1980) 221.
- (1980) Appl. Surf. Sci. , vol.5 , pp. 221
- Reuter, W.¹ Wittmaack, K.²

17
- 0019615455
- K. Wittmaack, Appl. Surf. Sci. 9 (1981) 315.
- (1981) Appl. Surf. Sci. , vol.9 , pp. 315
- Wittmaack, K.¹

18
- 0019548895
- A.E. Morgan, H.A.M. de Grefte, N. Warmoltz, H.W. Werner, H.J. Tolle, Appl. Surf. Sci. 7 (1981) 372.
- (1981) Appl. Surf. Sci. , vol.7 , pp. 372
- Morgan, A.E.¹ De Grefte, H.A.M.² Warmoltz, N.³ Werner, H.W.⁴ Tolle, H.J.⁵

19
- 0018986247
- A.E. Morgan, H.A.M. de Grefte, H.J. Tolle, J. Vac. Sci. Technol. 18 (1981) 164.
- (1981) J. Vac. Sci. Technol. , vol.18 , pp. 164
- Morgan, A.E.¹ De Grefte, H.A.M.² Tolle, H.J.³

20
- 84913331001
- M.L. Yu, J. Clabes, D.J. Vitkavage, J. Vac. Sci. Technol. A 3 (1985) 1316.
- (1985) J. Vac. Sci. Technol. A , vol.3 , pp. 1316
- Yu, M.L.¹ Clabes, J.² Vitkavage, D.J.³

21
- 0022040335
- M.L. Yu, Nucl. Instrum. Meth. B 15 (1986) 151.
- (1986) Nucl. Instrum. Meth. B , vol.15 , pp. 151
- Yu, M.L.¹

22
- 0022041055
- W. Reuter, Nucl. Instrum. Meth. B 15 (1986) 173.
- (1986) Nucl. Instrum. Meth. B , vol.15 , pp. 173
- Reuter, W.¹

23
- 0000994482
- J.L. Alay, W. Vandervorst, Phys. Rev. B 50 (1994) 15015.
- (1994) Phys. Rev. B , vol.50 , pp. 15015
- Alay, J.L.¹ Vandervorst, W.²

24
- 0026735331
- N. Menzel, K. Wittmaack, Mater. Sci. Eng. B 12 (1992) 91.
- (1992) Mater. Sci. Eng. B , vol.12 , pp. 91
- Menzel, N.¹ Wittmaack, K.²

25
- 4243516176
- W. De Coster, B. Brijs, P. Osiceanu, J. Alay, M. Caymax, W. Vandervorst, Nucl. Instrum. Meth. B 85 (1994) 911.
- (1994) Nucl. Instrum. Meth. B , vol.85 , pp. 911
- De Coster, W.¹ Brijs, B.² Osiceanu, P.³ Alay, J.⁴ Caymax, M.⁵ Vandervorst, W.⁶

26
- 0001302845
- J.S. Williams, M. Petravic, B.G. Svensson, M. Conway, J. Appl. Phys. 76 (1994) 1840.
- (1994) J. Appl. Phys. , vol.76 , pp. 1840
- Williams, J.S.¹ Petravic, M.² Svensson, B.G.³ Conway, M.⁴

27
- 0033076211
- P.N.K. Deenapanray, M. Petravic, Surf. Interface Anal. 27 (1999) 92.
- (1999) Surf. Interface Anal. , vol.27 , pp. 92
- Deenapanray, P.N.K.¹ Petravic, M.²

28
- 0026120277
- S. Tougaard, H.S. Hansen, M. Neumann, Surf. Sci. 244 (1991) 125; S. Tougaard, J. Vac. Sci. Technol. A 21 (2003) 1081.
- (1991) Surf. Sci. , vol.244 , pp. 125
- Tougaard, S.¹ Hansen, H.S.² Neumann, M.³

29
- 0042030908
- S. Tougaard, H.S. Hansen, M. Neumann, Surf. Sci. 244 (1991) 125; S. Tougaard, J. Vac. Sci. Technol. A 21 (2003) 1081.
- (2003) J. Vac. Sci. Technol. A , vol.21 , pp. 1081
- Tougaard, S.¹

