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Volumn 21, Issue 8, 2013, Pages 1559-1566

High rate (∼7 nm/s), atmospheric pressure deposition of ZnO front electrode for Cu(In,Ga)Se2 thin-film solar cells with efficiency beyond 15%

Author keywords

atmospheric pressure; plasma enhanced chemical vapor deposition; solar cells; thin films; transparent conductive oxides; zinc oxide

Indexed keywords

AVERAGE EFFICIENCIES; GLASS SUBSTRATES; HIGH DEPOSITION RATES; LOW TEMPERATURES; NEAR ULTRAVIOLET; ROOM TEMPERATURE; THIN-FILM SOLAR CELLS; TRANSPARENT CONDUCTIVE OXIDES;

EID: 84888638202     PISSN: 10627995     EISSN: 1099159X     Source Type: Journal    
DOI: 10.1002/pip.2423     Document Type: Article
Times cited : (16)

References (42)
  • 1
    • 34547899940 scopus 로고    scopus 로고
    • Transparent conductors as solar energy materials: A panoramic review
    • Granqvist CG,. Transparent conductors as solar energy materials: A panoramic review. Solar Energy Materials and Solar Cells 2007; 91: 1529-1598.
    • (2007) Solar Energy Materials and Solar Cells , vol.91 , pp. 1529-1598
    • Granqvist, C.G.1
  • 2
    • 57349103386 scopus 로고    scopus 로고
    • Ellmer K. Klein A. Rech B. (eds). Springer Series in Materials Science. Springer: Berlin Heidelberg New York.
    • Ellmer K, Klein A, Rech B, (eds). Transparent Conductive Zinc Oxide. Basics and Applications in Thin Film Solar Cells, Springer Series in Materials Science. Springer: Berlin Heidelberg New York, 2008; 104.
    • (2008) Transparent Conductive Zinc Oxide. Basics and Applications in Thin Film Solar Cells , pp. 104
  • 4
    • 33747455324 scopus 로고    scopus 로고
    • Role of hydrogen plasma on electrical and optical properties of ZGO, ITO and IZO transparent and conductive coatings
    • Raniero L, Ferreira I, Pimentel A, Goncalves A, Canhola P, Fortunato E, Martins R,. Role of hydrogen plasma on electrical and optical properties of ZGO, ITO and IZO transparent and conductive coatings. Thin Solid Films 2006; 511: 295-298.
    • (2006) Thin Solid Films , vol.511 , pp. 295-298
    • Raniero, L.1    Ferreira, I.2    Pimentel, A.3    Goncalves, A.4    Canhola, P.5    Fortunato, E.6    Martins, R.7
  • 5
    • 21644477594 scopus 로고
    • Textured aluminum-doped zinc oxide thin films from atmospheric pressure chemical-vapor deposition
    • Hu J, Gordon RG,. Textured aluminum-doped zinc oxide thin films from atmospheric pressure chemical-vapor deposition. Journal of Applied Physics 1992; 71: 880-890.
    • (1992) Journal of Applied Physics , vol.71 , pp. 880-890
    • Hu, J.1    Gordon, R.G.2
  • 6
    • 34548460233 scopus 로고    scopus 로고
    • Evolution of the electrical and structural properties during the growth of Al doped ZnO films by remote plasma-enhanced metalorganic chemical vapor deposition
    • Volintiru I, Creatore M, Kniknie BJ, Spee CIMA, van de Sanden MCM,. Evolution of the electrical and structural properties during the growth of Al doped ZnO films by remote plasma-enhanced metalorganic chemical vapor deposition. Journal of Applied Physics 2007; 102: 043709-043717.
    • (2007) Journal of Applied Physics , vol.102 , pp. 043709-043717
    • Volintiru, I.1    Creatore, M.2    Kniknie, B.J.3    Spee, C.4    Van De Sanden, M.C.M.5
  • 8
    • 17144469759 scopus 로고    scopus 로고
    • ZnO transparent conducting films deposited by pulsed laser deposition for solar cell applications
    • Matsubara K, Fons P, Iwata K, Yamada A, Sakurai K, Tampo H, Niki S,. ZnO transparent conducting films deposited by pulsed laser deposition for solar cell applications. Thin Solid Films 2003; 431: 369-372.
    • (2003) Thin Solid Films , vol.431 , pp. 369-372
    • Matsubara, K.1    Fons, P.2    Iwata, K.3    Yamada, A.4    Sakurai, K.5    Tampo, H.6    Niki, S.7
  • 9
    • 0020833860 scopus 로고
