Performance of sinusoidal scanning with MPC in AFM imaging

IEEE/ASME Transactions on Mechatronics

Volumn 20, Issue 1, 2015, Pages 73-83

  Rana, M S ^a   Pota, H R ^a   Petersen, I R ^a  

^a UNIVERSITY OF NEW SOUTH WALES   (Australia)

Author keywords

Atomic force microscope (AFM); model predictive control (MPC); nanotechnology; piezoelectric tube scanner (PTS); raster scan; spiral scan

Indexed keywords

ATOMIC FORCE MICROSCOPY; MODEL PREDICTIVE CONTROL; NANOTECHNOLOGY; NATURAL FREQUENCIES; PIEZOELECTRICITY; PREDICTIVE CONTROL SYSTEMS; RASTERIZATION; TUBES (COMPONENTS);

PATTERN SCANNING; PIEZOELECTRIC TUBE SCANNERS; RASTER SCANS; REFERENCE SIGNALS; SINUSOIDAL SCANNING; SLOWLY VARYING AMPLITUDES; SPIRAL SCAN; SUPPRESS VIBRATION;

SCANNING;

EID: 84923117826     PISSN: 10834435     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMECH.2013.2295112     Document Type: Article

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