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Volumn 19, Issue 6, 2001, Pages 2020-2025

Deep plasma etching of piezoelectric PZT with SF6

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; COMPOSITION EFFECTS; DEPOSITION; ELECTROPLATING; HEATING; NITROGEN; PHOTORESISTS; PIEZOELECTRIC MATERIALS; PLASMA ETCHING; REACTIVE ION ETCHING; SULFUR COMPOUNDS; SURFACE STRUCTURE;

EID: 0035519494     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1409392     Document Type: Article
Times cited : (35)

References (17)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.