-
1
-
-
80053910086
-
Silicon carbide: Smaller, faster, tougher
-
10.1109/MSPEC.2011.6027247
-
B. Ozpineci and L. Tolbert, " Silicon carbide: smaller, faster, tougher.," IEEE Spectrum 48 (10), 45 (2011). 10.1109/MSPEC.2011.6027247
-
(2011)
IEEE Spectrum
, vol.48
, Issue.10
, pp. 45
-
-
Ozpineci, B.1
Tolbert, L.2
-
2
-
-
84866342520
-
-
10.1088/0957-4484/23/39/395204
-
A. Fontserè, A. Pérez-Tomás, M. Placidi, J. Llobet, N. Baron, S. Chenot, Y. Cordier, J. C. Moreno, M. R. Jennings, P. M. Gammon, C. A. Fisher, V. Iglesias, M. Porti, A. Bayerl, M. Lanza, and M. Nafría, Nanotechnology 23, 395204 (2012). 10.1088/0957-4484/23/39/395204
-
(2012)
Nanotechnology
, vol.23
, pp. 395204
-
-
Fontserè, A.1
Pérez-Tomás, A.2
Placidi, M.3
Llobet, J.4
Baron, N.5
Chenot, S.6
Cordier, Y.7
Moreno, J.C.8
Jennings, M.R.9
Gammon, P.M.10
Fisher, C.A.11
Iglesias, V.12
Porti, M.13
Bayerl, A.14
Lanza, M.15
Nafría, M.16
-
3
-
-
0842277372
-
-
10.1063/1.109775
-
M. Asif Khan, A. Bhattarai, J. N. Kuznia, and D. T. Olson, Appl. Phys. Lett. 63, 1214 (1993). 10.1063/1.109775
-
(1993)
Appl. Phys. Lett.
, vol.63
, pp. 1214
-
-
Asif Khan, M.1
Bhattarai, A.2
Kuznia, J.N.3
Olson, D.T.4
-
4
-
-
1242321244
-
-
10.1016/j.sse.2003.07.006
-
N. Miura, T. Nanjo, M. Suita, T. Oishi, Y. Abe, T. Ozeki, H. Ishikawa, T. Egawa, and T. Jimbo, Solid-State Electron. 48 (5), 689 (2004). 10.1016/j.sse.2003.07.006
-
(2004)
Solid-State Electron.
, vol.48
, Issue.5
, pp. 689
-
-
Miura, N.1
Nanjo, T.2
Suita, M.3
Oishi, T.4
Abe, Y.5
Ozeki, T.6
Ishikawa, H.7
Egawa, T.8
Jimbo, T.9
-
6
-
-
0032659440
-
-
10.1016/S0921-5107(98)00541-8
-
D. Defives, O. Noblanc, C. Dua, C. Brylinski, M. Barthula, and F. Meyer, Mater. Sci. Eng., B 61, 395 (1999). 10.1016/S0921-5107(98)00541-8
-
(1999)
Mater. Sci. Eng., B
, vol.61
, pp. 395
-
-
Defives, D.1
Noblanc, O.2
Dua, C.3
Brylinski, C.4
Barthula, M.5
Meyer, F.6
-
8
-
-
0033876688
-
-
10.1007/s11664-000-0081-9
-
B. J. Skromme, E. Luckowski, K. Moore, M. Bhatnagar, C. E. Weitzel, T. Gehoski, and D. Ganser, J. Electron. Mater. 29, 376 (2000). 10.1007/s11664-000- 0081-9
-
(2000)
J. Electron. Mater.
, vol.29
, pp. 376
-
-
Skromme, B.J.1
Luckowski, E.2
Moore, K.3
Bhatnagar, M.4
Weitzel, C.E.5
Gehoski, T.6
Ganser, D.7
-
9
-
-
23844434431
-
-
10.1063/1.1978969
-
L. Calcagno, A. Ruggiero, F. Roccaforte, and F. La Via, J. Appl. Phys. 98, 023713 (2005). 10.1063/1.1978969
-
(2005)
J. Appl. Phys.
, vol.98
, pp. 023713
-
-
Calcagno, L.1
Ruggiero, A.2
Roccaforte, F.3
La Via, F.4
-
11
-
-
68849086075
-
-
10.1088/0268-1242/24/5/055006
-
I. Nikitina, K. Vassilevski, A. Horsfall, N. Wright, A. G. O'Neill, S. K. Ray, K. Zekentes, and C. M. Johnson, Semicond. Sci. Technol. 24, 055006 (2009). 10.1088/0268-1242/24/5/055006
-
(2009)
Semicond. Sci. Technol.
