Powder blasting patterning technology for microfabrication of complex suspended structures in glass

Microelectronic Engineering

Volumn 67-68, Issue , 2003, Pages 557-565

  Pawlowski, Anne Gabrielle ^a   Belloy, Eric ^a   Sayah, Abdeljalil ^a   Gijs, Martin A M ^a  

^a EPFL   (Switzerland)

Author keywords

Erosion; Flexopolymer; Glass; Microfabrication; Photosensitive elastomer resist; Powder blasting; Suspended microstructure

Indexed keywords

ELASTOMERS; EROSION; GLASS; MASKS; MICROSTRUCTURE; POWDERS;

POWDER BLASTING PATTERNING TECHNOLOGY;

MICROELECTRONICS;

EID: 0037682250     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(03)00114-X     Document Type: Conference Paper

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