Design and performance of a combined secondary ion mass spectrometry-scanning probe microscopy instrument for high sensitivity and high-resolution elemental three-dimensional analysis

Review of Scientific Instruments

Volumn 83, Issue 6, 2012, Pages

  Wirtz, Tom ^a   Fleming, Yves ^a   Gerard, Mathieu ^a   Gysin, Urs ^b   Glatzel, Thilo ^b   Meyer, Ernst ^b   Wegmann, Urs ^b,c   Maier, Urs ^c   Odriozola, Aitziber Herrero ^d   Uehli, Daniel ^d  

^a LUXEMBOURG INSTITUTE OF SCIENCE AND TECHNOLOGY   (Luxembourg)

^b UNIVERSITY OF BASEL   (Switzerland)

^c Ferrovac GmbH   (Switzerland)

^d SPECS Zurich GmbH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

3-D IMAGE; 3-D MAPPING; 3D RECONSTRUCTION; AFM; CHEMICAL MAPPING; HIGH RESOLUTION; HIGH SENSITIVITY; HIGH-PRECISION; KELVIN PROBE FORCE MICROSCOPY; LATERAL RESOLUTION; NANOSIMS 50; POLYSTYRENE-POLY(METHYL METHACRYLATE) (PS-PMMA); PROBE MICROSCOPY; SECONDARY IONS; SOFTWARE PROGRAM; SPATIAL RESOLUTION; THREE-DIMENSIONAL ANALYSIS; TOPOGRAPHICAL INFORMATION;

ATOMIC FORCE MICROSCOPY; ESTERS; INSTRUMENTS; POLYSTYRENES; SECONDARY ION MASS SPECTROMETRY;

THREE DIMENSIONAL;

EID: 84863521636     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4724308     Document Type: Review

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