Preparation of a high-quality PZT thick film with performance comparable to those of bulk materials for applications in MEMS

Journal of Micromechanics and Microengineering

Volumn 18, Issue 6, 2008, Pages

  Xu, Xiao Hui ^a   Chu, Jia Ru ^a  

^a UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA   (China)

Author keywords

[No Author keywords available]

Indexed keywords

EPOXY RESINS; FILM PREPARATION; MEMS; PERMITTIVITY; PIEZOELECTRIC MATERIALS; THICKNESS MEASUREMENT; WET ETCHING;

BULK CERAMICS; BULK MATERIALS;

THICK FILMS;

EID: 42549147460     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/6/065001     Document Type: Article

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