Petri net-based polynomially complex approach to optimal one-wafer cyclic scheduling of hybrid multi-cluster tools in semiconductor manufacturing

IEEE Transactions on Systems, Man, and Cybernetics: Systems

Volumn 44, Issue 12, 2014, Pages 1598-1610

  Yang, FaJun ^a   Wu, NaiQi ^a,b   Qiao, Yan ^a   Zhou, MengChu ^c,d  

^a GUANGDONG UNIVERSITY OF TECHNOLOGY   (China)

^b MACAU UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Macao)

^c Department of Computer Science and Technology   (China)

^d NEW JERSEY INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Hybrid multi cluster tools; Petri net (PN); Scheduling; Semiconductor manufacturing

Indexed keywords

PETRI NETS; SCHEDULING; SILICON WAFERS; TOOLS;

CLUSTER TOOL; COMPUTATIONALLY EFFICIENT; CYCLIC SCHEDULES; CYCLIC SCHEDULING; IS PROCESS; MULTI-CLUSTER TOOLS; PAPER MODELS; SEMICONDUCTOR MANUFACTURING;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 84905834944     PISSN: 21682216     EISSN: 21682232     Source Type: Journal    
DOI: 10.1109/TSMC.2014.2318679     Document Type: Article

References (50)

1. M. Bader, R. Hall, and G. Strasser, "Integrated processing equipment," Solid State Technol., vol. 33, no. 5, pp. 149-154, 1990.
2. P. Burggraaf, "Coping with the high cost of wafer fabs," Semicond. Int., vol. 38, no. 3, pp. 45-50, 1995.
3. W. K. Chan, J. G. Yi, and S. W. Ding, "On the optimality of one-unit cycle scheduling of multicluster tools with single-blade robots," in Proc. IEEE CASE, Scottsdale, AZ, USA, 2007, pp. 392-397.
4. W.-K. Chan, J. Yi, S. Ding, and D. Song, "Optimal scheduling of k-unit production of cluster tools with single-blade robots," in Proc. IEEE CASE, Washington, DC, USA, 2008, pp. 335-340.
5. W. K. Chan, J. G. Yi, and S. W. Ding, "Optimal scheduling of multicluster tools with constant robot moving times, part I: Two-cluster analysis," IEEE Trans. Autom. Sci. Eng., vol. 8, no. 1, pp. 5-16, Jan. 2011.
6. W. K. Chan, J. G. Yi, S. W. Ding, and D. Z. Song, "Optimal scheduling of multicluster tools with constant robot moving times, part II: Tree-like topology configurations," IEEE Trans. Autom. Sci. Eng., vol. 8, no. 1, pp. 17-28, Jan. 2011.
7. S. W. Ding, J. G. Yi, and M. T. Zhang, "Multicluster tools scheduling: An integrated event graph and network model approach," IEEE Trans. Semicond. Manuf., vol. 19, no. 3, pp. 339-351, Aug. 2006.
8. D. Jevtic, "Method and apparatus for managing scheduling a multiple cluster tool," European Patent 1 132 792 A2, 2001.
9. D. Jevtic and S. Venkatesh, "Method and apparatus for scheduling wafer processing within a multiple chamber semiconductor wafer processing tool having a multiple blade robot," U.S. Patent 6 224 638, 2001.
10. J.-H. Kim, T.-E. Lee, H.-Y. Lee, and D.-B. Park, "Scheduling analysis of timed-constrained dual-armed cluster tools," IEEE Trans. Semicond. Manuf., vol. 16, no. 3, pp. 521-534, Aug. 2003.
11. J.-H. Kim and T.-E. Lee, "Schedulability analysis of timed-constrained cluster tools with bounded time variation by an extended Petri net," IEEE Trans. Autom. Sci. Eng., vol. 5, no. 3, pp. 490-503, Jul. 2008.
12. H.-Y. Lee and T.-E. Lee, "Scheduling single-arm cluster tools with reentrant wafer flows," IEEE Trans. Semicond. Manuf., vol. 19, no. 2, pp. 226-240, May 2006.
13. T.-E. Lee, H.-Y. Lee, and Y.-H. Shin, "Workload balancing and scheduling of a single-armed cluster tool," in Proc. 5th APIEMS Conf., Gold Coast, QLD, Australia, 2004, pp. 1-15.
14. T.-E. Lee and S.-H. Park, "An extended event graph with negative places and tokens for timed window constraints," IEEE Trans. Autom. Sci. Eng., vol. 2, no. 4, pp. 319-332, Oct. 2005.
