Active damping of a piezoelectric tube scanner using self-sensing piezo actuation

Mechatronics

Volumn 20, Issue 6, 2010, Pages 656-665

  Kuiper, S ^a   Schitter, G ^a,b  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

Author keywords

Atomic Force Microscopy; Piezoelectric actuators; Self sensing actuation

Indexed keywords

ATOMIC FORCE MICROSCOPY; CAPACITIVE SENSORS; CIRCUIT OSCILLATIONS; DAMPING; PIEZOELECTRIC ACTUATORS; PIEZOELECTRICITY; TUBES (COMPONENTS);

BALANCING CIRCUITS; DAMPED RESONANCE; IMAGE DISTORTIONS; MULTIPLE SCANNING; PIEZOELECTRIC TUBE SCANNERS; POSITION SENSORS; SCANNING SIGNALS; SELF-SENSING ACTUATION;

SCANNING;

EID: 77956395560     PISSN: 09574158     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mechatronics.2010.07.003     Document Type: Article

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