High-frequency (50-100MHz) medical ultrasound transducer arrays produced by micromachining bulk PZT materials

Proceedings - IEEE Ultrasonics Symposium

Volumn , Issue , 2008, Pages 690-693

  Liu, C G ^a   Wu, D W ^b   Zhou, Q F ^b   Djuth, F T ^a   Shung, K K ^b  

^a Geospace Research Inc   (United States)

^b UNIVERSITY OF SOUTHERN CALIFORNIA   (United States)

Author keywords

Bulk PZT; High frequency; Micromachining; Transducer array; Ultrasound

Indexed keywords

ADJACENT CHANNELS; BACKING LAYERS; BACKING MATERIALS; BULK PZT; CENTER FREQUENCY; CHLORINE-BASED PLASMA; ETCH DEPTH; ETCH RATES; HIGH FREQUENCY; HIGH FREQUENCY HF; MATCHING LAYER; MEDICAL ULTRASOUND; PARYLENE; PROCESSING TIME; PZT; PZT MATERIALS; TRANSDUCER ARRAY; ULTRASOUND; ULTRASOUND TRANSDUCER ARRAYS;

ACOUSTIC IMPEDANCE; ACOUSTIC WAVES; CHLORINE; COMPOSITE MICROMECHANICS; MICROMACHINING; PIEZOELECTRIC ACTUATORS; PIEZOELECTRIC MATERIALS; PIEZOELECTRIC TRANSDUCERS; SEMICONDUCTING LEAD COMPOUNDS; ULTRASONIC PROPAGATION; ULTRASONIC SCATTERING; ULTRASONIC TRANSDUCERS;

ULTRASONICS;

EID: 67649360320     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2008.0166     Document Type: Conference Paper

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