Sol-gel derived amorphous/nanocrystalline MgZnO thin films annealed by atmospheric pressure plasma jets

Ceramics International

Volumn 40, Issue 2, 2014, Pages 2707-2715

  Lien, Shao Tzu ^a   Chen, Jian Zhang ^a   Yang, Yao Jhen ^b   Hsu, Cheng Che ^b   Cheng, I Chun ^b  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^b NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

Annealing; Atmospheric pressure plasma jet; D. ZnO; MgZnO; Sol gel

Indexed keywords

ATMOSPHERIC PRESSURE PLASMA JETS; HIGH TRANSPARENCY; MGZNO; ORDERS OF MAGNITUDE; QUANTUM CONFINEMENT EFFECTS; THERMAL EXPANSION COEFFICIENTS; VISIBLE-LIGHT WAVELENGTHS; ZNO;

ANNEALING; ENERGY GAP; GRAIN GROWTH; PLASMA JETS; SOL-GEL PROCESS; THERMAL EXPANSION; THIN FILMS; ZINC;

SOL-GELS;

EID: 84889084785     PISSN: 02728842     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ceramint.2013.10.052     Document Type: Article

References (60)

1. U. Ozgur, Y.I. Alivov, C. Liu, A. Teke, M.A. Reshchikov, S. Dogan, V. Avrutin, S.J. Cho, and H. Morkoc A comprehensive review of ZnO materials and devices J. Appl. Phys. 98 4 2005 041301
2. M.W. Ahn, K.S. Park, J.H. Heo, J.G. Park, D.W. Kim, K.J. Choi, J.H. Lee, and S.H. Hong Gas sensing properties of defect-controlled ZnO-nanowire gas sensor Appl. Phys. Lett. 93 26 2008 263103
3. L.J. Bie, X.N. Yan, J. Yin, Y.Q. Duan, and Z.H. Yuan Nanopillar ZnO gas sensor for hydrogen and ethanol Sens. Actuat B - Chem. 126 2 2007 604 608
4. 1-xO active-layer thin-film transistors IEEE Trans. Electron Devices 59 1 2012 151 158
5. 0.95O thin film transistors with MgO gate dielectrics Semicond. Sci. Technol. 26 10 2011 105007
6. E.M.C. Fortunato, P.M.C. Barquinha, A.C.M.B.G. Pimentel, A.M.F. Goncalves, A.J.S. Marques, L.M.N. Pereira, and R.F.P. Martins Fully transparent ZnO thin-film transistor produced at room temperature Adv. Mater. 17 5 2005 590
7. G.H. Kim, W.H. Jeong, B. Du Ahn, H.S. Shin, H.J. Kim, H.J. Kim, M.K. Ryu, K.B. Park, J.B. Seon, and S.Y. Lee Investigation of the effects of Mg incorporation into InZnO for high-performance and high-stability solution-processed thin film transistors Appl. Phys. Lett. 96 16 2010 163506
8. Y.S. Tsai, C.H. Li, I.C. Chiu, H.A. Chin, I.C. Cheng, and J.Z. Chen Effects of drain-bias and ambient on hump formation in the transfer curves of positively gate-biased MgZnO thin film transistors Thin Solid Films 529 2013 360 363
9. Y. Choi, K. Lee, C.H. Park, K.H. Lee, J.W. Nam, M.M. Sung, K.M. Lee, H.C. Sohn, and S. Im High current fast switching n-ZnO/p-Si diode J. Phys. D: Appl. Phys. 43 34 2010 345101
10. M. Cavas, R.K. Gupta, A.A. Al-Ghamdi, O.A. Al-Hartomy, F. El-Tantawy, and F. Yakuphanoglu Fabrication and electrical characterization of transparent NiO/ZnO p-n junction by the sol-gel spin coating method J. Sol-Gel Sci. Technol. 64 1 2012 219 223
11. J.Z. Zhao, H.W. Liang, J.C. Sun, J.M. Bian, Q.J. Feng, L.Z. Hu, H.Q. Zhang, X.P. Liang, Y.M. Luo, and G.T. Du Electroluminescence from n-ZnO/p-ZnO:Sb homojunction light emitting diode on sapphire substrate with metal-organic precursors doped p-type ZnO layer grown by MOCVD technology J. Phys. D: Appl. Phys. 41 19 2008 195110
12. x:Ca diodes on polyethylene terephthalate substrates J. Alloys Compd. 544 2012 111 114
13. (x):Ca heterojunction diodes on polyethylene terephthalate substrates J. Electron. Mater. 42 6 2013 1242 1245
14. 1-xO-based visible-blind ultraviolet photodetectors with active anti-reflection layer Appl. Phys. Lett. 102 23 2013 231122
15. Y.N. Hou, Z.X. Mei, H.L. Liang, D.Q. Ye, C.Z. Gu, and X.L. Du Dual-band MgZnO ultraviolet photodetector integrated with Si Appl. Phys. Lett. 102 15 2013 153510