30
- 0031490318
- K. Wittmaack, J. Vac. Sci. Technol. A 15 (1997) 2557.
- (1997) J. Vac. Sci. Technol. A , vol.15 , pp. 2557
- Wittmaack, K.¹

31
- 10044246765
- T. Janssens, C. Huyghebaert, W. Vandervorst, A. Gildenpfennig, H. Brongersma, Appl. Surf. Sci. 203 (2003) 30.
- (2003) Appl. Surf. Sci. , vol.203 , pp. 30
- Janssens, T.¹ Huyghebaert, C.² Vandervorst, W.³ Gildenpfennig, A.⁴ Brongersma, H.⁵

32
- 0001471471
- K. Wittmaack, Surf. Sci. 112 (1981) 168.
- (1981) Surf. Sci. , vol.112 , pp. 168
- Wittmaack, K.¹

33
- 0016881615
- H.W. Werner, Acta Electron. 19 (1976) 53.
- (1976) Acta Electron. , vol.19 , pp. 53
- Werner, H.W.¹

34
- 0018983137
- D.P. Leta, G.H. Morrison, Anal. Chem. 52 (1980) 277.
- (1980) Anal. Chem. , vol.52 , pp. 277
- Leta, D.P.¹ Morrison, G.H.²

35
- 2942575322
- P. Williams, K.M. Stika, J.A. Davies, T.E. Jackman, Nucl. Instrum. Meth. 218 (1983) 299.
- (1983) Nucl. Instrum. Meth. , vol.218 , pp. 299
- Williams, P.¹ Stika, K.M.² Davies, J.A.³ Jackman, T.E.⁴

36
- 0009394101
- Practical surface analysis
- D. Briggs, M.P. Seah John Wiley & Sons, Chichester, Chapter 4
- P. Williams, in: D. Briggs, M.P. Seah (Eds.), Practical Surface Analysis, Ion and Neutral Spectroscopy, vol. 2, John Wiley & Sons, Chichester, 1992, p. 177, Chapter 4.
- (1992) Ion and Neutral Spectroscopy , vol.2 , pp. 177
- Williams, P.¹

37
- 2942592235
- R.C. Sobers Jr., K. Franzreb, P. Williams, Appl. Surf. Sci. 231-232 (2004) 729.
- (2004) Appl. Surf. Sci. , vol.231-232 , pp. 729
- Sobers Jr., R.C.¹ Franzreb, K.² Williams, P.³

38
- 10044278811
- Ion implantation was made by Leonard Kroko Inc., Tustin, California
- Ion implantation was made by Leonard Kroko Inc., Tustin, California.

39
- 10044279996
- The reference standard was provided by C.W. Magee; p. 3.2-7 in Ref. [2]
- The reference standard was provided by C.W. Magee; p. 3.2-7 in Ref. [2].

40
- 0347033753
- A. Benninghoven, B. Hagenhoff, H.W. Werner John Wiley & Sons, Chichester UK
- C. Tian, K. Elst, W. Vandervorst, K. Maex, in: A. Benninghoven, B. Hagenhoff, H.W. Werner (Eds.), Secondary Ion Mass Spectrometry SIMS X, John Wiley & Sons, Chichester UK, 1997, p. 203.
- (1997) Secondary Ion Mass Spectrometry SIMS , vol.10 , pp. 203
- Tian, C.¹ Elst, K.² Vandervorst, W.³ Maex, K.⁴

41
- 0642372381
- K. Wittmaack, Nucl. Instrum. Meth. B 2 (1984) 674; K. Wittmaack, Surf. Sci. 90 (1979) 557.
- (1984) Nucl. Instrum. Meth. B , vol.2 , pp. 674
- Wittmaack, K.¹

