High performance control of a PZT scanner for fast nanoscale positioning of atomic force microscope

2012 2nd Australian Control Conference, AUCC 2012

Volumn , Issue , 2012, Pages 464-469

  Rana, M S ^a   Pota, H R ^a   Petersen, I R ^a   Habibullah, ^a  

^a UNIVERSITY OF NEW SOUTH WALES   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; MODEL PREDICTIVE CONTROL; PREDICTIVE CONTROL SYSTEMS;

ACCURATE TRACKING; ACTIVE DAMPING; CONTROL SCHEMES; HIGH PERFORMANCE CONTROL; NANOSCALE POSITIONING; OBSERVER-BASED; PIEZOELECTRIC TUBES; POSITION SENSORS;

SCANNING;

EID: 84886697651     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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