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Chemical Vapor Deposition

Volumn 20, Issue 7-9, 2014, Pages 234-242

Recent advances in atmospheric vapor-phase deposition of transparent and conductive zinc oxide

(4) Illiberi, Andrea a Poodt, Paul a Bolt, Pieter Jan a Roozeboom, Fred a,b

a Solliance (Netherlands)

b EINDHOVEN UNIVERSITY OF TECHNOLOGY (Netherlands)

Author keywords

ALD; Atmospheric pressure; PE CVD; Transparent conductive oxides; Zinc oxide

Indexed keywords

ATMOSPHERIC PRESSURE; ATOMIC LAYER DEPOSITION; COSTS; II-VI SEMICONDUCTORS; OXIDE MINERALS; THIN FILM SOLAR CELLS; THROUGHPUT; TRANSPARENT ELECTRODES; ZINC OXIDE;

ATMOSPHERIC PLASMAS; DEPOSITION PROCESS; FLEXIBLE SUBSTRATE; HIGH THROUGHPUT; LOW COSTS; THERMALLY SENSITIVES; TRANSPARENT CONDUCTIVE OXIDES; VAPOR PHASE DEPOSITION;

CHEMICAL VAPOR DEPOSITION;

EID: 84926228732 PISSN: 09481907 EISSN: 15213862 Source Type: Journal
DOI: 10.1002/cvde.201400056 Document Type: Review

Times cited : (29)

References (55)

1
- 34547899940
- C. G. Granqvist, Sol. Energy Mater. Sol. Cells 2007, 91, 1529.
- (2007) Sol. Energy Mater. Sol. Cells , vol.91 , pp. 1529
- Granqvist, C.G.¹

2
- 57349103386
- K. Ellmer, A. Klein, B. Rech (Eds.), Springer Verlag, Berlin, Heidelberg
- K. Ellmer, A. Klein, B. Rech, (Eds.), Transparent Conductive Zinc Oxide. Basics and Applications in Thin Film Solar Cells, Springer Verlag, Berlin, Heidelberg 2008.
- (2008) Transparent Conductive Zinc Oxide. Basics and Applications in Thin Film Solar Cells

3
- 34547240917
- H. Liang, R. G. Gordon, J. Mater. Sci. 2007, 42, 6388.
- (2007) J. Mater. Sci. , vol.42 , pp. 6388
- Liang, H.¹ Gordon, R.G.²

4
- 36449007170
- W. W. Wenas, A. Yamada, K. Takahashi, M. Yoshino, M. Konagai, J. Appl. Phys. 1991, 70, 7119.
- (1991) J. Appl. Phys. , vol.70 , pp. 7119
- Wenas, W.W.¹ Yamada, A.² Takahashi, K.³ Yoshino, M.⁴ Konagai, M.⁵

5
- 0036136718
- P. Nunes, E. Fortunato, P. Tonello, F. B. Fernandes, P. Vilarinho, R. Martins, Vacuum 2002, 64, 281.
- (2002) Vacuum , vol.64 , pp. 281
- Nunes, P.¹ Fortunato, E.² Tonello, P.³ Fernandes, F.B.⁴ Vilarinho, P.⁵ Martins, R.⁶

6
- 0001138580
- J. Hu, R. G. Gordon, J. Appl. Phys. 1992, 72, 5381.
- (1992) J. Appl. Phys. , vol.72 , pp. 5381
- Hu, J.¹ Gordon, R.G.²

7
- 33749322570
- I. Kim, K. S. Lee, T. S. Lee, J. H. Jeong, B. K. Cheong, Y. J. Baik, W. M. Kim, J. Appl. Phys. 2006, 100, 063701.
- (2006) J. Appl. Phys. , vol.100 , pp. 063701
- Kim, I.¹ Lee, K.S.² Lee, T.S.³ Jeong, J.H.⁴ Cheong, B.K.⁵ Baik, Y.J.⁶ Kim, W.M.⁷

8
- 77649093848
- S. Fay, J. Steinhauser, S. Nicolay, C. Ballif, Thin Solid Films 2010, 518, 2961.
- (2010) Thin Solid Films , vol.518 , pp. 2961
- Fay, S.¹ Steinhauser, J.² Nicolay, S.³ Ballif, C.⁴

9
- 4344639646
- H. Tanaka, K. Ihara, T. Miyata, H. Sato, T. Minami, J. Vac. Sci. Technol. A 2004, 22, 1757.
- (2004) J. Vac. Sci. Technol. A , vol.22 , pp. 1757
- Tanaka, H.¹ Ihara, K.² Miyata, T.³ Sato, H.⁴ Minami, T.⁵