16. 0.48O thin film Appl. Phys. Lett. 99 24 2011 242105
17. D. Schmid, M. Ruckh, and H.W. Schock A comprehensive characterization of the interfaces in Mo/CIS/CdS/ZnO solar cell structures Sol. Energy Mater. Sol. Cells 41-42 0 1996 281 294
18. 0.6O multilayer thin films after thermal annealing Thin Solid Films 520 6 2012 1918 1923
19. xO protecting thin films deposited by a radio frequency magnetron sputtering method Appl. Phys. Lett. 86 15 2005 153503
20. 1-xO as a II-VI widegap semiconductor alloy Appl. Phys. Lett. 72 19 1998 2466 2468
21. S.T. Tan, B.J. Chen, X.W. Sun, W.J. Fan, H.S. Kwok, X.H. Zhang, and S.J. Chua Blueshift of optical band gap in ZnO thin films grown by metal-organic chemical-vapor deposition J. Appl. Phys. 98 1 2005 013505
22. 1-xO films prepared by in situ atomic layer doping technique ECS J. Solid State Sci. 2 1 2013 P31 P35
23. (3) ceramics Ceram. Int. 38 8 2012 6693 6697
24. G.H. Kim, W.H. Jeong, B. Du Ahn, H.S. Shin, H.J. Kim, H.J. Kim, M.K. Ryu, K.B. Park, J.B. Seon, and S.Y. Lee Investigation of the effects of Mg incorporation into InZnO for high-performance and high-stability solution-processed thin film transistors Appl. Phys. Lett. 96 16 2010 163506
25. H. Tampo, H. Shibata, K. Matsubara, A. Yamada, P. Fons, S. Niki, M. Yamagata, and H. Kanie Two-dimensional electron gas in Zn polar ZnMgO/ZnO heterostructures grown by radical source molecular beam epitaxy Appl. Phys. Lett. 89 13 2006 132113
26. xO/ZnO heterointerface J. Cryst. Growth 301-302 0 2007 353 357
27. H.A. Chin, I.C. Cheng, C.I. Huang, Y.R. Wu, W.S. Lu, W.L. Lee, J.Z. Chen, K.C. Chiu, and T.S. Lin Two dimensional electron gases in polycrystalline MgZnO/ZnO heterostructures grown by rf-sputtering process J. Appl. Phys. 108 5 2010 054503
28. H.A. Chin, I.C. Cheng, C.K. Li, Y.R. Wu, J.Z. Chen, W.S. Lu, and W.L. Lee Electrical properties of modulation-doped rf-sputtered polycrystalline MgZnO/ZnO heterostructures J. Phys. D: Appl. Phys. 44 45 2011 455101
29. S.-T. Lien, H.-C. Li, Y.-J. Yang, C.-C. Hsu, I.-C. Cheng, and J.-Z. Chen Atmospheric pressure plasma jet annealed ZnO films for MgZnO/ZnO heterojunctions J. Phys. D: Appl. Phys. 46 7 2013 075202
30. C.I. Huang, H.A. Chin, Y.R. Wu, I.C. Cheng, J.Z. Chen, K.C. Chiu, and T.S. Lin Mobility enhancement of polycrystalline MgZnO/ZnO thin film layers with modulation doping and polarization effects IEEE Trans. Electron Dev. 57 3 2010 696 703
31. A. Tsukazaki, S. Akasaka, K. Nakahara, Y. Ohno, H. Ohno, D. Maryenko, A. Ohtomo, and M. Kawasaki Observation of the fractional quantum Hall effect in an oxide Nat. Mater. 9 11 2010 889 893
32. M. Nakano, A. Tsukazaki, A. Ohtomo, K. Ueno, S. Akasaka, H. Yuji, K. Nakahara, T. Fukumura, and M. Kawasaki Electronic-field control of two-dimensional electrons in polymer-gated-oxide semiconductor heterostructures Adv. Mater. 22 8 2010 876
33. I.C. Cheng, B.S. Wang, H.H. Hou, and J.Z. Chen MgZnO/ZnO heterostructure field-effect transistors fabricated by rf-sputtering ECS Trans. 50 8 2013 83 93
34. S. Fujita, H. Tanaka, and S. Fujita MBE growth of wide band gap wurtzite MgZnO quasi-alloys with MgO/ZnO superlattices for deep ultraviolet optical functions J. Cryst. Growth 278 1-4 2005 264 267
35. J.W. Dong, A. Osinsky, B. Hertog, A.M. Dabiran, P.P. Chow, Y.W. Heo, D.P. Norton, and S.J. Pearton Development of MgZnO-ZnO-AlGaN heterostructures for ultraviolet light emitting applications J. Electron. Mater. 34 4 2005 416 423
