SCOPUS 정보 검색 플랫폼

Volumn 30, Issue 1, 2012, Pages

Cycle time effects on growth and transistor characteristics of spatial atomic layer deposition of zinc oxide

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC LAYER DEPOSITED; CYCLE TIME; ELECTRICAL CHARACTERISTIC; MATERIAL PROPERTY; PURGE TIME; TRANSISTOR CHARACTERISTICS;

ATMOSPHERIC PRESSURE; ATOMIC LAYER DEPOSITION; ATOMS; FILM GROWTH; ZINC; ZINC OXIDE;

OXIDE FILMS;

EID: 84855585776 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.3670878 Document Type: Article

Times cited : (22)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.