10
- 21644477594
- J. Hu, R. G. Gordon, J. Appl. Phys. 1992, 71, 880.
- (1992) J. Appl. Phys. , vol.71 , pp. 880
- Hu, J.¹ Gordon, R.G.²

11
- 84887421710
- K. W. Johnson, S. Guruvenket, R. A. Sailer, S. P. Ahrenkiel, D. L. Schulz, Thin Solid Films 2013, 548, 210.
- (2013) Thin Solid Films , vol.548 , pp. 210
- Johnson, K.W.¹ Guruvenket, S.² Sailer, R.A.³ Ahrenkiel, S.P.⁴ Schulz, D.L.⁵

12
- 33645215839
- Y. Suzaki, S. Ejima, T. Shikama, S. Azuma, O. Tanaka, T. Kajitani, H. Koinuma, Thin Solid Films 2006, 506, 155.
- (2006) Thin Solid Films , vol.506 , pp. 155
- Suzaki, Y.¹ Ejima, S.² Shikama, T.³ Azuma, S.⁴ Tanaka, O.⁵ Kajitani, T.⁶ Koinuma, H.⁷

13
- 77956059662
- O. V. Penkov, H. J. Lee, V. Y. Plaksin, R. Mansur, J. H. Kim, Thin Solid Films 2010, 518, 6160.
- (2010) Thin Solid Films , vol.518 , pp. 6160
- Penkov, O.V.¹ Lee, H.J.² Plaksin, V.Y.³ Mansur, R.⁴ Kim, J.H.⁵

14
- 77955654987
- S. Strauss, Y. Imanishi, H. Miyazoe, K. Terashima, Thin Solid Films 2010, 518, 5391.
- (2010) Thin Solid Films , vol.518 , pp. 5391
- Strauss, S.¹ Imanishi, Y.² Miyazoe, H.³ Terashima, K.⁴

15
- 80054907906
- A. Chirilə, S. Buecheler, F. Pianezzi, P. Bloesch, C. Gretener, A. R. Uhl, C. Fella, L. Kranz, J. Perrenoud, S. Seyrling, R. Verma, S. Nishiwaki, Y. E. Romanyuk, G. Bilger, A. N. Tiwari, Nature Mater. 2011, 10, 857.
- (2011) Nature Mater. , vol.10 , pp. 857
- Chirilə, A.¹ Buecheler, S.² Pianezzi, F.³ Bloesch, P.⁴ Gretener, C.⁵ Uhl, A.R.⁶ Fella, C.⁷ Kranz, L.⁸ Perrenoud, J.⁹ Seyrling, S.¹⁰ Verma, R.¹¹ Nishiwaki, S.¹² Romanyuk, Y.E.¹³ Bilger, G.¹⁴ Tiwari, A.N.¹⁵

16
- 18444414320
- D. Hariskos, S. Spiering, M. Powalla, Thin Solid Films 2005, 480, 99.
- (2005) Thin Solid Films , vol.480 , pp. 99
- Hariskos, D.¹ Spiering, S.² Powalla, M.³

17
- 84926198571
- M. D. Barankin, E. Gonzalez, A. M. Ladwig, R. F. Hicks, Sol. Energy Mater. Sol. Cells 2005, 89, 37.
- (2005) Sol. Energy Mater. Sol. Cells , vol.89 , pp. 37
- Barankin, M.D.¹ Gonzalez, E.² Ladwig, A.M.³ Hicks, R.F.⁴

18
- 84888638202
- A. Illiberi, F. Grob, C. Frijters, P. Poodt, R. Ramachandra, H. Winands, M. Simor, P. J. Bolt, Prog. Photovoltaics 2013, 21, 1559.
- (2013) Prog. Photovoltaics , vol.21 , pp. 1559
- Illiberi, A.¹ Grob, F.² Frijters, C.³ Poodt, P.⁴ Ramachandra, R.⁵ Winands, H.⁶ Simor, M.⁷ Bolt, P.J.⁸

19
- 77955720046
- P. Poodt, A. Lankhorst, F. Roozeboom, K. Spee, D. Maas, A. Vermeer, Adv.Mater. 2010, 22, 3564.
- (2010) Adv.Mater. , vol.22 , pp. 3564
- Poodt, P.¹ Lankhorst, A.² Roozeboom, F.³ Spee, K.⁴ Maas, D.⁵ Vermeer, A.⁶

20
- 84891393366
- A. Illiberi, F. Roozeboom, P. Poodt, ACS Appl. Mater. Interfaces 2014, 5, 13124.
- (2014) ACS Appl. Mater. Interfaces , vol.5 , pp. 13124
- Illiberi, A.¹ Roozeboom, F.² Poodt, P.³

