A current cycle feedback iterative learning control approach for AFM imaging

IEEE Transactions on Nanotechnology

Volumn 8, Issue 4, 2009, Pages 515-527

  Wu, Ying ^a   Zou, Qingze ^a   Su, Chanmin ^b  

^a Iowa State University   (United States)

^b VEECO INSTRUMENTS INC   (United States)

Author keywords

Atomic force microscope (AFM); Inversion based feedforward control; Iterative learning control (ILC); Nanotechnology; Piezoelectric materials

Indexed keywords

ADVANCED CONTROL; AFM; AFM IMAGING; AFM PROBE; ATOMIC FORCE MICROSCOPE (AFM); ATOMIC FORCE MICROSCOPES; AXIS CONTROL; CAUSALITY CONSTRAINT; CONTROLLER DESIGNS; HIGH SPEED IMAGING; IMAGING SPEED; INVERSION TECHNIQUES; INVERSION-BASED FEEDFORWARD CONTROL; ITERATIVE CONTROL; ITERATIVE LEARNING CONTROL; ITERATIVE LEARNING CONTROL (ILC); MODEL UNCERTAINTIES; PRECISION POSITIONING; PRECISION TRACKING; PROBE-SAMPLE INTERACTIONS; TRACKING ERRORS;

ATOMIC FORCE MICROSCOPY; ATOMS; CONTROLLERS; EDUCATION; FEEDFORWARD CONTROL; LEARNING ALGORITHMS; LEARNING SYSTEMS; MEMS; MICROSCOPES; NANOTECHNOLOGY; PIEZOELECTRIC MATERIALS; PIEZOELECTRIC TRANSDUCERS; PIEZOELECTRICITY; PROBES; ROBUST CONTROL; THREE DIMENSIONAL; TWO TERM CONTROL SYSTEMS; UNCERTAINTY ANALYSIS;

FEEDBACK;

EID: 67949097286     PISSN: 1536125X     EISSN: None     Source Type: Journal    
DOI: 10.1109/TNANO.2009.2015051     Document Type: Article

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