Catalytic combustion reactions during atomic layer deposition of Ru studied using 18O2 isotope labeling

Journal of Physical Chemistry C

Volumn 117, Issue 41, 2013, Pages 21320-21330

  Leick, N ^a   Agarwal, S ^b   Mackus, A J M ^a   Potts, S E ^a   Kessels, W M M ^a  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b Department of Metallurgical and Materials Engineering   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CATALYTIC COMBUSTION; CATALYTIC METAL SURFACES; COMBUSTION REACTIONS; DISSOCIATIVE CHEMISORPTION; GAS-PHASE REACTIONS; HYDROCARBON LIGANDS; ISOTOPE LABELING; QUADRUPOLE MASS SPECTROMETRY;

ATOMIC LAYER DEPOSITION; CARBON DIOXIDE; CATALYSIS; CHEMISORPTION; DEHYDROGENATION; DEPOSITION; DISSOCIATION; HYDROCARBONS; ISOTOPES; LIGANDS; MASS SPECTROMETRY; PHASE INTERFACES; REACTION PRODUCTS; SURFACE CHEMISTRY; SURFACE REACTIONS;

RUTHENIUM;

EID: 84886021363     PISSN: 19327447     EISSN: 19327455     Source Type: Journal    
DOI: 10.1021/jp4060457     Document Type: Article

References (108)

1. Liu, C.; Wang, C.-C.; Kei, C.-C.; Hsueh, Y.-C.; Perng, T.-P. Atomic Layer Deposition of Platinum Nanoparticles on Carbon Nanotubes for Application in Proton-Exchange Membrane Fuel Cells Small 2009, 5, 1535-1538
2. ITRS www.itrs.net-Process integration, devices, and structures, 2010.
3. Kim, S. K.; Lee, S. W.; Han, J. H.; Lee, B.; Han, S.; Hwang, C. S. Capacitors with an Equivalent Oxide Thickness of <0.5 nm for Nanoscale Electronic Semiconductor Memory Adv. Funct. Mater. 2010, 20, 2989-3003
4. Kittl, J. A.; Opsomer, K.; Popovici, M.; Menou, N.; Kaczer, B.; Wang, X. P.; Adelmann, C.; Pawlak, M. A.; Tomida, K.; Rothschild, A. High-k dielectrics for Future Generation Memory Devices Microelectron. Eng. 2009, 86, 1789-1795
5. Kohl, D. The Role of Noble Metals in the Chemistry of Solid-State Gas Sensors Sens. Actuators, B: Chem. 1990, 1, 158-165
6. Patil, L. A.; Bari, A. R.; Shinde, M. D.; Deo, V.; Kaushik, M. P. Detection of Dimethylmethylphosphonate-a Simulant of Sarin: The Highly Toxic Chemical Warfare-Using Platinum Activated Nanocrystalline ZnO Thick Films Sens. Actuators, B: Chem. 2012, 161, 372-380
7. Bartlett, P. N.; Guerin, S. A Micromachined Calorimetric Gas Sensor: an Application of Electrodeposited Nanostructured Palladium for the Detection of Combustible Gases Anal. Chem. 2002, 75, 126-132
8. Ukisu, Y.; Miyadera, T. Dechlorination of Polychlorinated Dibenzo-p-dioxins Catalyzed by Noble Metal Catalysts under Mild Conditions Chemosphere 2002, 46, 507-510
9. 3 J. Environ. Sci. 2007, 19, 644-646
10. x: A Review Int. J. Energy Res. 1999, 23, 351-369
11. George, S. M. Atomic Layer Deposition: An Overview Chem. Rev. 2010, 110, 111-131
12. Comstock, D. J.; Christensen, S. T.; Elam, J. W.; Pellin, M. J.; Hersam, M. C. Tuning the Composition and Nanostructure of Pt/Ir Films via Anodized Aluminum Oxide Templated Atomic Layer Deposition Adv. Funct. Mater. 2010, 20, 3099-3105
13. Knoops, H. C. M.; Mackus, A. J. M.; Donders, M. E.; Van de Sanden, M. C. M.; Notten, P. H. L.; Kessels, W. M. M. Remote Plasma ALD of Platinum and Platinum Oxide Films Electrochem. Solid-State Lett. 2009, 12, G34-G36