, vol.24
, pp. 055006
-
-
Nikitina, I.1
Vassilevski, K.2
Horsfall, A.3
Wright, N.4
O'neill, A.G.5
Ray, S.K.6
Zekentes, K.7
Johnson, C.M.8
-
13
-
-
0038311926
-
-
10.1063/1.1573750
-
F. Roccaforte, F. La Via, V. Raineri, R. Pierobon, and E. Zanoni, J. Appl. Phys. 93, 9137 (2003). 10.1063/1.1573750
-
(2003)
J. Appl. Phys.
, vol.93
, pp. 9137
-
-
Roccaforte, F.1
La Via, F.2
Raineri, V.3
Pierobon, R.4
Zanoni, E.5
-
14
-
-
79952448444
-
-
10.1016/j.mee.2010.12.070
-
L. Boussouar, Z. Ouennoughi, N. Rouag, A. Sellai, R. Weiss, and H. Ryssel, Microelectron. Eng. 88, 969 (2011). 10.1016/j.mee.2010.12.070
-
(2011)
Microelectron. Eng.
, vol.88
, pp. 969
-
-
Boussouar, L.1
Ouennoughi, Z.2
Rouag, N.3
Sellai, A.4
Weiss, R.5
Ryssel, H.6
-
15
-
-
34250637966
-
-
10.1063/1.2745436
-
D. J. Ewing, L. M. Porter, Q. Wahab, X. Ma, T. S. Sudharshan, S. Tumakha, M. Gao, and L. J. Brillson, J. Appl. Phys. 101, 114514 (2007). 10.1063/1.2745436
-
(2007)
J. Appl. Phys.
, vol.101
, pp. 114514
-
-
Ewing, D.J.1
Porter, L.M.2
Wahab, Q.3
Ma, X.4
Sudharshan, T.S.5
Tumakha, S.6
Gao, M.7
Brillson, L.J.8
-
16
-
-
64549091976
-
-
10.1116/1.3043453
-
F. Giannazzo, F. Roccaforte, F. Iucolano, V. Raineri, F. Ruffino, and M. G. Grimaldi, J. Vac. Sci. Technol. B 27, 789 (2009). 10.1116/1.3043453
-
(2009)
J. Vac. Sci. Technol. B
, vol.27
, pp. 789
-
-
Giannazzo, F.1
Roccaforte, F.2
Iucolano, F.3
Raineri, V.4
Ruffino, F.5
Grimaldi, M.G.6
-
18
-
-
84862586775
-
-
10.1063/1.4711769
-
S. Shivaraman, L. H. Herman, F. Rana, J. Park, and M. G. Spencer, Appl. Phys. Lett. 100, 183112 (2012). 10.1063/1.4711769
-
(2012)
Appl. Phys. Lett.
, vol.100
, pp. 183112
-
-
Shivaraman, S.1
Herman, L.H.2
Rana, F.3
Park, J.4
Spencer, M.G.5
-
20
-
-
84881526402
-
-
10.1063/1.4816158
-
L. Huang, F. Qin, S. Li, and D. Wang, Appl. Phys. Lett. 103, 033520 (2013). 10.1063/1.4816158
-
(2013)
Appl. Phys. Lett.
, vol.103
, pp. 033520
-
-
Huang, L.1
Qin, F.2
Li, S.3
Wang, D.4
-
21
-
-
42449093680
-
-
10.1088/0268-1242/23/4/045005
-
A. F. Hamida, Z. Ouennoughi, A. Sellai, R. Weiss, and H. Ryssel, Semicond. Sci. Technol. 23, 045005 (2008). 10.1088/0268-1242/23/4/045005
-
(2008)
Semicond. Sci. Technol.