    • Highly transparent and conducting indium-doped zinc oxide films by spray pyrolysis
    • Major S, Banerjee A, Chopra KL,. Highly transparent and conducting indium-doped zinc oxide films by spray pyrolysis. Thin Solid Films 1983; 108: 333-340.
    • (1983) Thin Solid Films , vol.108 , pp. 333-340
    • Major, S.1    Banerjee, A.2    Chopra, K.L.3
  • 10
    • 54049111016 scopus 로고    scopus 로고
    • Investigation of correlation between the microstructure and electrical properties of sol-gel derived ZnO based thin films
    • Zhu MW, Gong J, Sun C, Xia JH, Jiang X,. Investigation of correlation between the microstructure and electrical properties of sol-gel derived ZnO based thin films. Journal of Applied Physics 2008; 104: 073113-073119.
    • (2008) Journal of Applied Physics , vol.104 , pp. 073113-073119
    • Zhu, M.W.1    Gong, J.2    Sun, C.3    Xia, J.H.4    Jiang, X.5
  • 11
    • 0028761966 scopus 로고
    • Atomic layer epitaxy growth of doped zinc oxide thin films from organometals
    • Lujala V, Skarp J, Tammenmaa M, Suntola T,. Atomic layer epitaxy growth of doped zinc oxide thin films from organometals. Applied Surface Science 1984; 82: 34-40.
    • (1984) Applied Surface Science , vol.82 , pp. 34-40
    • Lujala, V.1    Skarp, J.2    Tammenmaa, M.3    Suntola, T.4
  • 17
    • 34248394679 scopus 로고    scopus 로고
    • Atmospheric-pressure plasmas for wide-area thin-film deposition and etching
    • Hopfe V, Sheel DW,. Atmospheric-pressure plasmas for wide-area thin-film deposition and etching. Plasma Processes and Polymers 2007; 4: 253-265.
    • (2007) Plasma Processes and Polymers , vol.4 , pp. 253-265
    • Hopfe, V.1    Sheel, D.W.2
  • 18
    • 34547689095 scopus 로고    scopus 로고
    • Low resistivity Ga-doped ZnO thin films of less than 100-nm thickness prepared by ion plating with direct current arc discharge
    • Yamada T, Miyake A, Kishimoto S, Makino H, Yamamoto N, Yamamoto T,. Low resistivity Ga-doped ZnO thin films of less than 100-nm thickness prepared by ion plating with direct current arc discharge. Applied Physics Letters 2007; 91: 051915-051917.
    • (2007) Applied Physics Letters , vol.91 , pp. 051915-051917
    • Yamada, T.1    Miyake, A.2    Kishimoto, S.3    Makino, H.4    Yamamoto, N.5    Yamamoto, T.6
  • 20
    • 77949482918 scopus 로고    scopus 로고
    • Study of plasma enhanced chemical vapor deposition of ZnO films by non-thermal plasma jet at atmospheric pressure
    • Ito Y, Sakai O, Tachibana K,. Study of plasma enhanced chemical vapor deposition of ZnO films by non-thermal plasma jet at atmospheric pressure. Thin Solid Films 2010; 518: 3513-3516.
    • (2010) Thin Solid Films , vol.518 , pp. 3513-3516
    • Ito, Y.1    Sakai, O.2    Tachibana, K.3
  • 22
    • 34147137073 scopus 로고    scopus 로고
    • Plasma-enhanced chemical vapor deposition of zinc oxide at atmospheric pressure and low temperature
    • Barankin MD, Gonzalez E, Ladwig AM, Hicks RF,. Plasma-enhanced chemical vapor deposition of zinc oxide at atmospheric pressure and low temperature. Solar Energy Materials and Solar Cells 2007; 91: 924-930.
    • (2007) Solar Energy Materials and Solar Cells , vol.91 , pp. 924-930
    • Barankin, M.D.1    Gonzalez, E.2    Ladwig, A.M.3    Hicks, R.F.4
  • 23
    • 79952317666 scopus 로고    scopus 로고
    • Deposition of zinc oxide thin films by an atmospheric pressure plasma jet
    • Hsu Y-W, Li H-C, Yang Y-J, Hsu C-c,. Deposition of zinc oxide thin films by an atmospheric pressure plasma jet. Thin Solid Films 2011; 519: 3095-3099.
    • (2011) Thin Solid Films , vol.519 , pp. 3095-3099
    • Hsu, Y.-W.1    Li, H.-C.2    Yang, Y.-J.3    Hsu, C.-C.4
  • 25
    • 77955654987 scopus 로고    scopus 로고
    • Localized high-rate deposition of zinc oxide films at atmospheric pressure using inductively coupled microplasma