14. Christensen, S. T.; Feng, H.; Libera, J. L.; Guo, N.; Miller, J. T.; Stair, P. C.; Elam, J. W. Supported Ru-Pt Bimetallic Nanoparticle Catalysts Prepared by Atomic Layer Deposition Nano Lett. 2010, 10, 3047-3051
15. Biener, J.; Baumann, T. F.; Wang, Y.; Nelson, E. J.; Kucheyev, S. O.; Hamza, A. V.; Kemel, M.; Ritala, M.; Leskelä, M. Ruthenium/Aerogel Nanocomposites via Atomic Layer Deposition Nanotechnology 2007, 18, 55303
16. 3 Thin Films Jpn. J. Appl. Phys. 1998, 37, 3396-3401
17. Swerts, J.; Armini, S.; Carbonell, L.; Delabie, A.; Franquet, A.; Mertens, S.; Popovici, M.; Schaekers, M.; Witters, T.; Tokei, Z.; Beyer, G.; Van Elshocht, S.; Gravey, V.; Cockburn, A.; Shah, K.; Aubuchon, J. Scalability of Plasma Enhanced Atomic Layer Deposited Ruthenium Films for Interconnect Applications J. Vac. Sci. Technol. A 2012, 30, 01A103-6
18. Kim, J.-Y.; Kil, D.-S.; Kim, J.-H.; Kwon, S.-H.; Ahn, J.-H.; Roh, J.-S.; Park, S.-K. Ru Films from Bis(ethylcyclopentadienyl)ruthenium Using Ozone as a Reactant by Atomic Layer Deposition for Capacitor Electrodes J. Electrochem. Soc. 2012, 159, H560-H564
19. Park, S. J.; Kim, W. H.; Lee, H. B. R.; Maeng, W. J.; Kim, H. Thermal and Plasma Enhanced Atomic Layer Deposition Ruthenium and Electrical Characterization as a Metal Electrode Microelectron. Eng. 2008, 85, 39-44
20. Kwon, O. K.; Kwon, S. H.; Park, H. S.; Kang, S. W. PEALD of a Ruthenium Adhesion Layer for Copper Interconnects J. Electrochem. Soc. 2004, 151, C753-C756
21. Aaltonen, T.; Alen, P.; Ritala, M.; Leskelä, M. Ruthenium Thin Films Grown by Atomic Layer Deposition Chem. Vap. Deposition 2003, 9, 45-49
22. Kim, S. K.; Lee, S. Y.; Lee, S. W.; Hwang, G. W.; Hwang, C. S.; Lee, J. W.; Jeong, J. Atomic Layer Deposition of Ru Thin Films using 2,4-(Dimethylpentadienyl)(ethylcyclopentadienyl)Ru by a Liquid Injection System J. Electrochem. Soc. 2007, 154, D95-D101
23. Kim, S. K.; Hoffmann-Eifert, S.; Waser, R. Growth of Noble Metal Ru Thin Films by Liquid Injection Atomic Layer Deposition J. Phys. Chem. C 2009, 113, 11329-11335
24. Kukli, K.; Kemell, M.; Puukilainen, E.; Aarik, J.; Aidla, A.; Sajavaara, T.; Laitinen, M.; Tallarida, M.; Sundqvist, J.; Ritala, M.; Leskelä, M. Atomic Layer Deposition of Ruthenium Films from (Ethylcyclopentadienyl) (pyrrolyl)-ruthenium and Oxygen J. Electrochem. Soc. 2011, 158, D158-D165
25. Kukli, K.; Ritala, M.; Kemell, M.; Leskelä, M. High Temperature Atomic Layer Deposition of Ruthenium from N,N-Dimethyl-1-ruthenocenylethylamine J. Electrochem. Soc. 2010, 157, D35-D40
26. Kukli, K.; Aarik, J.; Aidla, A.; Uustare, T.; Jogi, I.; Lu, J.; Tallarida, M.; Kemell, M.; Kiisler, A. A.; Ritala, M.; Leskelä, M. Structure and morphology of Ru films grown by atomic layer deposition from 1-ethyl-1′-methyl-ruthenocene J. Cryst. Growth 2010, 312, 2025-2032
27. Gregorczyk, K.; Henn-Lecordier, L.; Gatineau, J.; Dussarrat, C.; Rubloff, G. Atomic Layer Deposition of Ruthenium Using the Novel Precursor bis(2,6,6-trimethyl-cyclohexadienyl)ruthenium Chem. Mater. 2011, 23, 2650-2656
28. Choi, S.-H.; Cheon, T.; Kim, S.-H.; Kang, D.-H.; Park, G.-S.; Kim, S. Thermal Atomic Layer Deposition (ALD) of Ru Films for Cu Direct Plating J. Electrochem. Soc. 2011, 158, D351-D356
