Fabrication and characterization of annular thickness mode piezoelectric micro ultrasonic transducers

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 54, Issue 12, 2007, Pages 2462-2467

  Dorey, Robert A ^a   Dauchy, Florent ^a   Wang, Dazhi ^a   Berriet, Rémi ^b  

^a CRANFIELD UNIVERSITY   (United Kingdom)

^b Imasonic   (France)

Author keywords

[No Author keywords available]

Indexed keywords

BANDWIDTH; CERAMIC MATERIALS; CHARACTERIZATION; FABRICATION; MICROMACHINING; SOL-GEL PROCESS; ULTRASONIC TRANSDUCERS;

CERAMIC COMPOSITES; LOW TEMPERATURE; PIEZOELECTRIC MICRO ULTRASONIC TRANSDUCERS; PULSE ECHO MEASUREMENTS;

PIEZOELECTRIC TRANSDUCERS;

ARTICLE; ECHOGRAPHY; ELECTROCHEMISTRY; ELECTRONICS; EQUIPMENT; EQUIPMENT DESIGN; EVALUATION; INSTRUMENTATION; METHODOLOGY; REPRODUCIBILITY; SENSITIVITY AND SPECIFICITY; TRANSDUCER;

ELECTROCHEMISTRY; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; MINIATURIZATION; REPRODUCIBILITY OF RESULTS; SENSITIVITY AND SPECIFICITY; TRANSDUCERS; ULTRASONOGRAPHY;

EID: 40649127443     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2007.560     Document Type: Conference Paper

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