    • Stauss S, Imanishi Y, Miyazoe H, Terashima K,. Localized high-rate deposition of zinc oxide films at atmospheric pressure using inductively coupled microplasma. Thin Solid Films 2010; 518: 5391-5395.
    • (2010) Thin Solid Films , vol.518 , pp. 5391-5395
    • Stauss, S.1    Imanishi, Y.2    Miyazoe, H.3    Terashima, K.4
  • 30
    • 80053561107 scopus 로고    scopus 로고
    • Persistent photoconductivity in electron-irradiated ZnO bulk single crystals: Evaluation of the metastable conductive state by the dual light illumination
    • Oga T, Izawa Y, Kuriyama K, Kushida K, Xu Q,. Persistent photoconductivity in electron-irradiated ZnO bulk single crystals: Evaluation of the metastable conductive state by the dual light illumination. Solid State Communications 2011; 151: 1700-1703.
    • (2011) Solid State Communications , vol.151 , pp. 1700-1703
    • Oga, T.1    Izawa, Y.2    Kuriyama, K.3    Kushida, K.4    Xu, Q.5
  • 31
    • 0016597193 scopus 로고
    • The electrical properties of polycrystalline silicon films
    • Seto JYW,. The electrical properties of polycrystalline silicon films. Journal of Applied Physics 1975; 46: 5247-5254.
    • (1975) Journal of Applied Physics , vol.46 , pp. 5247-5254
    • Seto, J.Y.W.1
  • 32
    • 33749233582 scopus 로고    scopus 로고
    • Anion vacancies as a source of persistent photoconductivity in II-VI and chalcopyrite semiconductors
    • Lany S, Zunger A,. Anion vacancies as a source of persistent photoconductivity in II-VI and chalcopyrite semiconductors. Physical Review B 2005; 72: 035215-035227.
    • (2005) Physical Review B , vol.72 , pp. 035215-035227
    • Lany, S.1    Zunger, A.2
  • 34
    • 0010059052 scopus 로고    scopus 로고
    • Intrinsic n-type versus p-type doping asymmetry and the defect physics of ZnO
    • Zhang SB, Wei S-H, Zunger A,. Intrinsic n-type versus p-type doping asymmetry and the defect physics of ZnO. Physical Review B 2001; 63: 075205-075211.
    • (2001) Physical Review B , vol.63 , pp. 075205-075211
    • Zhang, S.B.1    Wei, S.-H.2    Zunger, A.3
  • 35
    • 84865847572 scopus 로고    scopus 로고
    • Controlling the resistivity gradient in aluminum-doped zinc oxide grown by plasma-enhanced chemical vapor deposition
    • Ponomarev MV, Verheijen MA, Keuning W, van de Sanden MCM, Creatore M,. Controlling the resistivity gradient in aluminum-doped zinc oxide grown by plasma-enhanced chemical vapor deposition. Journal of Applied Physics 2012; 112: 043708-043714.
    • (2012) Journal of Applied Physics , vol.112 , pp. 043708-043714
    • Ponomarev, M.V.1    Verheijen, M.A.2    Keuning, W.3    Van De Sanden, M.C.M.4    Creatore, M.5
  • 36
  • 37
    • 80054030417 scopus 로고    scopus 로고
    • Humid environment stability of low pressure chemical vapor deposited boron doped zinc oxide used as transparent electrodes in thin film silicon solar cells
    • Steinhauser J, Meyer S, Schwab M, Fay S, Ballif C,. Humid environment stability of low pressure chemical vapor deposited boron doped zinc oxide used as transparent electrodes in thin film silicon solar cells. Thin Solid Films 2011; 520: 558-562.
    • (2011) Thin Solid Films , vol.520 , pp. 558-562
    • Steinhauser, J.1    Meyer, S.2    Schwab, M.3    Fay, S.4    Ballif, C.5
  • 40
    • 77955720046 scopus 로고    scopus 로고
    • High-speed spatial atomic-layer deposition of aluminum oxide layers for solar cell passivation
    • Poodt P, Lankhorst A, Roozeboom F, Spee K, Maas D, Vermeer A,. High-speed spatial atomic-layer deposition of aluminum oxide layers for solar cell passivation. Advanced Materials 2010; 22: 3564-3567.
    • (2010) Advanced Materials , vol.22 , pp. 3564-3567
    • Poodt, P.1    Lankhorst, A.2    Roozeboom, F.3    Spee, K.4    Maas, D.5    Vermeer, A.6


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.