15. M.-J. Lopez and S.-C. Wood, "Systems of multiple cluster tools - Configuration, reliability, and performance," IEEE Trans. Semicond. Manuf., vol. 16, no. 2, pp. 170-178, May 2003.
16. T. K. McNab, "Cluster tools, part 1: Emerging processes," Semicond. Int., vol. 13, no. 9, pp. 58-63, 1990.
17. B. Newboe, "Cluster tools: A process solution," Semicond. Int., vol. 13, no. 8, pp. 82-88, 1990.
18. P. Singer, "The driving forces in cluster tool development," Semicond. Int., vol. 18, no. 8, pp. 113-118, 1995.
19. T. L. Perkinson, R. S. Gyurcsik, and P. K. MacLarty, "Single-wafer cluster tool performance: An analysis of the effects of redundant chambers and revisitations sequences on throughput," IEEE Trans. Semicond. Manuf., vol. 9, no. 3, pp. 384-400, Aug. 1996.
20. T. L. Perkinson, P. K. MacLarty, R. S. Gyurcsik, and R. K. Cavin, III, "Single-wafer cluster tool performance: An analysis of throughput," IEEE Trans. Semicond. Manuf., vol. 7, no. 3, pp. 369-373, Aug. 1994.
21. Y. Qiao, N. Q. Wu, and M. C. Zhou, "Real-time scheduling of single-arm cluster tools subject to residency time constraints and bounded activity time variation," IEEE Trans. Autom. Sci. Eng., vol. 9, no. 3, pp. 564-577, Jul. 2012.
22. Y. Qiao, N. Q. Wu, and M. C. Zhou, "Petri net modeling and wafer sojourn time analysis of single-arm cluster tools with residency time constraints and activity time variation," IEEE Trans. Semicond. Manuf., vol. 25, no. 3, pp. 432-446, Aug. 2012.
23. Y. Qiao, N. Q. Wu, and M. C. Zhou, "A Petri net-based novel scheduling approach and its cycle time analysis for dual-arm cluster tools with wafer revisiting," IEEE Trans. Semicond. Manuf., vol. 26, no. 1, pp. 100-110, Feb. 2013.
24. Y. Qiao, N. Q. Wu, and M. C. Zhou, "Scheduling of dual-arm cluster tools with wafer revisiting and residency time constraints," IEEE Trans. Ind. Informat., vol. 10, no. 1, pp. 286-300, Feb. 2014.
25. S. Rostami, B. Hamidzadeh, and D. Camporese, "An optimal periodic scheduler for dual-arm robots in cluster tools with residency constraints," IEEE Trans. Robot. Autom., vol. 17, no. 5, pp. 609-618, Oct. 2001.
26. S. Venkatesh, R. Davenport, P. Foxhoven, and J. Nulman, "A steady state throughput analysis of cluster tools: Dual-blade versus single-blade robots," IEEE Trans. Semicond. Manuf., vol. 10, no. 4, pp. 418-424, Nov. 1997.
27. N. Q. Wu, "Necessary and sufficient conditions for deadlock-free operation in flexible manufacturing systems using a colored Petri net model," IEEE Trans. Syst., Man, Cybern. C, vol. 29, no. 2, pp. 192-204, May 1999.
28. N. Q. Wu, C. B. Chu, F. Chu, and M. C. Zhou, "A Petri net method for schedulability and scheduling problems in single-arm cluster tools with wafer residency time constraints," IEEE Trans. Semicond. Manuf., vol. 21, no. 2, pp. 224-237, May 2008.
29. N. Q. Wu, F. Chu, C. Chu, and M. Zhou, "Petri net-based scheduling of single-arm cluster tools with reentrant atomic layer deposition processes," IEEE Trans. Autom. Sci. Eng., vol. 8, no. 1, pp. 42-55, Jan. 2011.
30. N. Q. Wu, F. Chu, C. B. Chu, and M. C. Zhou, "Petri net modeling and cycle time analysis of dual-arm cluster tools with wafer revisiting," IEEE Trans. Syst., Man, Cybern. Syst., vol. 43, no. 1, pp. 196-207, Jan. 2013.
31. N. Q. Wu and M. C. Zhou, "Avoiding deadlock and reducing starvation and blocking in automated manufacturing systems based on a Petri net model," IEEE Trans. Robot. Autom., vol. 17, no. 5, pp. 658-669, Oct. 2001.
32. N. Q. Wu and M. C. Zhou, "Deadlock modeling and control of semiconductor track systems using resource-oriented Petri nets," Int. J. Product. Res., vol. 45, no. 15, 3439-3456, 2007.
