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ECS Journal of Solid State Science and Technology

Volumn 1, Issue 6, 2012, Pages

Mass spectrometry study of the temperature dependence of Pt film growth by atomic layer deposition

(7) Erkens, I J M a,b Mackus, A J M a Knoops, H C M a Smits, P a Van De Ven, T H M a Roozeboom, F a Kesselsa, W M M a

a EINDHOVEN UNIVERSITY OF TECHNOLOGY (Netherlands)

b HOLST CENTRE (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84877770223 PISSN: 21628769 EISSN: 21628777 Source Type: Journal
DOI: 10.1149/2.006206jss Document Type: Article

Times cited : (31)

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