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Volumn , Issue , 2012, Pages 2477-2482

Model predictive control of atomic force microscope for fast image scanning

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CONTROLLERS; PREDICTIVE CONTROL SYSTEMS; SCANNING;

EID: 84874252854     PISSN: 07431546     EISSN: 25762370     Source Type: Conference Proceeding    
DOI: 10.1109/CDC.2012.6426103     Document Type: Conference Paper
Times cited : (20)

References (23)
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  • 4
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    • S. Necipoglu, B. Demirel, and L. Guvenc, "Fast AFM scanning with parameter space based robust repetitive control designed using the comes toolbox," in Procedings of the ASME, 12-14 Jul. 2010.
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  • 5
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    • A new method for robust damping and tracking control of scanning probe microscope positioning stages
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    • A. J. Fleming, S. S. Aphale, and S. O. R. Moheimani, "A new method for robust damping and tracking control of scanning probe microscope positioning stages," IEEE Transactions on Nanotechnology, vol. 9, no. 4, pp. 438-448, Jul. 2010.
    • (2010) IEEE Transactions on Nanotechnology , vol.9 , Issue.4 , pp. 438-448
    • Fleming, A.J.1    Aphale, S.S.2    Moheimani, S.O.R.3
  • 7
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    • Improvement of accuracy and speed of a commercial AFM using positive position feedback control
    • Jun.
    • I. A. Mahmood and S. O. R. Moheimani, "Improvement of accuracy and speed of a commercial AFM using positive position feedback control," in Proceedings of the American Control Conference, pp. 973-978, Jun. 2009.
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    • Mahmood, I.A.1    Moheimani, S.O.R.2
  • 8
    • 0035279460 scopus 로고    scopus 로고
    • Tracking control of piezoelectric actuators
    • H. Jung, J. Y. Shim, and D. Gweon, "Tracking control of piezoelectric actuators," Nanotechnology, vol. 12(1), pp. 14-20, 2001.
    • (2001) Nanotechnology , vol.12 , Issue.1 , pp. 14-20
    • Jung, H.1    Shim, J.Y.2    Gweon, D.3
  • 9
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    • Integral resonant control of a piezoelectric tube actuator for fast nanoscale positioning
    • Oct.
    • B. Bhikkaji and S. O. R. Moheimani, "Integral resonant control of a piezoelectric tube actuator for fast nanoscale positioning," IEEE/ASME Transactions on Mechatronics, vol. 13, no. 5, pp. 530-537, Oct. 2008.
    • (2008) IEEE/ASME Transactions on Mechatronics , vol.13 , Issue.5 , pp. 530-537
    • Bhikkaji, B.1    Moheimani, S.O.R.2
  • 13
    • 0034539450 scopus 로고    scopus 로고
    • Creep, hysteresis, and vibration compensation for piezoactuators: Atomic force microscopy application
    • D. Croft, G. Shedd, and S. Devasia, "Creep, hysteresis, and vibration compensation for piezoactuators: atomic force microscopy application," in Proceedings of the American Control Conference, vol. 3, pp. 2123-2128, 2000.
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    • Croft, D.1    Shedd, G.2    Devasia, S.3
  • 14
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    • Sep.
    • H. Jung, J. Y. Shim, and D. Gweon, "New open-loop actuating method of piezoelectric actuators for removing hysteresis and creep," Review of Scientific Instruments, vol. 71, no. 9, pp. 3436-3440, Sep. 2000.
    • (2000) Review of Scientific Instruments , vol.71 , Issue.9 , pp. 3436-3440
    • Jung, H.1    Shim, J.Y.2    Gweon, D.3
  • 15
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    • S. S. Aphale, B. Bhikkaji, and S. O. R. Moheimani, "Minimizing scanning errors in piezoelectric stack-actuated nanopositioning platforms," IEEE Transactions on Nanotechnology, vol. 7, no. 1, pp. 79-90, Jan. 2008.
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  • 17
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.