Robust H∞ control in fast atomic force microscopy

Asian Journal of Control

Volumn 15, Issue 3, 2013, Pages 872-887

  Chuang, Ning ^a   Petersen, Ian R ^a   Pota, Hemanshu R ^a  

^a UNIVERSITY OF NEW SOUTH WALES   (Australia)

Author keywords

Atomic force microscopy; Charge control; Hysteresis; Nano positioning; Nonlinear systems; Piezoelectric actuator; Robust control

Indexed keywords

ATOMIC FORCE MICROSCOPY; CONTROLLERS; DELAY CONTROL SYSTEMS; FREQUENCY RESPONSE; HYSTERESIS; NONLINEAR SYSTEMS; PIEZOELECTRIC ACTUATORS; PIEZOELECTRICITY; POSITION CONTROL; PROPORTIONAL CONTROL SYSTEMS; ROBUST CONTROL; SCANNING; TWO TERM CONTROL SYSTEMS; UNCERTAIN SYSTEMS;

CHARGE CONTROL; LINEAR UNCERTAIN SYSTEMS; NANO-POSITIONING; NONLINEAR HYSTERESIS; NORM-BOUNDED UNCERTAINTY; PIEZOELECTRIC TUBES; PROPORTIONAL INTEGRAL DERIVATIVES; TIME DOMAIN RESPONSE;

QUALITY CONTROL;

EID: 84874952472     PISSN: 15618625     EISSN: 19346093     Source Type: Journal    
DOI: 10.1002/asjc.585     Document Type: Article

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