Study on wet-etching of PZT thin film

Digest of Papers - Microprocesses and Nanotechnology 2003 - 2003 International Microprocesses and Nanotechnology Conference, MNC 2003

Volumn , Issue , 2003, Pages 248-249

  Zheng, Kelu ^a   Lu, Jian ^a   Chu, Jiaru ^a  

^a UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA   (China)

Author keywords

[No Author keywords available]

Indexed keywords

FILMS; NANOTECHNOLOGY; THIN FILMS;

MEMS APPLICATIONS; PIEZOELECTRIC PROPERTY; PZT; PZT THIN FILM;

WET ETCHING;

EID: 84949200854     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IMNC.2003.1268739     Document Type: Conference Paper

References (2)

1. M. G. Kang, K. T. Kim et al. " Recovery of plasma-induced damage in PZT thin film with 9 gas annealing", Thin Solid Films, 398-399, p448-453, (2001)
2. S. Mancha. "Chemical etchine of thin film PLZT, Ferroelectrics, 135, p 131-137, ( 1992)