29. Geidel, M.; Junige, M.; Albert, M.; Bartha, J. W. In-situ Analysis on the Initial Growth of Ultra-Thin Ruthenium Films with Atomic Layer Deposition Microelectron. Eng. 2013, 107, 151-155
30. Aaltonen, T.; Ritala, M.; Tung, Y. L.; Chi, Y.; Arstila, K.; Meinander, K.; Leskelä, M. Atomic Layer Deposition of Noble Metals: Exploration of the Low Limit of the Deposition Temperature J. Mater. Res. 2004, 19, 3353-3358
31. 8) Precursor Jpn. J. Appl. Phys. 2002, 41, 6852-6856
32. Kwon, O. K.; Kwon, S. H.; Park, H. S.; Kang, S. W. Plasma-Enhanced Atomic Layer Deposition of Ruthenium Thin Films Electrochem. Solid-State Lett. 2004, 7, C46-C48
33. Yim, S. S.; Lee, M. S.; Kim, K. S.; Kim, K. B. Formation of Ru Nanocrystals by Plasma Enhanced Atomic Layer Deposition for Nonvolatile Memory Applications Appl. Phys. Lett. 2006, 89, 93115
34. Aaltonen, T.; Rahtu, A.; Ritala, M.; Leskelä, M. Reaction Mechanism Studies on Atomic Layer Deposition of Ruthenium and Platinum Electrochem. Solid-State Lett. 2003, 6, C130-C133
35. Christensen, S. T.; Elam, J. W. Atomic Layer Deposition of Ir-Pt Alloy Films Chem. Mater. 2010, 22, 2517-2525
36. Kessels, W. M. M.; Knoops, H. C. M.; Dielissen, S. A. F.; Mackus, A. J. M.; Van de Sanden, M. C. M. Surface Reactions During Atomic Layer Deposition of Pt Derived from Gas Phase Infrared Spectroscopy Appl. Phys. Lett. 2009, 95, 013114
37. 3 and Oxygen Chem. Vap. Deposition 2004, 10, 215-219
38. 3 Chem. Mater. 2011, 23, 2766-2771
39. Rauscher, H.; Jakob, P.; Menzel, D.; Lloyd, D. R. The Adsorption and Reaction of Toluene on Ru(001), and Coadsorption with CO Surf. Sci. 1991, 256, 27-41
40. Weiss, M. J.; Hagedorn, C. J.; Weinberg, W. H. Trapping-Mediated and Multilayer-Induced Dissociative Chemisorption of Cyclobutane on Ru(001) J. Am. Chem. Soc. 1999, 121, 5047-5055
41. Garcia, A. R.; Barros, R. B.; Ilharco, L. M. Reactivity of 3-hexyne on Oxygen Modified Ru(001) Surfaces: Observation of Oxametallacycles by RAIRS Surf. Sci. 2009, 603, 380-386
42. Ilharco, L. M.; Garcia, A. R.; Hargreaves, E. C.; Chesters, M. A. A Comparative Reflection-Absorption Infrared Spectroscopy Study of the Thermal Decomposition of 1-Hexene on Ru(0001) and on Pt(111) Surf. Sci. 2000, 459, 115-123
43. Hrbek, J. Weakly Bound Hydrogen on Oxygen Modified Ru(001) Surface J. Catal. 1986, 100, 523-525
44. Wu, M. C.; Xu, Q.; Goodman, D. W. Investigations of Graphitic Overlayers Formed from Methane Decomposition on Ru(0001) and Ru(112Ì...0) Catalysts with Scanning-Tunneling-Microscopy and High-Resolution Electron-Energy-Loss Spectroscopy J. Phys. Chem. 1994, 98, 5104-5110
45. Elliott, S. D. Mechanism, Products, and Growth Rate of Atomic Layer Deposition of Noble Metals Langmuir 2010, 26, 9179-9182
46. Mackus, A. J. M.; Leick, N.; Baker, L.; Kessels, W. M. M. Catalytic Combustion and Dehydrogenation Reactions during Atomic Layer Deposition of Platinum Chem. Mater. 2012, 24, 1752-1761
47. Erkens, I. J. M.; Mackus, A. J. M.; Knoops, H. C. M.; Smits, P.; Van de Ven, T. H. M.; Roozeboom, F.; Kessels, W. M. M. Mass Spectrometry Study of the Temperature Dependence of Pt Film Growth by Atomic Layer Deposition ECS J. Solid State Sci. Technol. 2012, 1, P255-P262
48. 2 Chem. Mater. 2012, 24, 3696-3700
49. George, P. M.; Avery, N. R.; Weinberg, W. H.; Tebbe, F. N. Formation and Identification of Methylene on Ru(001) J. Am. Chem. Soc. 1983, 105, 1393-1394
