Reducing cross-coupling in a compliant XY nanopositioner for fast and accurate raster scanning

IEEE Transactions on Control Systems Technology

Volumn 18, Issue 5, 2010, Pages 1172-1179

  Yong, Yuen Kuan ^a   Liu, Kexiu ^b   Moheimani, S O Reza ^a  

^a UNIVERSITY OF NEWCASTLE   (Australia)

^b WESTERN DIGITAL CORPORATION   (United States)

Author keywords

Compliant XY nanopositioner; cross coupling; H infinity control; high speed scans; raster scanning

Indexed keywords

CROSS-COUPLINGS; H-INFINITY CONTROL; HIGH-SPEED; NANO-POSITIONER; RASTER SCANNING;

CONTROLLERS; NANOSTRUCTURED MATERIALS; RESONANCE; SCANNING; SPEED;

CHEMICAL REACTIONS;

EID: 77956224991     PISSN: 10636536     EISSN: None     Source Type: Journal    
DOI: 10.1109/TCST.2009.2033201     Document Type: Article

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