Transmission electron microscopy studies of atomic layer deposition TiO2 films grown on silicon

Thin Solid Films

Volumn 441, Issue 1-2, 2003, Pages 85-95

  Mitchell, D R G ^a   Attard, D J ^a   Triani, G ^a  

^a AUSTRALIAN NUCLEAR SCIENCE AND TECHNOLOGY ORGANISATION   (Australia)

Author keywords

Coatings; Crystallisation; Titanium oxide; Transmission electron microscopy

Indexed keywords

CRYSTALLIZATION; DEPOSITION; FILM GROWTH; GRAIN SIZE AND SHAPE; NUCLEATION; SILICON; SUBSTRATES; TITANIUM DIOXIDE; TRANSMISSION ELECTRON MICROSCOPY;

ATOMIC LAYER DEPOSITION;

THIN FILMS;

EID: 0042420887     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(03)00877-0     Document Type: Article

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