50. 2 Electrochem. Solid-State Lett. 2009, 12, D85-D88
51. Bradford, M. C. J. Two-step Methane Conversion to Higher Hydrocarbons: Comment on the Relevance of Metal-Carbon Bond Strength J. Catal. 2000, 189, 238-243
52. Choudhary, T. V; Goodman, D. W. Methane Activation on Ruthenium: The Nature of the Surface Intermediates Top. Catal. 2002, 20, 35-42
53. Ditlevsen, P. D.; Vanhove, M. A.; Somorjai, G. A. Molecular Modeling of Ethylene Decomposition on Platinum Surfaces Surf. Sci. 1993, 292, 267-275
54. Ertl, G. Reactions at Surfaces: From Atoms to Complexity (Nobel lecture) Angew. Chem., Int. Ed. 2008, 47, 3524-3535
55. Over, H.; Seitsonen, A. P. Surface Chemistry: Oxidation of Metal Surfaces Science 2002, 297, 2003-2005
56. Böttcher, A.; Niehus, H.; Schwegmann, S.; Over, H.; Ertl, G. CO Oxidation Reaction over Oxygen-rich Ru(0001) Surfaces J. Phys. Chem. B 1997, 101, 11185-11191
57. Blume, R.; Niehus, H.; Conrad, H.; Böttcher, A.; Aballe, L.; Gregoratti, L.; Barinov, A.; Kiskinova, M. Identification of Subsurface Oxygen Species Created during Oxidation of Ru(0001) J. Phys. Chem. B 2005, 109, 14052-14058
58. Blume, R.; Havecker, M.; Zafeiratos, S.; Teschner, D.; Kleimenov, E.; Knop-Gericke, A.; Schlogl, R.; Barinov, A.; Dudin, P.; Kiskinova, M. Catalytically Active States of Ru(0001) Catalyst in CO Oxidation Reaction J. Catal. 2006, 239, 354-361
59. Blume, R.; Niehus, H.; Conrad, H.; Böttcher, A. Oxide-free Oxygen Incorporation into Ru(0001) J. Chem. Phys. 2004, 120, 3871-3879
60. Böttcher, A.; Niehus, H. Formation of Subsurface Oxygen at Ru(0001) J. Chem. Phys. 1999, 110, 3186-3195
61. Stampfl, C.; Schwegmann, S.; Over, H.; Scheffler, M.; Ertl, G. Structure and Stability of a High-coverage (1 × 1) Oxygen Phase on Ru(0001) Phys. Rev. Lett. 1996, 77, 3371-3374
62. 2(110) J. Phys. Chem. B 2001, 105, 3752-3758
63. Meinel, K.; Wolter, H.; Ammer, C.; Beckmann, A.; Neddermeyer, H. Adsorption Stages of O on Ru(0001) Studied by Means of Scanning Tunnelling Microscopy J. Phys.: Condens. Matter. 1997, 9, 4611-4619
64. Reuter, K.; Ganduglia-Pirovano, M. V.; Stampfl, C.; Scheffler, M. Metastable Precursors during the Oxidation of the Ru(0001) Surface Phys. Rev. B 2002, 65, 165403
65. Todorova, M.; Reuter, K.; Scheffler, M. Density-functional Theory Study of the Initial Oxygen Incorporation in Pd(111) Phys. Rev. B 2005, 71, 195403
66. Peden, C. H. F.; Goodman, D. W.; Weisel, M. D.; Hoffmann, F. M. In-situ FT-IRAS Study of the CO Oxidation Reaction over Ru(001): I. Evidence for an Eley-Rideal Mechanism at High Pressures? Surf. Sci. 1991, 253, 44-58
67. Bonn, M.; Funk, S.; Hess, C.; Denzler, D. N.; Stampfl, C.; Scheffler, M.; Wolf, M.; Ertl, G. Phonon- versus Electron-mediated Desorption and Oxidation of CO on Ru(0001) Science 1999, 285, 1042-1045
68. 2(110) Domains Surf. Sci. 2000, 465, 1-8
69. Somorjai, G. A.; Li, Y. Selective Nanocatalysis of Organic Transformation by Metals: Concepts, Model Systems, and Instruments Top. Catal. 2010, 53, 832-847
70. Huff, M.; Schmidt, L. D. Ethylene Formation by Oxidative Dehydrogenation of Ethane over Monoliths at Very Short Contact Times J. Phys. Chem. 1993, 97, 11815-11822
