Micro ultrasonic machining and its applications in MEMS

Sensors and Actuators, A: Physical

Volumn 57, Issue 2, 1996, Pages 159-164

  Sun, Xi Qing ^a,b   Masuzawa, T ^a   Fujino, M ^a  

^a INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

^b NEW JERSEY INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Electro discharge machining; Micro ultrasonic machining; Microelectromechanical systems; Wire electro discharge grinding

Indexed keywords

ASPECT RATIO; ELECTRIC DISCHARGES; MICROELECTROMECHANICAL DEVICES; MICROSTRUCTURE; ULTRASONIC APPLICATIONS;

ELECTRODISCHARGE MACHINING; MICRO ULTRASONIC MACHINING; WIRE ELECTRODISCHARGE GRINDING;

MICROMACHINING;

EID: 0030282663     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)80107-0     Document Type: Article

References (9)

1. X.-Q. Sun, T. Masuzawa and M. Fujino, Micro ultrasonic machining and self-aligned multilayer machining/assembly technologies for 3D micromachines, Proc. IEEE Workshop on Micro Electro Mechanical Systems, San Diego, CA, USA, Feb. 1996, pp. 312-317.
2. T. Masaki, K. Kavata and T. Masuzawa, Micro electro-discharge machining and its applications, Proc. IEEE Workshop on Micro Electro Mechanical Systems, Napa Valley, CA, USA, Feb. 1990, pp. 21-26.
3. M.A. Moreland and D.O. Moore, Versatile performance of ultrasonic machining, Ceram. Bull., 67 (1988) 1045-1047.
4. P. Dario, M.C. Carrozza, N. Croce, M.C. Montesi and M. Cocco, Non-traditional technologies for micro-fabrication, J. Micromech. Microeng., 5 (1995) 64-71.
5. H.H. Langen, T. Masuzawa and M. Fujino, Self-aligned machining and assembly of high aspect ratio microparts into silicon, Proc. IEEE Workshop on Micro Electro Mechanical Systems, Amsterdam, Netherlands, Jan. 1995, pp. 250-255.
6. T. Masuzawa, M. Fujino, K. Kobayashi and T. Susuki, Wire electrodischarge grinding for micromachining, Ann. CIRP, 34 (1985) 431-434.
7. T. Masuzawa, An approach to micromachining through machine tool technology, Proc. 2nd Int. Symp. on Micromachine and Human Science, Nagoya, Japan, Oct. 1991, pp. 47-52.
8. M. Komaraiah and P.N. Reddy, A study on the influence of workpiece properties in ultrasonic machining, Int. J. Mach. Tool Manufact., 33 (1993) 495-505.
9. X.-Q. Sun, T. Masuzawa, M. Fujino and K. Egashira, Micro-USM of brittle materials, Asian Electrical Machining Symp., Oita, Japan, Nov. 1995, pp. 31-35.