ArF excimer laser micromachining of Pyrex, SiC and PZT for rapid prototyping of MEMS components

Sensors and Actuators, A: Physical

Volumn 136, Issue 2, 2007, Pages 554-563

  Desbiens, Jean Philippe ^a   Masson, Patrice ^a  

^a UNIVERSITÉ DE SHERBROOKE   (Canada)

Author keywords

3D microstructures; Excimer laser; MEMS prototyping; Piezoceramics; Pyrex; Silicon; Silicon carbide

Indexed keywords

EXCIMER LASERS; MEMS; MICROMACHINING; MICROSTRUCTURE; RAPID PROTOTYPING; SILICON CARBIDE;

3D MICROSTRUCTURES; MACHINING PARAMETERS; MEMS PROTOTYPING; PYREX;

PIEZOELECTRIC CERAMICS;

EID: 34247616734     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.01.002     Document Type: Article

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