21
- 84860520926
- M. Steglich, A. Bingel, G. Jia, F. Falk, Sol. Energy Mater. Sol. Cells 2012, 103, 62.
- (2012) Sol. Energy Mater. Sol. Cells , vol.103 , pp. 62
- Steglich, M.¹ Bingel, A.² Jia, G.³ Falk, F.⁴

22
- 0028448551
- H. Sato, T. Minami, T. Miyata, S. Takata, M. Ishii, Thin Solid Films 1994, 246, 65.
- (1994) Thin Solid Films , vol.246 , pp. 65
- Sato, H.¹ Minami, T.² Miyata, T.³ Takata, S.⁴ Ishii, M.⁵

23
- 0028742575
- T. Minami, H. Sato, H. Sonohara, S. Takata, T. Miyata, I. Fukuda, Thin Solid Films 1994, 253, 14.
- (1994) Thin Solid Films , vol.253 , pp. 14
- Minami, T.¹ Sato, H.² Sonohara, H.³ Takata, S.⁴ Miyata, T.⁵ Fukuda, I.⁶

24
- 0001649163
- Y. Natsuma, H. Sakata, T. Hirayama, H. Yanagida, J. Appl. Phys. 1992, 72, 4203.
- (1992) J. Appl. Phys. , vol.72 , pp. 4203
- Natsuma, Y.¹ Sakata, H.² Hirayama, T.³ Yanagida, H.⁴

25
- 36749104932
- F. T. J. Smith, Appl. Phys. Lett. 1983, 43, 1108.
- (1983) Appl. Phys. Lett. , vol.43 , pp. 1108
- Smith, F.T.J.¹

26
- 0000245862
- N. D. Kumar, M. N. Kamalasanan, S. Chandra, Appl. Phys. Lett. 1994, 65, 1373.
- (1994) Appl. Phys. Lett. , vol.65 , pp. 1373
- Kumar, N.D.¹ Kamalasanan, M.N.² Chandra, S.³

27
- 0032685743
- K. Haga, F. Katahira, H. Watanabe, Thin Solid Films 1999, 343, 145.
- (1999) Thin Solid Films , vol.343 , pp. 145
- Haga, K.¹ Katahira, F.² Watanabe, H.³

28
- 0001180668
- J. Auld, D. J. Houlton, A. C. Jones, S. A. Rushworth, M. A. Malik, P. O'Brien, G. W. Critchlow, J. Mater. Chem. 1994, 4, 1249.
- (1994) J. Mater. Chem. , vol.4 , pp. 1249
- Auld, J.¹ Houlton, D.J.² Jones, A.C.³ Rushworth, S.A.⁴ Malik, M.A.⁵ O'Brien, P.⁶ Critchlow, G.W.⁷

29
- 79955479521
- A. Illiberi, B. Kniknie, J. van Deelen, H. L. A. H. Steijvers, D. Habets, P. J. P. M. Simons, A. C. Janssen, E. H. A. Beckers, Sol. Energy Mater. Sol. Cells 2011, 95, 1955.
- (2011) Sol. Energy Mater. Sol. Cells , vol.95 , pp. 1955
- Illiberi, A.¹ Kniknie, B.² Van Deelen, J.³ Steijvers, H.L.A.H.⁴ Habets, D.⁵ Simons, P.J.P.M.⁶ Janssen, A.C.⁷ Beckers, E.H.A.⁸

30
- 84859064427
- A. Illiberi, P. J. P. M. Simons, B. Kniknie, J. van Deelen, M. Theelen, M. Zeman, M. Tijssen, W. Zijlmans, H. L. A. H. Steijvers, D. Habets, A. C. Janssen, E. H. A. Beckers, J. Cryst. Growth 2012, 347, 56.
- (2012) J. Cryst. Growth , vol.347 , pp. 56
- Illiberi, A.¹ Simons, P.J.P.M.² Kniknie, B.³ Van Deelen, J.⁴ Theelen, M.⁵ Zeman, M.⁶ Tijssen, M.⁷ Zijlmans, W.⁸ Steijvers, H.L.A.H.⁹ Habets, D.¹⁰ Janssen, A.C.¹¹ Beckers, E.H.A.¹²

31
- 13744262311
- A. H. M. Smets, W. M. M. Kessels, M. C. M. van de Sanden, Appl. Phys. Lett. 2005, 86, 041909.
- (2005) Appl. Phys. Lett. , vol.86 , pp. 041909
- Smets, A.H.M.¹ Kessels, W.M.M.² Van De Sanden, M.C.M.³