, vol.23
, pp. 045005
-
-
Hamida, A.F.1
Ouennoughi, Z.2
Sellai, A.3
Weiss, R.4
Ryssel, H.5
-
24
-
-
3342986527
-
-
10.1103/PhysRevB.45.13509
-
R. T. Tung, Phys. Rev. B 45, 13509 (1992). 10.1103/PhysRevB.45.13509
-
(1992)
Phys. Rev. B
, vol.45
, pp. 13509
-
-
Tung, R.T.1
-
25
-
-
0035834318
-
-
10.1016/S0927-796X(01)00037-7
-
R. T. Tung, Mater. Sci. Eng. 35, 1 (2001). 10.1016/S0927-796X(01)00037-7
-
(2001)
Mater. Sci. Eng.
, vol.35
, pp. 1
-
-
Tung, R.T.1
-
26
-
-
70450263252
-
-
10.1063/1.3255976
-
P. M. Gammon, A. Pérez-Tomás, V. A. Shah, G. J. Roberts, M. R. Jennings, J. A. Covington, and P. A. Mawby, J. Appl. Phys. 106, 093708 (2009). 10.1063/1.3255976
-
(2009)
J. Appl. Phys.
, vol.106
, pp. 093708
-
-
Gammon, P.M.1
Pérez-Tomás, A.2
Shah, V.A.3
Roberts, G.J.4
Jennings, M.R.5
Covington, J.A.6
Mawby, P.A.7
-
27
-
-
78751627555
-
Si Dopant and freeze-out calculations
-
in (Wiley, New York)
-
S. M. Sze and K. K. Ng, " Si Dopant and freeze-out calculations.," in Physics of Semiconductor Devices (Wiley, New York, 2007), pp. 23-26.
-
(2007)
Physics of Semiconductor Devices
, pp. 23-26
-
-
Sze, S.M.1
Ng, K.K.2
-
30
-
-
84871222225
-
-
10.1063/1.4768718
-
P. M. Gammon, E. Donchev, A. Pérez-Tomás, V. A. Shah, J. S. Pang, P. K. Petrov, M. R. Jennings, C. A. Fisher, P. A. Mawby, D. R. Leadley, and N. McN. Alford, J. Appl. Phys. 112, 114513 (2012). 10.1063/1.4768718
-
(2012)
J. Appl. Phys.
, vol.112
, pp. 114513
-
-
Gammon, P.M.1
Donchev, E.2
Pérez-Tomás, A.3
Shah, V.A.4
Pang, J.S.5
Petrov, P.K.6
Jennings, M.R.7
Fisher, C.A.8
Mawby, P.A.9
Leadley, D.R.10
Mcn. Alford, N.11
-
31
-
-
0035882131
-
-
10.1103/PhysRevB.64.075310
-
H. J. Im, Y. Ding, J. P. Pelz, and W. J. Choyke, Phys. Rev. B 64, 075310 (2001). 10.1103/PhysRevB.64.075310
-
(2001)
Phys. Rev. B
, vol.64
, pp. 075310
-
-
Im, H.J.1
Ding, Y.2
Pelz, J.P.3
Choyke, W.J.4
-
33
-
-
0020163770
-
-
10.1116/1.571765
-
J. L. Freeouf, T. N. Jackson, S. E. Laux, and J. M. Woodall, J. Vac. Sci. Technol. 21, 570 (1982). 10.1116/1.571765
-
(1982)
J. Vac. Sci. Technol.
, vol.21
, pp. 570
-
-
Freeouf, J.L.1
Jackson, T.N.2
Laux, S.E.3
Woodall, J.M.4
-
34
-
-
0022734792
-
-
10.1016/0038-1101(86)90145-0
-
Y. P. Song, R. L. Van Meirhaeghe, W. H. Laflere, and F. Cardon, Solid-State Electron. 29, 633 (1986). 10.1016/0038-1101(86)90145-0
-
(1986)
Solid-State Electron.
, vol.29
, pp. 633
-
-
Song, Y.P.1
Van Meirhaeghe, R.L.2
Laflere, W.H.3
Cardon, F.4
-
36
-
-
84890522614
-
-
in Proceedings of the ISPSD.
