On the optimality of one-unit cycle scheduling of multi-cluster tools with single-blade robots

Proceedings of the 3rd IEEE International Conference on Automation Science and Engineering, IEEE CASE 2007

Volumn , Issue , 2007, Pages 392-397

  Chan, Wai Kin ^a   Yi, Jingang ^b   Ding, Shengwei ^c  

^a RENSSELAER POLYTECHNIC INSTITUTE   (United States)

^b UTC Aerospace Systems   (United States)

^c DEPARTMENT OF INDUSTRIAL ENGINEERING AND OPERATIONS RESEARCH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MULTI-CLUSTER TOOLS; OPTIMAL SCHEDULING; SINGLE-CLUSTER TOOLS;

ALGORITHMS; COST REDUCTION; SCHEDULING; SEMICONDUCTOR DEVICE MANUFACTURE;

ROBOTS;

EID: 44449131528     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/COASE.2007.4341844     Document Type: Conference Paper

References (8)

1. M. Pinedo, Scheduling: Theory, Algorithms, and Systems, 2nd ed. Upper Saddle River, NJ: Prentice Hall, 2002.
2. T. Perkinson, P. McLarty, R. Gyurcsik, and R. Cavin, "Single-Wafer Cluster Tool Performance: An Analysis of Throughput," IEEE Trans. Semiconduct. Manufact., vol. 7, no. 3, pp. 369-373, 1994.
3. S. Venkatesh, R. Davenport, P. Foxhoven, and J. Nulman, "A Steady-State Throughput Analysis of Cluster Tools: Dual-Blade Versus Single-Blade Robots," IEEE Trans. Semiconduct. Manufact., vol. 10, no. 4, pp. 418-424, 1997.
4. M. Dawande, C. Sriskandarajah, and S. Sethi, "On Throughtput Maximization in Constant Travel-Time Robotic Cells," Manuf. & Serv. Oper. Manag., vol. 4, no. 4, pp. 296-312, 2002.
5. D. Jevtic and S. Venkatesh, "Method and aparatus for scheduling wafer processing within a multiple chamber semiconductor wafer processing tool having a multiple blade robot," U.S. Patent 6,224,638, May, 2001.
6. N. Geismar, C. Sriskandarajah, and N. Ramanan, "Increasing Throughput for Robotic Cells with Parallel Machines and Multiple Robots," IEEE Trans. Automat. Sci. Eng., vol. 1, no. 1, pp. 84-89, 2004.
7. S. Ding, J. Yi, and M. T. Zhang, "Multi-Cluster Tools Scheduling: an Integrated Event Graph and Network Model Approach," IEEE Trans. Semiconduct. Manufact., vol. 19, no. 3, pp. 339-351, 2006.
8. J. Yi, S. Ding, D. Song, and M. T. Zhang, "Steady-State Throughput and Scheduling Analysis of Multi-Cluster Tools: An Decomposition Approach," IEEE Trans. Autom. Sci. Eng., 2007. In press.