71. Mantzaras, J. In Handbook of Combustion; Wiley-VCH Verlag GmbH & Co. KGaA: New York, 2010.
72. Lee, J. H.; Trimm, D. L. Catalytic Combustion of Methane Fuel Process. Technol. 1995, 42, 339-359
73. Reinke, M.; Mantzaras, J.; Schaeren, R.; Bombach, R.; Inauen, A.; Schenker, S. High-Pressure Catalytic Combustion of Methane over Platinum: In situ Experiments and Detailed Numerical Predictions Combust. Flame 2004, 136, 217-240
74. 3 in a Commercial 200 mm ALD Reactor J. Electrochem. Soc. 2007, 154, G165-G169
75. 2 Plasma J. Vac. Sci. Technol. A 2011, 29, 021016-0210167
76. Wang, H. T.; Gordon, R. G.; Alvis, R.; Ulfig, R. M. Atomic Layer Deposition of Ruthenium Thin Films from an Amidinate Precursor Chem. Vap. Deposition 2009, 15, 312-319
77. 2 Thin Films Studied by In situ Infrared Spectroscopy Chem. Mater. 2010, 22, 4867-4878
78. 2-based Plasmas J. Vac. Sci. Technol. A 2012, 30, 01A1011-01A10110
79. NIST Chemistry WebBook; NIST Standard Reference Database Number 69, NIST: Maryland.
80. Austin, W. E.; Holme, A. E.; Leck, J. H. In Quadrupole Mass Spectrometry and Its Applications; Dawson, P. H., Ed.; American Institute of Physics: Amsterdam, 1997.
81. Singh, H.; Coburn, J. W.; Graves, D. B. Appearance of Potential Mass Spectrometry: Discrimination of Dissociative Ionization Products J. Vac. Sci. Technol. A 2000, 18, 299-305
82. Hwang, W.; Kim, Y. K.; Rudd, M. E. New Model for Electron-impact Ionization Cross Sections of Molecules J. Chem. Phys. 1996, 104, 2956-2966
83. Morrow, B. A.; Ramamurthy, P. Infrared Studies of the Formation of Hydroxyl Groups during Hydrogen-Oxygen Reactions on Noble Metal Catalysts J. Phys. Chem. 1973, 77, 3052-3058
84. Hills, M. M.; Parmeter, J. E.; Mullins, C. B.; Weinberg, W. H. Interaction of Ethylene with the Ruthenium(001) Surface J. Am. Chem. Soc. 1986, 108, 3554-3562
85. Getman, R. B.; Xu, Y.; Schneider, W. F. Thermodynamics of Environment-Dependent Oxygen Chemisorption on Pt(111) J. Phys. Chem. B 2008, 112, 9559-9572
86. Taylor, J. L.; Ibbotson, D. E.; Weinberg, W. H. The Chemisorption of Oxygen on the (110) Surface of Iridium Surf. Sci. 1979, 79, 349-384
87. 2 Surf. Sci. 2009, 603, 1126-1134
88. 2(110) Domains Surf. Sci. 2000, 465, 1-8
89. Lee, H.-I.; White, J. M. Carbon Monoxide Oxidation over Ru(001) J. Catal. 1980, 63, 261-264
90. Over, H.; Seitsonen, A. P. Surface Chemistry: Oxidation of Metal Surfaces Science 2002, 297, 2003-2005
91. Over, H.; Kim, Y. D.; Seitsonen, A. P.; Wendt, S.; Lundgren, E.; Schmid, M.; Varga, P.; Morgante, A.; Ertl, G. Atomic-Scale Structure and Catalytic Reactivity of the RuO2(110) Surface Science 2000, 287, 1474-1476
