Petri net modeling and one-wafer scheduling of single-arm multi-cluster tools

IEEE International Conference on Automation Science and Engineering

Volumn , Issue , 2013, Pages 862-867

  Zhu, Qinghua ^a   Wu, Naiqi ^a,b   Qiao, Yan ^a   Zhou, Mengchu ^c,d  

^a GUANGDONG UNIVERSITY OF TECHNOLOGY   (China)

^b MACAU UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Macao)

^c Department of Computer Science and Technology   (China)

^d NEW JERSEY INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CLUSTER TOOL; CYCLE TIME; CYCLIC SCHEDULES; CYCLIC SCHEDULING; MULTI-CLUSTER TOOLS; MULTIPLE ROBOT; PETRI NET MODELS;

PETRI NETS; SCHEDULING;

TOOLS;

EID: 84891520091     PISSN: 21618070     EISSN: 21618089     Source Type: Conference Proceeding    
DOI: 10.1109/CoASE.2013.6653915     Document Type: Conference Paper

References (10)

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