Phase transitions of room temperature RF-sputtered ZnO/Mg 0.4Zn 0.6O multilayer thin films after thermal annealing

Thin Solid Films

Volumn 520, Issue 6, 2012, Pages 1918-1923

  Chen, Jian Zhang ^a   Li, Chih Hung ^a   Cheng, I Chun ^b  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^b NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

Annealing; Crystal microstructure; Magnesium zinc oxide; Multilayers; Phase transition; X ray diffraction; Zinc oxide

Indexed keywords

ABSORPTION EDGES; ANNEALING PROCESS; HEXAGONAL WURTZITE STRUCTURE; MATRIX; MULTI-LAYER THIN FILM; OPTICAL TRANSMISSION SPECTRUM; ROOM TEMPERATURE; THERMAL-ANNEALING; TRANSMISSION SPECTRUMS; ZNO;

ANNEALING; CRYSTAL MICROSTRUCTURE; CRYSTALLINE MATERIALS; FILM PREPARATION; LIGHT TRANSMISSION; MAGNESIUM; MULTILAYER FILMS; MULTILAYERS; OXIDE FILMS; PHASE TRANSITIONS; SUPERLATTICES; THERMODYNAMIC STABILITY; X RAY DIFFRACTION; ZINC OXIDE; ZINC SULFIDE;

ZINC;

EID: 84855938529     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2011.09.052     Document Type: Article

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