Design, fabrication and characterization of a bulk-PZT-actuated MEMS deformable mirror

Journal of Micromechanics and Microengineering

Volumn 17, Issue 12, 2007, Pages 2439-2446

  Xu, Xiao Hui ^a   Li, Bao Qing ^a   Feng, Yan ^a   Chu, Jia Ru ^a  

^a UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA   (China)

Author keywords

[No Author keywords available]

Indexed keywords

DEFORMATION; MEMS; MIRRORS; THICK FILMS;

FREQUENCY BANDWIDTH; THICK FILM ACTUATORS;

PIEZOELECTRIC ACTUATORS;

EID: 36949030817     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/12/008     Document Type: Article

References (20)

1. Gavel D 2006 MEMS for the next generation of giant astronomical telescopes Proc. SPIE 6113 611307
2. Gavel D 2007 MEMS development for astronomical instrumentation at the Lick Observatory for adaptive optics Proc. SPIE 6467 646702
3. Horsley D A, Park H, Laut S P and Werner J S 2005 Characterization for vision science applications of a bimorph deformable mirror using phase-shifting interferometry Proc. SPIE 5688 133-44
4. Cornelissen S A, Bierden P A and Bifano T G 2006 Development of a 4096 element MEMS continuous membrane deformable mirror for high contrast astronomical imaging Proc. SPIE 6306 630606
5. Carr E, Olivier S and Solgaard O 2006 Large-stroke self-aligned vertical comb drive actuators for adaptive optics applications Proc. SPIE 6113 61130T
6. Hishinuma Y and Yang E-H E 2006 Piezoelectric unimorph micro actuator arrays for single-crystal silicon continuous-membrane deformable mirror J. Microelectromech. Syst. 15 370-80
7. Yang E-H E, Hishinuma Y and Cheng J-G 2006 Thin-film piezoelectric unimorph actuator-based deformable mirror with a transferred silicon membrane J. Microelectromech. Syst. 15 1214-25
8. Menil F, Debeda H and Lucat C 2005 Screen-printed thick-films: from materials to functional devices J. Eur. Ceram. Soc. 25 2105-13
9. Yao K, He X J, Xu Y and Chen M 2005 Screen-printed piezoelectric ceramic thick films with sintering additives introduced through a liquid-phase approach Sensors Actuators A 118 342-8
10. Yoon Y S, Kima S H, Lee S J, Kim H K and Lee M J 2006 Fabrication and frequency response of dual-element ultrasonic transducer using PZT-5A thick film Sensors Actuators A 125 463-70
11. Bu M, Melvin T, Ensell G, Wilkinson J S and Evans A G R 2003 Design and theoretical evaluation of a novel microfluidic device to be used for PCR J. Micromech. Microeng. 13 125-30
12. Zhang T and Wang Q-M 2006 Performance evaluation of a valveless micropump driven by a ring-type piezoelectric actuator IEEE Trans. Ultrason. Ferroelectr. Freq. Control 53 463-73
13. Steel M R, Harrison F and Harper P G 1978 The piezoelectric bimorph: an experimental and theoretical study of its quasistatic response J. Phys. D: Appl. Phys. 11 979-89
14. Li S and Chen S 2003 Analytical analysis of a circular PZT actuator for valveless micropumps Sensors Actuators A 104 151-61
15. Tanaka K, Konishi T, Ide M and Sugiyama S 2006 Wafer bonding of lead zirconate titanate to Si using an intermediate gold layer for microdevice application J. Micromech. Microeng. 16 815-20
16. Park Y K, Park H W, Lee D J and Park J H 2002 A novel low-loss wafer-level packaging of the RF-MEMS devices 15th IEEE Int. Conf. on Microelectromech. Syst. pp 681-4
17. Vallin O, Jonsson K and Lindberg U 2005 Adhesion qualification methods for wafer bonding Mater. Sci. Eng. R 50 109-73
18. 3 thin films for applications in microelectromechanical system Japan. J. Appl. Phys. 43 3934-7
19. Takechi K, Kanoh H and Otsuki S 2006 Very high rate uniform glass etching with HF/HCl spray for transferring thin-film transistor arrays to flexible substrates Japan. Soc. Appl. Phys. 45 6008-10
20. Perez R, Agnus J, Clevy C, Hubert A and Chaillet N 2005 Modeling fabrication and validation of a high-performance 2-DoF piezoactuator for micromanipulation IEEE/ASME Trans. Mechatronics 10 161-71