Electrostatic actuated strain engineering in monolithically integrated VLS grown silicon nanowires

Nanotechnology

Volumn 25, Issue 45, 2014, Pages

  Wagesreither, Stefan ^a   Bertagnolli, Emmerich ^a   Kawase, Shinya ^b   Isono, Yoshitada ^b   Lugstein, Alois ^a  

^a VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

^b KOBE UNIVERSITY   (Japan)

Author keywords

MEMS; nanowire; silicon; strain engineering

Indexed keywords

NANOWIRES; SILICON;

MONOLITHICALLY INTEGRATED; SILICON NANOWIRES; STRAIN ENGINEERING;

MEMS;

EID: 84908301896     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/25/45/455705     Document Type: Article

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