Integral resonant control of a piezoelectric tube actuator for fast nanoscale positioning

IEEE/ASME Transactions on Mechatronics

Volumn 13, Issue 5, 2008, Pages 530-537

  Bhikkaji, B ^a   Moheimani, S O Reza ^a  

^a UNIVERSITY OF NEWCASTLE   (Australia)

Author keywords

Control systems; Piezoelectric transducers; Vibration control

Indexed keywords

FEEDBACK; FEEDBACK CONTROL; NANOSTRUCTURED MATERIALS; NANOTECHNOLOGY; PIEZOELECTRIC TRANSDUCERS; PIEZOELECTRICITY; RELAY CONTROL SYSTEMS; SCANNING; TRANSDUCERS; TUBES (COMPONENTS);

ACCURATE; ATOMIC FORCE MICROSCOPES; CONTROL TECHNIQUES; FAST SCANNING; FAST SCANS; NANOSCALE; NANOSCALE PRECISIONS; PIEZOELECTRIC TUBES; POSITIONING; RANGING; RESONANT MODES; RESONANT STRUCTURES; SCIENTIFIC COMMUNITIES; SET POINTS; TRACKING; TUNNELING MICROSCOPES; WIDEBAND;

CONTROL SYSTEMS;

EID: 54349105478     PISSN: 10834435     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMECH.2008.2001186     Document Type: Article

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