Transverse interdigitated electrode actuation of homogeneous bulk PZT

Journal of Microelectromechanical Systems

Volumn 21, Issue 6, 2012, Pages 1513-1518

  Hareesh, Prakruthi ^a   Misri, Isaac ^a   Yang, Shuang ^a,b   Devoe, Don L ^a  

^a UNIVERSITY OF MARYLAND   (United States)

^b JOHNS HOPKINS UNIVERSITY SCHOOL OF MEDICINE   (United States)

Author keywords

Microactuation; micropowder blasting; piezoelectric; poling

Indexed keywords

BULK PZT; ELECTRIC FIELD GRADIENTS; ELECTRODE GAP; HOMOGENEOUS LAYERS; INTER-DIGITATED ELECTRODES; LEAD ZIRCONATE TITANATE; MICROACTUATION; MICROFABRICATED; MICROFABRICATED CANTILEVERS; MICROPOWDER BLASTING; PIEZOELECTRIC; PIEZOELECTRIC MICRO-ACTUATORS; PIEZOELECTRIC SUBSTRATES; POLING; POLING CONDITIONS; PZT; QUASI-STATIC; RESONANT BEHAVIOR; SIMPLE METHOD;

BLASTING; ELECTRIC FIELDS; FINITE ELEMENT METHOD; MICROFABRICATION; NANOCANTILEVERS; OPTIMIZATION; PIEZOELECTRICITY; SEMICONDUCTING LEAD COMPOUNDS;

CHEMICAL SENSORS;

EID: 84870557388     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2012.2211575     Document Type: Article

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