32
- 84926167746
- M. A. Makeev, A. L. Barabasi, Appl. Phys. Lett. 1997, 71, 2018.
- (1997) Appl. Phys. Lett. , vol.71 , pp. 2018
- Makeev, M.A.¹ Barabasi, A.L.²

33
- 84864866310
- G. Dingemans, M. C. M. van de Sanden, W. M. M. Kessels, Plasma Process. Polym. 2012, 9, 761.
- (2012) Plasma Process. Polym. , vol.9 , pp. 761
- Dingemans, G.¹ Van De Sanden, M.C.M.² Kessels, W.M.M.³

34
- 60349122830
- P. Liu, G. She, Z. Liao, Y. Wang, Z. Wang, W. Shi, X. Zhang, S. T. Lee, D. Chen, Appl. Phys. Lett. 2009, 94, 063120.
- (2009) Appl. Phys. Lett. , vol.94 , pp. 063120
- Liu, P.¹ She, G.² Liao, Z.³ Wang, Y.⁴ Wang, Z.⁵ Shi, W.⁶ Zhang, X.⁷ Lee, S.T.⁸ Chen, D.⁹

35
- 84872838365
- 1447, pag. mrss 12-1447-v04-03, Cambridge University Press
- A. Illiberi, B. Kniknie, J. van Deelen, H. L. A. H. Steijvers, D. Habets, P. J. P. M. Simons, A. C. Janssen, E. H. A. Beckers, MRS Proceedings, Vol. 1447, pag. mrss 12-1447-v04-03, Cambridge University Press 2012.
- (2012) MRS Proceedings
- Illiberi, A.¹ Kniknie, B.² Van Deelen, J.³ Steijvers, H.L.A.H.⁴ Habets, D.⁵ Simons, P.J.P.M.⁶ Janssen, A.C.⁷ Beckers, E.H.A.⁸

36
- 22144438031
- B. Y. Oh, M. C. Jeong, D. S. Kim, W. Lee, J. M. Myoung, J. Cryst. Growth. 2005, 281, 475.
- (2005) J. Cryst. Growth. , vol.281 , pp. 475
- Oh, B.Y.¹ Jeong, M.C.² Kim, D.S.³ Lee, W.⁴ Myoung, J.M.⁵

37
- 33749233582
- S. Lany, A. Zunger, Phys. Rev. B 2005, 72, 035215.
- (2005) Phys. Rev. B , vol.72 , pp. 035215
- Lany, S.¹ Zunger, A.²

38
- 84887896004
- A. Illiberi, R. Scherpenborg, M. Theelen, P. Poodt, F. Roozeboom, J. Vac. Sci. Technol. A 2013, 31, 061504.
- (2013) J. Vac. Sci. Technol. A , vol.31 , pp. 061504
- Illiberi, A.¹ Scherpenborg, R.² Theelen, M.³ Poodt, P.⁴ Roozeboom, F.⁵

39
- 84855584986
- P. Poodt, D. C. Cameron, E. Dickey, S. M. George, V. Kuznetsov, G. N. Parsons, F. Roozeboom, G. Sundaram, A. Vermeer, J. Vac. Sci. Technol. A 2012, 30, 010802-1.
- (2012) J. Vac. Sci. Technol. A , vol.30 , pp. 10802-10801
- Poodt, P.¹ Cameron, D.C.² Dickey, E.³ George, S.M.⁴ Kuznetsov, V.⁵ Parsons, G.N.⁶ Roozeboom, F.⁷ Sundaram, G.⁸ Vermeer, A.⁹

40
- 75649140552
- S. M. George, Chem. Rev. 2010, 110, 111.
- (2010) Chem. Rev. , vol.110 , pp. 111
- George, S.M.¹

41
- 84855609774
- J. S. Jur, G. N. Parsons, ACS Appl. Mater. Interfaces 2011, 3, 299.
- (2011) ACS Appl. Mater. Interfaces , vol.3 , pp. 299
- Jur, J.S.¹ Parsons, G.N.²

42
- 0034844622
- K. Kaiya, N. Yoshii, K. Omichi, N. Takahashi, T. Nakamura, S. Okamoto, H. Yamamoto, Chem. Mater. 2001, 13, 1952.
- (2001) Chem. Mater. , vol.13 , pp. 1952
- Kaiya, K.¹ Yoshii, N.² Omichi, K.³ Takahashi, N.⁴ Nakamura, T.⁵ Okamoto, S.⁶ Yamamoto, H.⁷