92. Over, H. Ruthenium Dioxide, a Fascinating Material for Atomic Scale Surface Chemistry Appl. Phys. A: Mater. Sci. Process. 2002, 75, 37-44
93. Mars, P.; Van Krevelen, D. W. Oxidations Carried out by Means of Vanadium Oxide Catalysts Chem. Eng. Sci. 1954, 3 (Supplem) 41-59
94. Baraldi, A.; Lizzit, S.; Paolucci, G. Identification of Atomic Adsorption Site by Means of High-resolution Photoemission Surface Core-Level Shift: Oxygen on Ru(1010) Surf. Sci. 2000, 457, L354-L360
95. Schwegmann, S.; Seitsonen, A. P.; De Renzi, V.; Dietrich, H.; Bludau, H.; Gierer, M.; Over, H.; Jacobi, K.; Scheffler, M.; Ertl, G. Oxygen Adsorption on the Ru(101Ì...0) Surface: Anomalous Coverage Dependence Phys. Rev. B 1998, 57, 15487-15495
96. Assmann, J.; Narkhede, V.; Breuer, N. A.; Muhler, M.; Seitsonen, A. P.; Knapp, M.; Crihan, D.; Farkas, A.; Mellau, G.; Over, H. Heterogeneous Oxidation Catalysis on Ruthenium: Bridging the Pressure and Materials Gaps and Beyond J. Phys.: Condens. Matter 2008, 20, 184017
97. 2(100) on Ru(101Ì...0): Surface Structure and Other Properties J. Phys. Chem B 2001, 105, 2205-2211
98. Over, H.; He, Y. B.; Farkas, A.; Mellau, G.; Korte, C.; Knapp, M.; Chandhok, M.; Fang, M. Long-term Stability of Ru-based Protection Layers in Extreme Ultraviolet Lithography: A Surface Science Approach J. Vac. Sci. Technol. B 2007, 25, 1123-1138
99. 2(110) by Hydrogen Exposure at Room Temperature J. Phys. Chem. B 2006, 110, 14007-14010
100. Liu, H.; Iglesia, E. Selective Oxidation of Methanol and Ethanol on Supported Ruthenium Oxide Clusters at Low Temperatures J. Phys. Chem. B 2005, 109, 2155-63
101. 3 Catalysts Appl. Catal. B: Environ. 2009, 89, 22-32
102. 2(110) Surface J. Phys. Chem. C 2007, 111, 5363-5373
103. Villani, K.; Kirschhock, C. E. A.; Liang, D.; Van Tendeloo, G.; Martens, J. A. Catalytic Carbon Oxidation Over Ruthenium-Based Catalysts Angew. Chem., Int. Ed. 2006, 45, 3106-3109
104. Henderson, M. A.; Radloff, P. L.; Greenlief, C. M.; White, J. M.; Mims, C. A. Surface Chemistry of Ketene on Ruthenium(001). 2. Surface Processes J. Phys. Chem. 1988, 92, 4120-4127
105. Loginova, E.; Bartelt, N. C.; Feibelman, P. J.; McCarty, K. F. Factors Influencing Graphene Growth on Metal Surfaces New J. Phys. 2009, 11, 63046
106. Kim, S. K.; Han, J. H.; Kim, G. H.; Hwang, C. S. Investigation on the Growth Initiation of Ru Thin Films by Atomic Layer Deposition Chem. Mater. 2010, 22, 2850-2856
107. He, Y. B.; Knapp, M.; Lundgren, E.; Over, H. Ru(0001) Model Catalyst under Oxidizing and Reducing Reaction Conditions: In-Situ High-Pressure Surface X-ray Diffraction Study J. Phys. Chem. B 2005, 109, 21825-21830
108. 2(110) Surfaces J. Phys. Chem. B 2004, 109, 2139-2148