Identification, control and hysteresis compensation of A 3 DOF metrological AFM

Asian Journal of Control

Volumn 11, Issue 2, 2009, Pages 130-143

  Merry, Roel ^a   Uyanik, Mustafa ^a   van de Molengraft, René ^a   Koops, Richard ^b   van Veghel, Marijn ^b   Steinbuch, Maarten ^a  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b NMi Van Swinden Laboratorium   (Netherlands)

Author keywords

Asymmetric hysteresis; MIMO identification; Motion control; Piezo actuators; Scanning microscopes

Indexed keywords

ACTUATORS; ATOMIC FORCE MICROSCOPY; DEGREES OF FREEDOM (MECHANICS); FEEDBACK CONTROL; MIMO SYSTEMS; MOTION CONTROL;

ASYMMETRIC HYSTERESIS; COLEMAN-HODGDON MODEL; DESIGN AND APPLICATION; FEED-FORWARD COMPENSATION; HYSTERESIS COMPENSATION; NONLINEAR DISTURBANCE; PIEZO ACTUATOR; SCANNING MICROSCOPE;

HYSTERESIS;

EID: 72449155999     PISSN: 15618625     EISSN: None     Source Type: Journal    
DOI: 10.1002/asjc.89     Document Type: Article

References (28)

1. Binning, G., C. F. Quate, and C. Gerber, "Atomic force microscope," Phys. Rev. Lett., Vol. 56, No. 9, pp. 930-933 (1986).
2. Schitter, G., "Advanced mechanical design and control methods for atomic force microscopy in real-time," Am. Control Conf., New York, pp. 3503-3508 (2007).
3. Pao, L. Y., A. Butterworth, and D. Y, Abramovich, "Combined feedforward/feedback control of atomic force microscopes," Am. Control Conf, New York, pp. 3509-3515 (2007).
4. Sebastian, A. and S. M. Salapaka, "Design methodologies for robust nano-positioning," IEEE Trans. Control Syst. Technol., Vol. 13, No. 6, pp. 868-876 (2005).
5. Stemmer, A., G. Schitter, J. M. Rieber, and F. Allgöwer, "Control strategies towards faster quantitative imaging in atomic force microscopy," Eur. J. Control, Vol. 11, No. 4-5, pp. 384-395 (2005).
6. Salapaka, S., A. Sebastian, J. P. Cleveland, and M. V. Salapaka, "Design, identification and control of a fast nanopositioning device," Am. Control Conf., Alaska, Vol. 3, pp. 1966-1971 (2002).
7. Zou, Q. and S. Devasia. "Preview-based optimal inversion for output tracking: application to scanning tunneling microscopy," IEEE Trans. Control Sys. Technol., Vol. 12, No. 3, pp. 375-386 (2004).
8. Daniele, A., S. Salapaka, M. V. Salapaka, and M. Dahleh, "Piezoelectric scunners for atomic force microscopes: design of lateral sensors, identification and control," Am. Control Conf., San Diego, Vol. 1, pp. 253-257(1999).
9. Humphris, A., M. Miles, and J. Hobbs, "A mechanical microscope: High-speed atomic force microscopy," Appl. Phys. Lett., Vol. 86, No. 3, pp. 034106(2005).
10. Ando, T., N. Kodcra, E. Takai, et al., "A high-speed atomic force microscope for studying biological macro molecules." Proc. Nat. Acad. Sci., Vol. 98, No. 22, pp. 12468-12472 (2001).
11. Kindi, J. H., G. E. Fantner, J. A. Cutroni, and P. K. Hansma, "Rigid design of fast scanning probe microscopes using finite element analysis," Ultramicroscopy, Vol. 100, No. 3-4. pp. 259-265 (2004).
12. Schiller, G.. G. E. Fanter, P. J. Thurner, J. Adams et al., "Design and characterization of a novel scanner for high-speed atomic force microscopy," IFAC Mechatron. Conf, pp. 819-824 (2006).
13. P-517, P-527 Multi-Axis, Piezo Nanopositioning/Scanning Stages with Parallel Metrology, Physik Instmmente, www.physikinstrumente.com.
14. Schitter, G., P. Menold. H. F. Knapp, F. Allgower et al.. "High performance feedback for fast scanning atomic force microscopes," Rev. Sci. Instrum., Vol. 72, No. 8, pp. 3320-3327 (2001).
15. Song. J. and A. d. Kiureghian, "Generalized Bouc-Wen model for highly asymmetric hysteresis," J. Eng. Mech., Vol. 132, No. 6, pp. 610-618 (2006).
16. Smith, R., M. Salapaka, and L. Cherveny, "A Preisach model for quantifying hysteresis in an atomic force microscope," SPIE Smart Structures and Materials, pp. 7 (2002).
17. Jang. M., C. Chen, and J. Lee. "Modeling and control of a piezoelectric actuator driven system with asymmetric hysteresis," IEEE Int. Conf. Syst. Signals, Kaoshiung, Taiwan, pp. 676-681 (2005).
18. Kwok, N. M.. Q. P. Ha, M. T. Nguyen, J. Li et al., "Bouc-Wen model parameter identification for a MR fluid damper using computationally efficient GA," ISA Trans., Vol. 46, No. 2, pp. 167-179(2007).
19. Lin, C. and S. Yang. "Precise positioning of piezo-actuated stages using hysteresis-observer based control," Mechatronics, Vol. 16, No. 7, pp. 417-426 (2006).
20. Dirscherl. K.. J. Garnaes, L. Nielsen, J. Jøgensen et al.. "Modeling the hysteresis of a scanning probe microscope," J. Vac. Sci. Technol. B, Vol. 18, No. 2, pp. 621-625 (2000).
21. Yang. Q. C. Ftaclas, M. Chun, and D. Toomey, "Hysteresis correction in the curvature adaptive optics system," J. Opt. Sot: Am. A, Vol. 22. No. 1, pp. 142-147(2005).
22. Moheimani, S. O. R. and A. J. Fleming. Piezoelectric Transducers for Vibration Control and Damping, ser. Advances in Industrial Control, Grimble, M. J. and M. A. Johnson, Eds. Springer, London (2006).
23. Ljung, L., System Identification: Theory for the User, 2nd ed., Prentice-Hall, Upper Saddle River, New Jersey, (1999).
24. Skogestad. S. and I. Postlethwaite, Multivariable Feedback Control, Analysis and Design, 2nd ed., John Wiley & Sons. West Sussex, England, (2005).
25. Bristol, E., "On a new measure of interaction for multivariable process control," IEEE Trans. Autom. Control, Vol. 11, No. 1, pp. 133-134 (1966).
26. Coleman, B. D. and M. L. Hodgdon, "A constitutive relation for rate-independent hysteresis in ferromagnetically soft materials," Int. J. Eng. Sci., Vol. 24, No. 6, pp. 897-919 (1986).
27. Dirscherl, K., "Online correction of scanning probe microscopes with pixel accuracy," PhD Thesis, Technical University of Denmark (August 2000).
28. Merry, R., M. Uyanik, K. Koops, M. V. d. Molengraft et al. "Modeling, identification and control of a metrological atomic force microscope with a 3d of stage," Am. Control Conf., Seattle, Washington, pp. 2716-2721 (2008).