42
- 0000499876
- K. Wittmaack, Nucl. Instrum. Meth. B 2 (1984) 674; K. Wittmaack, Surf. Sci. 90 (1979) 557.
- (1979) Surf. Sci. , vol.90 , pp. 557
- Wittmaack, K.¹

43
- 0025954157
- A.A. Kosyachkov, Vacuum 42 (1991) 143.
- (1991) Vacuum , vol.42 , pp. 143
- Kosyachkov, A.A.¹

44
- 0342831331
- P. Williams, Appl. Phys. Lett. 36 (1980) 758.
- (1980) Appl. Phys. Lett. , vol.36 , pp. 758
- Williams, P.¹

45
- 4243733293
- P. Williams, J.E. Baker, Nucl. Instrum. Meth. 182/183 (1981) 15.
- (1981) Nucl. Instrum. Meth. , vol.182-183 , pp. 15
- Williams, P.¹ Baker, J.E.²

46
- 0000662468
- P. Williams, Phys. Rev. B 23 (1981) 6187.
- (1981) Phys. Rev. B , vol.23 , pp. 6187
- Williams, P.¹

47
- 0027609426
- S.N. Schauer, R. Thomas, P. Williams, Surf. Sc. 290 (1993) 277.
- (1993) Surf. Sc. , vol.290 , pp. 277
- Schauer, S.N.¹ Thomas, R.² Williams, P.³

48
- 0032114768
- K. Franzreb, A. Pratt, S. Splinter, P. van der Heide, Surf. Interface Anal. 26 (1998) 597.
- (1998) Surf. Interface Anal. , vol.26 , pp. 597
- Franzreb, K.¹ Pratt, A.² Splinter, S.³ Van Der Heide, P.⁴

49
- 0019576241
- D.E. Harrison Jr., J. Appl. Phys. 52 (1981) 4251.
- (1981) J. Appl. Phys. , vol.52 , pp. 4251
- Harrison Jr., D.E.¹

50
- 0003166087
- R. Smith, D.E. Harrison Jr., B.J. Garrison, Phys. Rev. B 40 (1989) 93.
- (1989) Phys. Rev. B , vol.40 , pp. 93
- Smith, R.¹ Harrison Jr., D.E.² Garrison, B.J.³

51
- 0001391731
- S. Prigge, E. Bauer, Adv. Mass Spectrom. 8 (1980) 543.
- (1980) Adv. Mass Spectrom. , vol.8 , pp. 543
- Prigge, S.¹ Bauer, E.²

52
- 0004681486
- M.F. Dumke, T.A. Tombrello, R.A. Weller, R.M. Housley, E.H. Cirlin, Surf. Sc. 124 (1983) 407.
- (1983) Surf. Sc. , vol.124 , pp. 407
- Dumke, M.F.¹ Tombrello, T.A.² Weller, R.A.³ Housley, R.M.⁴ Cirlin, E.H.⁵

53
- 3242696729
- S. K. Tan, K.L. Yeo, A.T.S. Wee, Surf. Interface Anal. 36 (2004) 640.
- (2004) Surf. Interface Anal. , vol.36 , pp. 640
- Tan, S.K.¹ Yeo, K.L.² Wee, A.T.S.³

54
- 10044276481
- personal communication
- A.T.S. Wee, personal communication, 2004.
- (2004)
- Wee, A.T.S.¹

55
- 10044270487
- P.J. Martin, A.R. Bayly, R.J. Macdonald, N.H. Tolk, G.J. Clark, J.C. Kelly, Surf. Sci. 60 (1976) 349.
- (1976) Surf. Sci. , vol.60 , pp. 349
- Martin, P.J.¹ Bayly, A.R.² Macdonald, R.J.³ Tolk, N.H.⁴ Clark, G.J.⁵ Kelly, J.C.⁶

56
- 10044285557
- P. Williams, Int. J. Mass Spectrom. Ion Phys. 53 (1983) 101.
- (1983) Int. J. Mass Spectrom. Ion Phys. , vol.53 , pp. 101
- Williams, P.¹