-
L. Cheng, I. Sankin, J. N. Merrett, V. Bondarenko, R. Kelley, S. Purohit, Y. Koshka, J. B. Casady, and M. S. Mazzola, in Proceedings of the ISPSD, 2005.
-
(2005)
-
-
Cheng, L.1
Sankin, I.2
Merrett, J.N.3
Bondarenko, V.4
Kelley, R.5
Purohit, S.6
Koshka, Y.7
Casady, J.B.8
Mazzola, M.S.9
-
37
-
-
84890502477
-
-
in Proceedings of the ISPSD.
-
M. Shanbhag and T. Chow, in Proceedings of the ISPSD, 2002.
-
(2002)
-
-
Shanbhag, M.1
Chow, T.2
-
38
-
-
84865839847
-
-
10.1049/iet-pel.2011.0287
-
Y. Yang, A. J. Forsyth, S. Dimler, D. Wu, C. H. Tan, C. Jia, and W. Bailey, IET Power Electron. 5, 739 (2012). 10.1049/iet-pel.2011.0287
-
(2012)
IET Power Electron.
, vol.5
, pp. 739
-
-
Yang, Y.1
Forsyth, A.J.2
Dimler, S.3
Wu, D.4
Tan, C.H.5
Jia, C.6
Bailey, W.7
-
39
-
-
33750456489
-
-
10.1049/ip-cds:20050359
-
A. J. Forsyth, S. Y. Yang, P. A. Mawby, and P. Igic, IEE Proc.: Circuits Devices Syst. 153, 407 (2006). 10.1049/ip-cds:20050359
-
(2006)
IEE Proc.: Circuits Devices Syst.
, vol.153
, pp. 407
-
-
Forsyth, A.J.1
Yang, S.Y.2
Mawby, P.A.3
Igic, P.4
-
40
-
-
34547219425
-
-
10.1063/1.2752148
-
A. Pérez-Tomás, M. R. Jennings, M. Davis, J. A. Covington, P. A. Mawby, V. Shah, and T. Grasby, J. Appl. Phys. 102, 014505 (2007). 10.1063/1.2752148
-
(2007)
J. Appl. Phys.
, vol.102
, pp. 014505
-
-
Pérez-Tomás, A.1
Jennings, M.R.2
Davis, M.3
Covington, J.A.4
Mawby, P.A.5
Shah, V.6
Grasby, T.7
-
41
-
-
0043265143
-
-
10.1007/s00339-002-1981-8
-
F. Roccaforte, F. La Via, V. Raineri, P. Musumeci, L. Calcagno, and G. G. Condorelli, Appl. Phys. A: Mater. Sci. Process. 77, 827 (2003). 10.1007/s00339-002-1981-8
-
(2003)
Appl. Phys. A: Mater. Sci. Process.
, vol.77
, pp. 827
-
-
Roccaforte, F.1
La Via, F.2
Raineri, V.3
Musumeci, P.4
Calcagno, L.5
Condorelli, G.G.6
-
42
-
-
84879830716
-
-
10.1063/1.4811756
-
J.-H. Shin, J. Park, S. Jang, T. Jang, and K. S. Kim, Appl. Phys. Lett. 102, 243505 (2013). 10.1063/1.4811756
-
(2013)
Appl. Phys. Lett.
, vol.102
, pp. 243505
-
-
Shin, J.-H.1
Park, J.2
Jang, S.3
Jang, T.4
Kim, K.S.5
-
43
-
-
0014437867
-
-
10.1016/0039-6028(69)90245-3
-
A. Saxena, Surf. Sci. 13, 151 (1969). 10.1016/0039-6028(69)90245-3
-
(1969)
Surf. Sci.
, vol.13
, pp. 151
-
-
Saxena, A.1
-
44
-
-
21544482493
-
-
10.1063/1.352983
-
W. Gotz, A. Schoner, G. Pensl, W. Suttrop, W. J. Choyke, R. Stein, and S. Leibenzeder, J. Appl. Phys. 73, 3332 (1993). 10.1063/1.352983
-
(1993)
J. Appl. Phys.
, vol.73
, pp. 3332
-
-
Gotz, W.1
Schoner, A.2
Pensl, G.3
Suttrop, W.4
Choyke, W.J.5
Stein, R.6
Leibenzeder, S.7
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