Introduction of powder blasting for sensor and microsystem applications

Sensors and Actuators, A: Physical

Volumn 84, Issue 3, 2000, Pages 330-337

  Belloy, E ^a   Walckiers, E ^a   Sayah, A ^a   Gijs, M A M ^a  

^a EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; EROSION; MECHATRONICS; POWDERS; SEPARATION;

MAGNETIC SENSOR APPLICATIONS; MAGNETIC SENSORS; MASK GEOMETRY EFFECTS; MICROFLUIDIC CHIPS; POWDER BLASTING;

MICROSENSORS;

EID: 0034272891     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(00)00390-3     Document Type: Article

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