Combined SIMS-SPM instrument for high sensitivity and high-resolution elemental 3D analysis

Surface and Interface Analysis

Volumn 45, Issue 1, 2013, Pages 513-516

  Wirtz, Tom ^a   Fleming, Yves ^a   Gysin, Urs ^b   Glatzel, Thilo ^b   Wegmann, Urs ^b,c   Meyer, Ernst ^b   Maier, Urs ^c   Rychen, Jörg ^d  

^a LUXEMBOURG INSTITUTE OF SCIENCE AND TECHNOLOGY   (Luxembourg)

^b UNIVERSITY OF BASEL   (Switzerland)

^c Ferrovac GmbH   (Switzerland)

^d SPECS Zurich GmbH   (Switzerland)

Author keywords

3D imaging; artifact correction; atomic force microscopy (AFM); prototype instrument; roughness; scanning probe microscopy (SPM); secondary ion mass spectrometry (SIMS); spatial resolution; topography

Indexed keywords

3-D IMAGE; 3-D MAPPING; 3D ANALYSIS; 3D IMAGING; 3D RECONSTRUCTION; ARTIFACT CORRECTION; CHEMICAL MAPPING; DEPTH SCALE; HIGH RESOLUTION; HIGH SENSITIVITY; HIGH-PRECISION; NANOSIMS 50; PROTOTYPE INSTRUMENT; SAMPLE SURFACE; SCANNING PROBE MEASUREMENTS; SCANNING PROBES; SPATIAL RESOLUTION; TOPOGRAPHICAL INFORMATION;

ATOMIC FORCE MICROSCOPY; INSTRUMENTS; ION BOMBARDMENT; SECONDARY ION MASS SPECTROMETRY; SURFACE ROUGHNESS; THREE DIMENSIONAL COMPUTER GRAPHICS; TOPOGRAPHY;

THREE DIMENSIONAL;

EID: 84872859866     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.5010     Document Type: Conference Paper

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