36. S. Heitsch, G. Benndorf, G. Zimmermann, C. Schulz, D. Spemann, H. Hochmuth, H. Schmidt, T. Nobis, M. Lorenz, and M. Grundmann Optical and structural properties of MgZnO/ZnO hetero- and double heterostructures grown by pulsed laser deposition Appl. Phys. A - Mater. 88 1 2007 99 104
37. 1-xO (x≥0.67) thin films on sapphire (0001) Appl. Phys. Lett. 85 6 2004 905
38. D. Xin, L. Yanbo, H. Keke, Z. Wang, Y. Yin, X. Xiaochuan, Z. Yuantao, W. Jin, Z. Baolin, and D. Guotong Study on the p-MgZnO/i-ZnO/n-MgZnO light-emitting diode fabricated by MOCVD J. Phys. D: Appl. Phys. 42 23 2009 235101
39. L.K. Wang, Z.G. Ju, C.X. Shan, J. Zheng, D.Z. Shen, B. Yao, D.X. Zhao, Z.Z. Zhang, B.H. Li, and J.Y. Zhang MgZnO metal-semiconductor-metal structured solar-blind photodetector with fast response Solid State Commun. 149 45-46 2009 2021 2023
40. S. Han, D.Z. Shen, J.Y. Zhang, Y.M. Zhao, D.Y. Jiang, Z.G. Ju, D.X. Zhao, and B. Yao Characteristics of cubic MgZnO thin films grown by radio frequency reaction magnetron co-sputtering J. Alloys Compd. 485 1-2 2009 794 797
41. 1-xO (0.0≤x≤0.3) thin films J. Sol-Gel Sci. Technol. 52 2 2009 228 234
42. M. Wang, E.J. Kim, S. Kim, J.S. Chung, I.-K. Yoo, E.W. Shin, S.H. Hahn, and C. Park Optical and structural properties of sol-gel prepared MgZnO alloy thin films Thin Solid Films 516 6 2008 1124 1129
43. xO nanostructures prepared by a sol-gel method Ceram. Int. 39 5 2013 5597 5608
44. xO thin films deposited by spray pyrolysis Phys. Status Solidi C 7 9 2010 2306 2310
45. xO thin films deposited by ultrasonic spray pyrolysis Thin Solid Films 492 1-2 2005 248 252
46. 2 films for DSSC application by a rapid atmospheric pressure plasma jet sintering process J. Power Sources 234 2013 16 22
47. M.-H. Chiang, K.-C. Liao, I.-M. Lin, C.-C. Lu, H.-Y. Huang, C.-L. Kuo, J.-S. Wu, C.-C. Hsu, and S.-H. Chen Effects of oxygen addition and treating distance on surface cleaning of ITO glass by a non-equilibrium nitrogen atmospheric-pressure plasma jet Plasma Chem. Plasma Process. 30 5 2010 553 563
48. Y.W. Hsu, H.C. Li, Y.J. Yang, and C.C. Hsu Deposition of zinc oxide thin films by an atmospheric pressure plasma jet Thin Solid Films 519 10 2011 3095 3099
49. Y.W. Hsu, Y.J. Yang, C.Y. Wu, and C.C. Hsu Downstream characterization of an atmospheric pressure pulsed arc jet Plasma Chem. Plasma Process. 30 3 2010 363 372
50. C.-C. Hsu, and C.-Y. Wu Electrical characterization of the glow-to-arc transition of an atmospheric pressure pulsed arc jet J. Phys. D: Appl. Phys. 42 21 2009 215202
51. C.-C. Hsu, and Y.-J. Yang The increase of the jet size of an atmospheric-pressure plasma jet by ambient air control IEEE Trans. Plasma Sci. 38 3 2010 496 499
52. A.L. Patterson The Scherrer formula for X-ray particle size determination Phys. Rev. 56 10 1939 978 982
53. P. Scherrer Estimation of the size and internal structure of colloidal particles by means of röntgen vol. 2 1918 Nachrichten von der Akademie der Wissenschaften Gottingen 98
54. S.J. Kwon, J.H. Park, and J.G. Park Wrinkling of a sol-gel-derived thin film Phys. Rev. E: Stat., Nonlinear, Soft Matter Phys. 71 1 Pt. 1 2005 011604
55. S. Mandal, R.K. Singha, A. Dhar, and S.K. Ray Optical and structural characteristics of ZnO thin films grown by rf magnetron sputtering Mater. Res. Bull. 43 2 2008 244 250
56. Y. Kayanuma Quantum-size effects of interacting electrons and holes in semiconductor microcrystals with spherical shape Phys. Rev. B: Condens. Matter 38 14 1988 9797 9805
57. 2:16% Y thin films Appl. Phys. Lett. 74 3 1999 341
58. J. Tauc J. Tauc, Amorphous and Liquid Semiconductors, Plenum 1974
59. xO (M=Li, Mg) Jpn. J. Appl. Phys. Part 1 36 9B 1997 6008 6011
60. 1-xO thin films Phys. Status Solidi A 202 9 2005 1825 1828