Microfabrication of bulk PZT transducers by dry film photolithography and micro powder blasting

Journal of Micromechanics and Microengineering

Volumn 22, Issue 8, 2012, Pages

  Misri, I ^a   Hareesh, P ^a   Yang, S ^a   Devoe, D L ^a  

^a UNIVERSITY OF MARYLAND   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BULK PZT; DRY FILMS; DRY-FILM PHOTORESISTS; ETCH RATES; ETCHING CHARACTERISTICS; ETCHING PARAMETERS; FACILE FABRICATION; MASK DIMENSIONS; MICROPOWDERS; MICROSCALE PATTERNING; PATTERNING METHODS; PROCESS PARAMETERS; PZT;

ELECTROMECHANICAL DEVICES; ETCHING; MEMS; PHOTORESISTS;

BLASTING;

EID: 84864425589     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/22/8/085017     Document Type: Article

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