A micromachining process for die-scale pattern transfer in ceramics and its application to bulk piezoelectric actuators

Journal of Microelectromechanical Systems

Volumn 15, Issue 3, 2006, Pages 605-612

  Li, Tao ^a   Gianchandani, Yogesh B ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

Ceramic micromachining; Microelectro discharge machining (EDM); Piezoelectric micro actuator; Ultrasonic micromachining

Indexed keywords

CERAMIC MATERIALS; ELECTRIC DISCHARGE MACHINING; ELECTROPLATING; LITHOGRAPHY; MICROACTUATORS; PIEZOELECTRIC MATERIALS; ULTRASONIC APPLICATIONS;

CERAMIC MICROMACHINING; MICROELECTRO-DISCHARGE MACHINING; PIEZOELECTRIC MICROACTUATORS; ULTRASONIC MICROMACHINING;

MICROMACHINING;

EID: 33745162573     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2006.876667     Document Type: Article

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