New results on powder blasting techniques applied to the manufacture of piezocomposite structures

Proceedings of the IEEE Ultrasonics Symposium

Volumn 2, Issue , 2002, Pages 1115-1118

  Sayah, A ^b   Clatot, S ^a   Wilm, M ^a   Robert, L ^a   Daniau, W ^a   Gijs, M ^b   Ballandras, S ^a  

^a CNRS   (France)

^b EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; COMPUTER SIMULATION; ELASTOMERS; ETCHING; FINITE ELEMENT METHOD; PARTICLES (PARTICULATE MATTER); PHOTOLITHOGRAPHY; POWDERS; SEMICONDUCTING LEAD COMPOUNDS; SILICONES;

LEAD ZIRCONIUM TITANATE; PIEZOCOMPOSITE STRUCTURE; POWDER BLASTING;

PIEZOELECTRIC TRANSDUCERS;

EID: 0036995318     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

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2. A. Bertsch, S. Zissi, J.Y. Jezequel, S. Corbel, and J.C. Andre, "Microstereophotolithography using a liquid crystal display as dynamic mask-generator.," Microsystem Technol., vol. 3, pp 42-47, 1996.
3. E. Belloy, A. Sayah, and M.A.M. Gijs, "Powder blasting for three-dimensional microstructuring of glass.," Sens. Actuators A, Phys., vol. 86, pp. 231-237, 2000.
4. E. Belloy, A. Sayah, and M. A. M. Gijs, "Oblique powder blasting for three-dimensional micromachining of brittle materials.," Sens. Actuators A, Phys., vol. 92, pp. 358-363, 2001.
5. S. Ballandras, M. Wilm, M.A.M. Gijs, A. Sayah, E. Andrey, J.-J. Boy, L. Robert, J.-C. Baudouy, W. Daniau, and V. Laude, "Periodic arrays of transducers built using sand blasting and ultrasound micromachining techniques for the fabrication of piezocomposite materials.," in Proc. Of the IEEE Ultrasonics Symposium, Atlanta, Georgia, 2001, pp. 871-874.
6. W. A. Smith and B. A. Auld, "Modeling 1-3 composite piezo-electrics: Thickness-mode oscillations.," IEEE Trans. UFFC, vol. 38, no. 1, pp. 40-47, 1991.