33. N. Q. Wu and M. C. Zhou, System Modeling and Control with Resource-Oriented Petri Nets. New York, NY, USA: CRC Press, Taylor & Francis Group, Oct. 2009. Group, Oct. 2009.
34. N. Q. Wu and M. C. Zhou, "Analysis of wafer sojourn time in dual-arm cluster tools with residency time constraint and activity time variation," IEEE Trans. Semicond. Manuf., vol. 23, no. 1, pp. 53-64, Feb. 2010.
35. N. Q. Wu and M. C. Zhou, "A closed-form solution for schedulability and optimal scheduling of dual-arm cluster tools based on steady schedule analysis," IEEE Trans. Autom. Sci. Eng., vol. 7, no. 2, pp. 303-315, Apr. 2010.
36. N. Q. Wu and M. C. Zhou, "Process vs resource-oriented Petri net modeling of automated manufacturing systems," Asian J. Control, vol. 12, no. 3, pp. 267-280, 2010.
37. N. Q. Wu and M. C. Zhou, "Modeling, analysis and control of dual-arm cluster tools with residency time constraint and activity time variation based on Petri nets," IEEE Trans. Autom. Sci. Eng., vol. 9, no. 2, pp. 446-454, Apr. 2012.
38. N. Q. Wu and M. C. Zhou, "Schedulability analysis and optimal scheduling of dual-arm cluster tools with residency time constraint and activity time variation," IEEE Trans. Autom. Sci. Eng., vol. 9, no. 1, pp. 203-209, Jan. 2012.
39. N. Q. Wu, M. C. Zhou, F. Chu, and C. B. Chu, "A Petri-net-based scheduling strategy for dual-arm cluster tools with wafer revisiting," IEEE Trans. Syst., Man, Cybern. Syst., vol. 43, no. 5, pp. 1182-1194, Sep. 2013.
40. N. Q. Wu, M. C. Zhou, and G. Hu, "One-step look-ahead maximally permissive deadlock control of AMS by using Petri net," ACM Trans. Embedded Comput. Syst., vol. 12, no. 1, pp. 1-23, 2013.
41. N. Q. Wu, M. C. Zhou, and Z. W. Li, "Resource-oriented Petri net for deadlock avoidance in flexible assembly systems," IEEE Trans. Syst., Man, Cybern. A, vol. 38, no. 1, pp. 56-69, Jan. 2008.
42. F. J. Yang, N. Q. Wu, Y. Qiao, and M. C. Zhou, "Petri net-based optimal one-wafer cyclic scheduling of hybrid multicluster tools in wafer fabrication," IEEE Trans. Semicond. Manuf., to be published.
43. J. G. Yi, S. W. Ding, D. Z. Song, and M. T. Zhang, "Steady-state throughput and scheduling analysis of multicluster tools: A decomposition approach," IEEE Trans. Autom. Sci. Eng., vol. 5, no. 2, pp. 321-336, Apr. 2008.
44. M. C. Zhou and K. Venkatesh, Modeling, Simulation and Control of Flexible Manufacturing Systems: Petri Net Approach. Singapore: World Scientific, 1998.
45. M. C. Zhou and F. DiCesare, Petri Net Synthesis for Discrete Event Control of Manufacturing Systems. London, U.K.: Kluwer, 1993.
46. M. C. Zhou, F. DiCesare, and A. A. Desrochers, "A hybrid methodology for synthesis of petri nets for manufacturing systems," IEEE Trans. Robot. Autom., vol. 8, no. 3, pp. 350-361, Jun. 1992.
47. Q. H. Zhu, and Y. Qiao, "Scheduling single-arm multi-cluster tools with lower bound cycle time via petri nets," Int. J. Intell. Control Syst., vol. 18, no. 4, pp. 113-123, Dec. 2012.
48. Q. H. Zhu, N. Q. Wu, Y. Qiao, and M. C. Zhou, "Petri net-based optimal one-wafer scheduling of single-arm multi-cluster tools in semiconductor manufacturing," IEEE Trans. Semiconduct. Manuf., vol. 26, no. 4, pp. 578-591, Nov. 2013.
49. Q. H. Zhu, N. Q. Wu, Y. Qiao, and M. C. Zhou, "Petri Net modeling and one-wafer scheduling of single-arm multi-cluster tools,"?I in Proc. IEEE Int. Conf. Autom. Sci. Eng., Madison, WI, USA, 2013, pp. 862-867.
50. R. Zurawski and M. C. Zhou, "Petri nets and industrial applications: A tutorial," IEEE Trans. Ind. Electron., vol. 41, no. 6, pp. 567-583, Dec. 1994.