Making a commercial atomic force microscope more accurate and faster using positive position feedback control

Review of Scientific Instruments

Volumn 80, Issue 6, 2009, Pages

  Mahmood, I A ^a   Moheimani, S O Reza ^a  

^a UNIVERSITY OF NEWCASTLE   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

ADVERSE EFFECT; AFM; ATOMIC FORCE MICROSCOPES; ATOMIC LEVELS; CONTROL SCHEMES; CROSS-COUPLING; FEEDBACK CONTROL LOOPS; FEEDBACK CONTROLLER; HIGH RESOLUTION; HYSTERESIS NONLINEARITY; IMAGING SPEED; INDUCED VIBRATIONS; LINE SCAN; NANO SCALE; OPEN LOOPS; PI CONTROLLER; PIEZOELECTRIC TUBE SCANNERS; POSITION SENSORS; POSITIVE POSITION FEEDBACK; PROPORTIONAL-PLUS-INTEGRAL CONTROLLERS; SCANNING SPEED; THERMAL DRIFTS; THREE DIMENSIONS;

ATOMIC FORCE MICROSCOPY; ATOMS; CONTROLLERS; CREEP; ENGINEERING EXHIBITIONS; FEEDBACK CONTROL; HYSTERESIS; NONLINEAR CONTROL SYSTEMS; PIEZOELECTRIC TRANSDUCERS; PIEZOELECTRICITY; SCANNING;

FEEDBACK;

EID: 67650293632     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3155790     Document Type: Article

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