A new method for robust damping and tracking control of scanning probe microscope positioning stages

IEEE Transactions on Nanotechnology

Volumn 9, Issue 4, 2010, Pages 438-448

  Fleming, Andrew J ^a   Aphale, Sumeet S ^b   Moheimani, S O Reza ^a  

^a UNIVERSITY OF NEWCASTLE   (Australia)

^b UNIVERSITY OF ABERDEEN   (United Kingdom)

Author keywords

Feedback control; high speed scanning; resonance damping; scanning probe microscopy; tracking

Indexed keywords

AT-SPEED; CALIBRATION STANDARD; CLOSED-LOOP; CONTROL SCHEMES; DIGITAL CONTROLLERS; HIGH SPEED SCANNING; INTEGRAL CONTROLLERS; LOW SPEED; OPERATIONAL AMPLIFIER CIRCUITS; POSITION SENSORS; RESONANCE DAMPING; RESONANCE FREQUENCIES; SCANNING PROBE MICROSCOPE; SECOND ORDERS; STABILITY ROBUSTNESS; TRACKING CONTROLS;

DAMPING; FEEDBACK CONTROL; MICROSCOPES; NATURAL FREQUENCIES; OPERATIONAL AMPLIFIERS; OPTICAL KERR EFFECT; PROBES; ROBUST CONTROL; SCANNING; SCANNING PROBE MICROSCOPY; SENSORS; SPEED; SYSTEM STABILITY;

CONTROLLERS;

EID: 77954602326     PISSN: 1536125X     EISSN: None     Source Type: Journal    
DOI: 10.1109/TNANO.2009.2032418     Document Type: Article

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