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Volumn 269, Issue 9, 2011, Pages 1036-1040
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Use of a duoplasmatron ion source for negative ion generation
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Author keywords
Beam diameter; Brightness; Duoplasmatron; Ion current; Negative ions
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Indexed keywords
ARC CURRENT;
BEAM DIAMETERS;
BRIGHTNESS;
DUOPLASMATRON;
ELECTROPOSITIVE ELEMENTS;
GAS PRESSURES;
HIGH-RESOLUTION IMAGING;
ION CURRENT;
ION GENERATION;
LATERAL RESOLUTION;
MAGNETIC FIELD STRENGTHS;
NANOSIMS 50;
PRIMARY IONS;
SECONDARY IONS;
TEST BENCHES;
ION BEAMS;
ION SOURCES;
MAGNETIC FIELDS;
NEGATIVE IONS;
SECONDARY EMISSION;
ION BOMBARDMENT;
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EID: 79953731939
PISSN: 0168583X
EISSN: None
Source Type: Journal
DOI: 10.1016/j.nimb.2010.12.087 Document Type: Conference Paper |
Times cited : (15)
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References (15)
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