PZT thin films for microsensors and actuators: Where do we stand?

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 47, Issue 4, 2000, Pages 903-915

  Muralt, Paul ^a  

^a EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; LEAD COMPOUNDS; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; MICROSENSORS; THIN FILMS;

ULTRASONIC MICROMOTORS;

PIEZOELECTRIC DEVICES;

EID: 0034228288     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/58.852073     Document Type: Article

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