Energy spread in liquid metal ion sources at low currents

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 6, 1996, Pages 3911-3915

  Beckman, J C ^a   Chang, T H P ^b   Wagner, A ^b   Pease, R F W ^a  

^a Stanford University   (United States)

^b IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0003089795     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588693     Document Type: Article

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