A novel piezoelectric strain sensor for simultaneous damping and tracking control of a high-speed nanopositioner

IEEE/ASME Transactions on Mechatronics

Volumn 18, Issue 3, 2013, Pages 1113-1121

  Yong, Yuen Kuan ^a   Fleming, Andrew J ^a   Moheimani, S O ^a  

^a UNIVERSITY OF NEWCASTLE   (Australia)

Author keywords

Atomic force microscope (AFM); control; high speed; nanopositioning; piezoelectric; strain sensor

Indexed keywords

ACCURATE TRACKING; AFM; ATOMIC FORCE MICROSCOPE (AFM); CLOSED LOOPS; CLOSED-LOOP; CLOSED-LOOP BANDWIDTH; FEED-BACK LOOP; HIGH BANDWIDTH; HIGH SENSITIVITY; INTERFACE CIRCUITRY; LINE RATE; LOW COSTS; LOW-FREQUENCY COMPONENTS; NANO-POSITIONER; NANO-POSITIONING; NANOPOSITIONING STAGE; OPEN LOOP SYSTEMS; PIEZOELECTRIC; PIEZOELECTRIC SENSORS; PIEZOELECTRIC STRAIN SENSOR; RESONANT CONTROLLER; SOURCE IMPEDANCE; STRAIN SENSORS; TRACKING CONTROL SYSTEMS; TRACKING CONTROLLER; TRACKING CONTROLS; VIBRATION SENSORS;

ATOMIC FORCE MICROSCOPY; BANDWIDTH; CONTROL; CONTROL SYSTEMS; DAMPING; HIGH PASS FILTERS; NAVIGATION; PIEZOELECTRIC TRANSDUCERS; SENSORS;

CAPACITIVE SENSORS;

EID: 84872929249     PISSN: 10834435     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMECH.2012.2193895     Document Type: Article

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