High-speed Lissajous-scan atomic force microscopy: Scan pattern planning and control design issues

Review of Scientific Instruments

Volumn 83, Issue 6, 2012, Pages

  Bazaei, A ^a   Yong, Yuen K ^a   Moheimani, S O Reza ^a  

^a UNIVERSITY OF NEWCASTLE   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATOR NONLINEARITIES; ANALYSIS AND DESIGN; ATOMIC FORCE MICROSCOPE (AFM); CLOSED CURVE; CLOSED FORM; HIGH ORDER HARMONICS; HIGH-SPEED; HIGH-SPEED OPERATION; HIGHER ORDER HARMONICS; IMAGE DISTORTIONS; INTEGRAL CONTROLLERS; INTERNAL MODEL CONTROLLERS; LISSAJOUS; LOW RESONANCE FREQUENCY; NOISE REJECTION; NON-SMOOTH; PLANNING AND CONTROL; POSITIONING STAGE; POSITIONING SYSTEM; RASTER SCANNING; RESONANT MODE; SAWTOOTH WAVEFORM; SCAN METHODS; SCAN PATTERNS; SCAN RANGE; TRACKING ERRORS; TRACKING PERFORMANCE; WAVE FORMS;

IMAGE RESOLUTION;

ATOMIC FORCE MICROSCOPY;

EID: 84863529025     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4725525     Document Type: Review

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