43
- 0037465334
- J. W. Elam, S. M. George, Chem. Mater. 2003, 15, 1020.
- (2003) Chem. Mater. , vol.15 , pp. 1020
- Elam, J.W.¹ George, S.M.²

44
- 72949108714
- J. S. Na, Q. Peng, G. Scarel, G. N. Parsons, Chem. Mater. 2009, 21, 5585.
- (2009) Chem. Mater. , vol.21 , pp. 5585
- Na, J.S.¹ Peng, Q.² Scarel, G.³ Parsons, G.N.⁴

45
- 84880361531
- Y. Wu, P. M. Hermkens, B. W. H. van de Loo, H. C. M. Knoops, S. E. Potts, M. A. Verheijen, F. Roozeboom, W. M. M. Kessels, J. Appl. Phys. 2013, 114, 024308.
- (2013) J. Appl. Phys. , vol.114 , pp. 024308
- Wu, Y.¹ Hermkens, P.M.² Van De Loo, B.W.H.³ Knoops, H.C.M.⁴ Potts, S.E.⁵ Verheijen, M.A.⁶ Roozeboom, F.⁷ Kessels, W.M.M.⁸

46
- 79551654826
- D. J. Lee, H. M. Kim, J. Y. Kwon, H. Choi, S. H. Kim, K. B. Kim, Adv. Funct. Mater. 2011, 21, 448.
- (2011) Adv. Funct. Mater. , vol.21 , pp. 448
- Lee, D.J.¹ Kim, H.M.² Kwon, J.Y.³ Choi, H.⁴ Kim, S.H.⁵ Kim, K.B.⁶

47
- 80053504614
- A. Yanguas-Gil, K. E. Peterson, J. W. Elam, Chem. Mater. 2011, 23, 4295.
- (2011) Chem. Mater. , vol.23 , pp. 4295
- Yanguas-Gil, A.¹ Peterson, K.E.² Elam, J.W.³

48
- 84888619690
- Y. Wu, S. E. Potts, P. M. Hermkens, H. C. M. Knoops, F. Roozeboom, W. M. M. Kessels, Chem. Mater. 2013, 25, 4619.
- (2013) Chem. Mater. , vol.25 , pp. 4619
- Wu, Y.¹ Potts, S.E.² Hermkens, P.M.³ Knoops, H.C.M.⁴ Roozeboom, F.⁵ Kessels, W.M.M.⁶

49
- 84901838584
- H. K. Park, J. Heo, Appl. Surf. Sci. 2014, 309, 133.
- (2014) Appl. Surf. Sci. , vol.309 , pp. 133
- Park, H.K.¹ Heo, J.²

50
- 44049087683
- D. H. Levy, D. Freeman, S. F. Nelson, P. J. Cowdery-Corvan, L. M. Irvinget, Appl. Phys. Lett. 2008, 92, 192101.
- (2008) Appl. Phys. Lett. , vol.92 , pp. 192101
- Levy, D.H.¹ Freeman, D.² Nelson, S.F.³ Cowdery-Corvan, P.J.⁴ Irvinget, L.M.⁵

51
- 84855571978
- D. H. Levy, S. F. Nelson, J. Vac. Sci. Technol. A 2012, 30, 018501.
- (2012) J. Vac. Sci. Technol. A , vol.30 , pp. 018501
- Levy, D.H.¹ Nelson, S.F.²

52
- 84855585776
- S. F. Nelson, D. H. Levy, L. W. Tutt, M. Burberry, J. Vac. Sci. Technol. A 2012, 30, 01A154.
- (2012) J. Vac. Sci. Technol. A , vol.30 , pp. 01A154
- Nelson, S.F.¹ Levy, D.H.² Tutt, L.W.³ Burberry, M.⁴

53
- 84856264398
- A. Illiberi, F. Roozeboom, P. Poodt, ACS Appl. Mater. Interfaces 2012, 4, 268.
- (2012) ACS Appl. Mater. Interfaces , vol.4 , pp. 268
- Illiberi, A.¹ Roozeboom, F.² Poodt, P.³

54
- 84894678371
- C. R. Ellinger, S. F. Nelson, Chem. Mater. 2014, 26, 1514.
- (2014) Chem. Mater. , vol.26 , pp. 1514
- Ellinger, C.R.¹ Nelson, S.F.²

55
- 37149016673
- J. W. Elam, J. A. Libera, M. J. Pellin, P. C. Stair, Appl. Phys. Lett. 2007, 91, 243105.
- (2007) Appl. Phys. Lett. , vol.91 , pp. 243105
- Elam, J.W.¹ Libera, J.A.² Pellin, M.J.³ Stair, P.C.⁴

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