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Volumn , Issue , 2010, Pages 998-1001
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Control for high-speed archimedean spiral nanopositioning
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Author keywords
Control; MEMS; Nanopositioning; Peak; Probe; Spiral
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Indexed keywords
ARCHIMEDEAN SPIRAL;
HIGH SCAN FREQUENCY;
HIGH-SPEED;
LINEAR QUADRATIC GAUSSIAN;
NANO-POSITIONING;
NANOSCALE APPLICATIONS;
PEAK;
PEAK FILTERS;
PROPOSED ARCHITECTURES;
REFERENCE SIGNALS;
SCANNING PROBES;
SPIRAL;
SPIRAL SCAN;
TRACKING CONTROLLER;
TRACKING ERRORS;
ULTRA-HIGH;
PROBES;
CONTROLLERS;
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EID: 79953086433
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/ICECS.2010.5724682 Document Type: Conference Paper |
Times cited : (8)
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References (9)
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