57
- 0000499784
- P. Williams, Surf. Sci. 90 (1979) 588.
- (1979) Surf. Sci. , vol.90 , pp. 588
- Williams, P.¹

58
- 0002636472
- L. Landau, Phys. Z. Sowjetunion 2 (1932) 46.
- (1932) Phys. Z. Sowjetunion , vol.2 , pp. 46
- Landau, L.¹

59
- 0001332554
- C. Zener, Proc. Royal Soc. Lond. A 137 (1932) 696.
- (1932) Proc. Royal Soc. Lond. A , vol.137 , pp. 696
- Zener, C.¹

60
- 0000535681
- E.C.G. Stückelberg, Helv. Phys. Acta 5 (1932) 369.
- (1932) Helv. Phys. Acta , vol.5 , pp. 369
- Stückelberg, E.C.G.¹

61
- 33846526206
- M.L. Yu, K. Mann, Phys. Rev. Lett. 57 (1986) 1476.
- (1986) Phys. Rev. Lett. , vol.57 , pp. 1476
- Yu, M.L.¹ Mann, K.²

62
- 10044266075
- C. Coudray, G. Slodzian, Phys. Rev. B 49 (1994) 9344.
- (1994) Phys. Rev. B , vol.49 , pp. 9344
- Coudray, C.¹ Slodzian, G.²

63
- 0346601738
- Z. Sroubek, Nucl. Instrum. Methods 194 (1982) 533.
- (1982) Nucl. Instrum. Methods , vol.194 , pp. 533
- Sroubek, Z.¹

64
- 0003089826
- H. Oechsner, Z. Sroubek, Surf. Sci. 127 (1983) 10.
- (1983) Surf. Sci. , vol.127 , pp. 10
- Oechsner, H.¹ Sroubek, Z.²

65
- 0041042983
- K. Mann, M.L. Yu, Phys. Rev. B 35 (1987) 6043.
- (1987) Phys. Rev. B , vol.35 , pp. 6043
- Mann, K.¹ Yu, M.L.²

66
- 0034299490
- K. Wittmaack, Surf. Interface Anal. 29 (2000) 721.
- (2000) Surf. Interface Anal. , vol.29 , pp. 721
- Wittmaack, K.¹

67
- 0015403180
- R.S. Nelson, D.J. Mazey, J.A. Hudson, J. Nucl. Mater. 44 (1972) 318.
- (1972) J. Nucl. Mater. , vol.44 , pp. 318
- Nelson, R.S.¹ Mazey, D.J.² Hudson, J.A.³

68
- 0035341008
- J.J. Serrano, H. De Witte, W. Vandervorst, B. Guzman, J.M. Blanco, J. Appl. Phys. 89 (2001) 5191.
- (2001) J. Appl. Phys. , vol.89 , pp. 5191
- Serrano, J.J.¹ De Witte, H.² Vandervorst, W.³ Guzman, B.⁴ Blanco, J.M.⁵

69
- 10044271633
- A. Benninghoven et al. (Eds.), Elsevier, Amsterdam
- J. Vlekken, D. Polus, M. D'OIieslaeger, W. Vandervorst, L. De Schepper, in: A. Benninghoven et al. (Eds.), Proceedings of SIMS XII, Elsevier, Amsterdam, 2000, p. 341.
- (2000) Proceedings of SIMS , vol.12 , pp. 341
- Vlekken, J.¹ Polus, D.² D'Oiieslaeger, M.³ Vandervorst, W.⁴ De Schepper, L.⁵

70
- 1242284702
- K. Kajihara, L. Skuja, M. Hirano, H. Hosono, Phys. Rev. Lett. 92 (2004) 15504.
- (2004) Phys. Rev. Lett. , vol.92 , pp. 15504
- Kajihara, K.¹ Skuja, L.² Hirano, M.³ Hosono, H.⁴

71
- 0001238765
- G. Biaise, M. Bernheim, Surf. Sci. 47 (1975) 324.
- (1975) Surf. Sci. , vol.47 , pp. 324
- Biaise, G.¹ Bernheim, M.²

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