The surface chemistry of atomic layer depositions of solid thin films

Journal of Physical Chemistry Letters

Volumn 3, Issue 10, 2012, Pages 1301-1309

  Zaera, Francisco ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALD PRECURSOR; ATOMIC LEVELS; CHEMICAL PROCESS; COMPLEX TOPOGRAPHIES; COREACTANTS; DEPOSITED FILMS; METAL ORGANIC PRECURSORS; SOLID THIN FILMS; SURFACE CONVERSIONS; SURFACE SITES; THREE-DIMENSIONAL STRUCTURE;

STOICHIOMETRY; SURFACE CHEMISTRY; THIN FILMS;

ATOMIC LAYER DEPOSITION;

EID: 84862105500     PISSN: None     EISSN: 19487185     Source Type: Journal    
DOI: 10.1021/jz300125f     Document Type: Review

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